ATE398499T1 - Herstellung von feinkörnigen elektroplattierungsanoden - Google Patents

Herstellung von feinkörnigen elektroplattierungsanoden

Info

Publication number: ATE398499T1
Authority: AT; Austria
Prior art keywords: production; fine grain; electro plating; billet; plating anodes
Prior art date: 2001-07-02

Application number

AT01973744T

Other languages

English (en)

Inventor

William Bishop

Original Assignee

Brush Wellman

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2001-07-02

Filing date

2001-09-20

Publication date

2008-07-15

2001-09-20 Application filed by Brush Wellman filed Critical Brush Wellman

2008-07-15 Application granted granted Critical

2008-07-15 Publication of ATE398499T1 publication Critical patent/ATE398499T1/de

Links

238000009713 electroplating Methods 0.000 title abstract 2
238000004519 manufacturing process Methods 0.000 title 1
RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 2
229910052802 copper Inorganic materials 0.000 abstract 2
239000010949 copper Substances 0.000 abstract 2
238000000034 method Methods 0.000 abstract 2
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
238000005266 casting Methods 0.000 abstract 1
239000002184 metal Substances 0.000 abstract 1
229910052751 metal Inorganic materials 0.000 abstract 1
229910052710 silicon Inorganic materials 0.000 abstract 1
239000010703 silicon Substances 0.000 abstract 1
239000007787 solid Substances 0.000 abstract 1
235000012431 wafers Nutrition 0.000 abstract 1

Classifications

- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
- C25B11/00—Electrodes; Manufacture thereof not otherwise provided for
- C25B11/04—Electrodes; Manufacture thereof not otherwise provided for characterised by the material
- C25B11/042—Electrodes formed of a single material
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
- B22D7/00—Casting ingots, e.g. from ferrous metals
- B22D7/005—Casting ingots, e.g. from ferrous metals from non-ferrous metals
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
- C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
- C22F1/08—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of copper or alloys based thereon
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/10—Electrodes, e.g. composition, counter electrode
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49972—Method of mechanical manufacture with separating, localizing, or eliminating of as-cast defects from a metal casting [e.g., anti-pipe]
- Y10T29/49973—Compressing ingot while still partially molten
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49972—Method of mechanical manufacture with separating, localizing, or eliminating of as-cast defects from a metal casting [e.g., anti-pipe]
- Y10T29/49975—Removing defects
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/4998—Combined manufacture including applying or shaping of fluent material
- Y10T29/49988—Metal casting
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/4998—Combined manufacture including applying or shaping of fluent material
- Y10T29/49988—Metal casting
- Y10T29/49991—Combined with rolling

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Organic Chemistry (AREA)
Materials Engineering (AREA)
Metallurgy (AREA)
Mechanical Engineering (AREA)
Chemical Kinetics & Catalysis (AREA)
Electrochemistry (AREA)
Crystallography & Structural Chemistry (AREA)
Physics & Mathematics (AREA)
Thermal Sciences (AREA)
Metal Extraction Processes (AREA)
Electroplating Methods And Accessories (AREA)
Metal Rolling (AREA)
Electrolytic Production Of Metals (AREA)
Electrodes For Compound Or Non-Metal Manufacture (AREA)
Electroplating And Plating Baths Therefor (AREA)

AT01973744T 2001-07-02 2001-09-20 Herstellung von feinkörnigen elektroplattierungsanoden ATE398499T1 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US09/897,842 US6627055B2 (en)	2001-07-02	2001-07-02	Manufacture of fine-grained electroplating anodes

Publications (1)

Publication Number	Publication Date
ATE398499T1 true ATE398499T1 (de)	2008-07-15

Family

ID=25408522

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AT01973744T ATE398499T1 (de)	2001-07-02	2001-09-20	Herstellung von feinkörnigen elektroplattierungsanoden

Country Status (9)

Country	Link
US (1)	US6627055B2 (de)
EP (1)	EP1444064B1 (de)
JP (1)	JP4898087B2 (de)
KR (2)	KR100967863B1 (de)
CN (1)	CN100506431C (de)
AT (1)	ATE398499T1 (de)
AU (1)	AU2001293295A1 (de)
DE (1)	DE60134502D1 (de)
WO (1)	WO2003004199A2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US6830673B2 (en) *	2002-01-04	2004-12-14	Applied Materials, Inc.	Anode assembly and method of reducing sludge formation during electroplating
JP2004353011A (ja) *	2003-05-27	2004-12-16	Ykk Corp	電極材料及びその製造方法
US20070227688A1 (en) *	2004-06-15	2007-10-04	Tosoh Smd, Inc.	Continuous Casting of Copper to Form Sputter Targets
US7837851B2 (en) *	2005-05-25	2010-11-23	Applied Materials, Inc.	In-situ profile measurement in an electroplating process
JP5499933B2 (ja) *	2010-01-12	2014-05-21	三菱マテリアル株式会社	電気銅めっき用含リン銅アノード、その製造方法および電気銅めっき方法
CN102485924B (zh) *	2010-12-06	2013-12-11	有研亿金新材料股份有限公司	一种集成电路用磷铜阳极的制备方法
CN102517621B (zh) *	2011-12-31	2014-10-22	宁波江丰电子材料股份有限公司	铜-磷合金阳极的制备方法
CN102517622B (zh) *	2011-12-31	2014-10-22	宁波江丰电子材料股份有限公司	铜-磷合金阳极的制备方法
EP2803423B1 (de) *	2013-02-04	2023-06-07	La Farga Tub, S.L.	Kupfer-rohr für die bauindustrie und dessen herstellungsverfahren

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4315538A (en) *	1980-03-31	1982-02-16	Nielsen Thomas D	Method and apparatus to effect a fine grain size in continuous cast metals
US4789648A (en)	1985-10-28	1988-12-06	International Business Machines Corporation	Method for producing coplanar multi-level metal/insulator films on a substrate and for forming patterned conductive lines simultaneously with stud vias
JPH04505985A (ja) *	1989-05-31	1992-10-15	シーメンスアクチエンゲゼルシヤフト	真空スイツチ用ＣｕＣｒ接触片の製法並びに付属接触片
DE4103963A1 (de) *	1991-02-09	1992-08-13	Kabelmetal Ag	Verfahren zum kontinuierlichen stranggiessen von kupferlegierungen
US5279353A (en)	1992-06-04	1994-01-18	Nielsen Sr William D	Method and apparatus to effect a fine grain size in continuous cast metals
US5539255A (en)	1995-09-07	1996-07-23	International Business Machines Corporation	Semiconductor structure having self-aligned interconnection metallization formed from a single layer of metal
JPH10195611A (ja) *	1996-12-27	1998-07-28	Dowa Mining Co Ltd	結晶方位の制御されたｆｃｃ金属及びその製造方法
JP3403918B2 (ja) *	1997-06-02	2003-05-06	株式会社ジャパンエナジー	高純度銅スパッタリングタ−ゲットおよび薄膜
US6500284B1 (en) *	1998-06-10	2002-12-31	Suraltech, Inc.	Processes for continuously producing fine grained metal compositions and for semi-solid forming of shaped articles
US6192969B1 (en) *	1999-03-22	2001-02-27	Asarco Incorporated	Casting of high purity oxygen free copper

2001
- 2001-07-02 US US09/897,842 patent/US6627055B2/en not_active Expired - Lifetime
- 2001-09-20 AT AT01973744T patent/ATE398499T1/de active
- 2001-09-20 KR KR1020087027395A patent/KR100967863B1/ko not_active Expired - Fee Related
- 2001-09-20 CN CNB018234437A patent/CN100506431C/zh not_active Expired - Fee Related
- 2001-09-20 JP JP2003510201A patent/JP4898087B2/ja not_active Expired - Fee Related
- 2001-09-20 DE DE60134502T patent/DE60134502D1/de not_active Expired - Lifetime
- 2001-09-20 KR KR1020037017205A patent/KR100888838B1/ko not_active Expired - Fee Related
- 2001-09-20 WO PCT/US2001/042234 patent/WO2003004199A2/en not_active Ceased
- 2001-09-20 AU AU2001293295A patent/AU2001293295A1/en not_active Abandoned
- 2001-09-20 EP EP01973744A patent/EP1444064B1/de not_active Expired - Lifetime

Also Published As

Publication number	Publication date
US6627055B2 (en)	2003-09-30
US20030000604A1 (en)	2003-01-02
CN1630567A (zh)	2005-06-22
DE60134502D1 (de)	2008-07-31
WO2003004199A2 (en)	2003-01-16
WO2003004199A3 (en)	2004-05-27
KR100888838B1 (ko)	2009-03-17
KR20040015767A (ko)	2004-02-19
AU2001293295A1 (en)	2003-01-21
JP2005504636A (ja)	2005-02-17
EP1444064A2 (de)	2004-08-11
EP1444064B1 (de)	2008-06-18
KR20080102324A (ko)	2008-11-24
CN100506431C (zh)	2009-07-01
KR100967863B1 (ko)	2010-07-05
JP4898087B2 (ja)	2012-03-14

Legal Events

Date

Code

Title

Description

2008-12-15

UEP

Publication of translation of european patent specification

Ref document number: 1444064

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