ATE397205T1 - Verfahren und vorrichtung zur bestimmung von teilchen in reaktiven und toxischen gasen - Google Patents

Verfahren und vorrichtung zur bestimmung von teilchen in reaktiven und toxischen gasen

Info

Publication number
ATE397205T1
ATE397205T1 AT99124854T AT99124854T ATE397205T1 AT E397205 T1 ATE397205 T1 AT E397205T1 AT 99124854 T AT99124854 T AT 99124854T AT 99124854 T AT99124854 T AT 99124854T AT E397205 T1 ATE397205 T1 AT E397205T1
Authority
AT
Austria
Prior art keywords
gas
pressurized gas
reactive
distribution line
toxic gases
Prior art date
Application number
AT99124854T
Other languages
English (en)
Inventor
Wayne Thomas Mcdermott
Richard Carl Ockovic
Original Assignee
Air Prod & Chem
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Prod & Chem filed Critical Air Prod & Chem
Application granted granted Critical
Publication of ATE397205T1 publication Critical patent/ATE397205T1/de

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06Investigating concentration of particle suspensions
    • G01N15/065Investigating concentration of particle suspensions using condensation nuclei counters
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00Nanotechnology
    • Y10S977/902Specified use of nanostructure
    • Y10S977/932Specified use of nanostructure for electronic or optoelectronic application
    • Y10S977/953Detector using nanostructure

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
AT99124854T 1998-12-21 1999-12-15 Verfahren und vorrichtung zur bestimmung von teilchen in reaktiven und toxischen gasen ATE397205T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/217,113 US6469780B1 (en) 1998-12-21 1998-12-21 Apparatus and method for detecting particles in reactive and toxic gases

Publications (1)

Publication Number Publication Date
ATE397205T1 true ATE397205T1 (de) 2008-06-15

Family

ID=22809723

Family Applications (1)

Application Number Title Priority Date Filing Date
AT99124854T ATE397205T1 (de) 1998-12-21 1999-12-15 Verfahren und vorrichtung zur bestimmung von teilchen in reaktiven und toxischen gasen

Country Status (9)

Country Link
US (1) US6469780B1 (de)
EP (1) EP1014075B1 (de)
JP (1) JP3795718B2 (de)
KR (1) KR100346933B1 (de)
AT (1) ATE397205T1 (de)
DE (1) DE69938813D1 (de)
ES (1) ES2306496T3 (de)
SG (1) SG78406A1 (de)
TW (1) TWI232928B (de)

Families Citing this family (33)

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KR100383547B1 (ko) * 2000-09-25 2003-05-12 학교법인 한양학원 초미세입자 응축핵계수기
US6639671B1 (en) * 2002-03-01 2003-10-28 Msp Corporation Wide-range particle counter
US6829044B2 (en) * 2002-04-24 2004-12-07 Msp Corporation Compact, high-efficiency condensation nucleus counter
US7214274B2 (en) * 2003-03-17 2007-05-08 Tokyo Electron Limited Method and apparatus for thermally insulating adjacent temperature controlled processing chambers
US7342660B2 (en) * 2003-09-25 2008-03-11 Deka Products Limited Partnership Detection system and method for aerosol delivery
US7867779B2 (en) * 2005-02-03 2011-01-11 Air Products And Chemicals, Inc. System and method comprising same for measurement and/or analysis of particles in gas stream
US7537018B1 (en) * 2005-05-03 2009-05-26 Waters Investments Limited Method and apparatus for controlling partial vapor pressure in a sorption analyzer
EP1924836B1 (de) * 2005-06-28 2017-11-29 Koninklijke Philips N.V. Sensor für ultrafeine teilchen
US7777867B2 (en) * 2006-12-22 2010-08-17 Thermo Fisher Scientific Devices, methods, and systems for detecting particles in aerosol gas streams
KR100895542B1 (ko) * 2007-07-05 2009-05-06 안강호 응축핵 계수기
WO2009117312A2 (en) * 2008-03-19 2009-09-24 Waters Technologies Corporation Apparatus and methods for making analyte particles
WO2010083513A2 (en) * 2009-01-16 2010-07-22 University Of Cincinnati Continuous droplet generator devices and methods
DE102009001860A1 (de) * 2009-03-25 2010-09-30 Endress + Hauser Conducta Gesellschaft für Mess- und Regeltechnik mbH + Co. KG Verfahren zum Bestimmen einer Anzahl von Tropfen
US8801838B2 (en) * 2010-08-27 2014-08-12 Aerosol Dynamics Inc. Advanced laminar flow water condensation technology for ultrafine particles
US9579662B2 (en) 2010-08-27 2017-02-28 Aerosol Dynamics Inc. Condensation-evaporator nanoparticle charger
US9610531B2 (en) 2010-08-27 2017-04-04 Aerosol Dynamics Inc. Wick wetting for water condensation systems
RU2475721C2 (ru) * 2011-04-27 2013-02-20 Открытое акционерное общество "Электростальское научно-производственное объединение "Неорганика" (ОАО "ЭНПО "Неорганика") Установка для измерения микропримесей в потоке газа
CN104678112A (zh) * 2015-02-05 2015-06-03 中国科学院合肥物质科学研究院 一种串联差分电迁移率分析仪控制系统及控制方法
TWI584344B (zh) * 2015-08-12 2017-05-21 國立中山大學 可調式氣動聚焦構造
JP6918806B2 (ja) * 2016-01-08 2021-08-11 ティーエスアイ インコーポレイテッド ウェアラブル・マスク・フィット・モニタ
CN105865856B (zh) * 2016-06-20 2018-07-27 国家电网公司 电气设备中sf6固体分解产物采集分析系统
CN105954069B (zh) * 2016-06-20 2018-07-27 国家电网公司 电气设备中sf6固体分解产物采样器
AT519913B1 (de) * 2017-05-03 2019-11-15 Avl List Gmbh Kondensationspartikelzähler mit Lichtleiter
AT519912B1 (de) * 2017-05-03 2019-11-15 Avl List Gmbh Kondensationspartikelzähler mit Trennelement
US11029240B2 (en) 2018-10-12 2021-06-08 Aerosol Dynamics Inc. Wick moisture sensor for airborne particle condensational growth systems
CN108535168B (zh) * 2018-03-12 2023-11-28 清华大学 一种小型颗粒物冷凝生长计数器
JP2021527198A (ja) 2018-06-07 2021-10-11 センサーズ インコーポレイテッド 粒子濃度分析システム及び方法
CN109116008A (zh) * 2018-06-29 2019-01-01 南方电网科学研究院有限责任公司 一种c4f7n气体的毒性试验装置
US11237091B2 (en) 2018-11-01 2022-02-01 Aerosol Dynamics Inc. Humidity conditioning for water-based condensational growth of ultrafine particles
EP3835754A1 (de) * 2019-12-09 2021-06-16 ETH Zurich Verfahren und vorrichtung zur bestimmung einer partikeloberfläche
FR3123725A1 (fr) * 2021-06-04 2022-12-09 Valérie COMPAN Dispositif mobile et autonome et procédé de detection d’analytes dans l’air
CN113720749B (zh) * 2021-08-31 2023-01-17 北京航空航天大学 一种宽温纳米颗粒计数器
CN114646578B (zh) * 2022-03-17 2025-05-30 北京纳颗环境科技有限公司 一种便携式冷凝生长计数器

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US3632210A (en) 1969-06-19 1972-01-04 Environment One Corp Variable rate continuous flow condensation nuclei meter having adjustable expansion period and improved gain
US3806248A (en) 1973-02-21 1974-04-23 Atomic Energy Commission Continuous flow condensation nuclei counter
US4293217A (en) 1980-02-06 1981-10-06 The United States Of America As Represented By The Secretary Of The Army Continuous-flow condensation nuclei counter and process
US4790650A (en) 1987-04-17 1988-12-13 Tsi Incorporated Condensation nucleus counter
US5026155A (en) 1989-09-06 1991-06-25 Air Products And Chemicals, Inc. Process for sizing particles using condensation nucleus counting
US5239356A (en) * 1990-06-20 1993-08-24 Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung Ev Condensation nucleus counter
US5231865A (en) 1992-01-02 1993-08-03 Air Products And Chemicals, Inc. Diffusion gas diluter
US5675405A (en) * 1996-08-12 1997-10-07 Met One, Inc. Condensation nucleus counter employing supersaturation by thermal differentiation
US5872622A (en) * 1996-08-12 1999-02-16 Met One, Inc. Condensation nucleus counter having vapor stabilization and working fluid recovery
US5659388A (en) * 1996-09-11 1997-08-19 Vlsi Standards, Inc. Method and apparatus for operating a condensation nucleus counter with improved counting stability and accuracy over a variable detection threshold
US5903338A (en) * 1998-02-11 1999-05-11 Particle Measuring Systems, Inc. Condensation nucleus counter using mixing and cooling

Also Published As

Publication number Publication date
ES2306496T3 (es) 2008-11-01
EP1014075B1 (de) 2008-05-28
TWI232928B (en) 2005-05-21
EP1014075A1 (de) 2000-06-28
US6469780B1 (en) 2002-10-22
JP3795718B2 (ja) 2006-07-12
KR100346933B1 (ko) 2002-07-31
JP2000186994A (ja) 2000-07-04
KR20000052469A (ko) 2000-08-25
DE69938813D1 (de) 2008-07-10
SG78406A1 (en) 2001-02-20

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