ATE398832T1 - Transport- und lagerungssystem für halbleiterscheibenbehälter - Google Patents

Transport- und lagerungssystem für halbleiterscheibenbehälter

Info

Publication number
ATE398832T1
ATE398832T1 AT03769576T AT03769576T ATE398832T1 AT E398832 T1 ATE398832 T1 AT E398832T1 AT 03769576 T AT03769576 T AT 03769576T AT 03769576 T AT03769576 T AT 03769576T AT E398832 T1 ATE398832 T1 AT E398832T1
Authority
AT
Austria
Prior art keywords
wafer
wafer container
transfer mechanism
tools
row
Prior art date
Application number
AT03769576T
Other languages
English (en)
Inventor
Bernard Poli
Bernard Gaudon
Christophe Lero
Florent Haddad
Original Assignee
Recif Technologies
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Recif Technologies filed Critical Recif Technologies
Application granted granted Critical
Publication of ATE398832T1 publication Critical patent/ATE398832T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3408—Docking arrangements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3404—Storage means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
AT03769576T 2002-09-06 2003-09-05 Transport- und lagerungssystem für halbleiterscheibenbehälter ATE398832T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0211049A FR2844258B1 (fr) 2002-09-06 2002-09-06 Systeme de transport et stockage de conteneurs de plaques de semi-conducteur, et mecanisme de transfert

Publications (1)

Publication Number Publication Date
ATE398832T1 true ATE398832T1 (de) 2008-07-15

Family

ID=31725886

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03769576T ATE398832T1 (de) 2002-09-06 2003-09-05 Transport- und lagerungssystem für halbleiterscheibenbehälter

Country Status (11)

Country Link
US (1) US20040047714A1 (de)
EP (1) EP1561236B1 (de)
JP (1) JP2005538541A (de)
KR (1) KR20050057250A (de)
CN (1) CN1698178A (de)
AT (1) ATE398832T1 (de)
AU (1) AU2003278268A1 (de)
CA (1) CA2497310A1 (de)
DE (1) DE60321707D1 (de)
FR (1) FR2844258B1 (de)
WO (1) WO2004023530A2 (de)

Families Citing this family (48)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH696829A5 (de) * 2003-07-11 2007-12-14 Tec Sem Ag Beschickungseinrichtung für Waferverarbeitungsprozesse.
WO2005022602A2 (en) * 2003-08-29 2005-03-10 Crossing Automation, Inc. A method and apparatus for semiconductor processing
JP4045451B2 (ja) * 2003-12-26 2008-02-13 村田機械株式会社 天井走行車システム
JP4123383B2 (ja) * 2004-08-12 2008-07-23 村田機械株式会社 天井走行車システム
JP4266197B2 (ja) * 2004-10-19 2009-05-20 東京エレクトロン株式会社 縦型熱処理装置
US7513822B2 (en) 2005-06-18 2009-04-07 Flitsch Frederick A Method and apparatus for a cleanspace fabricator
US9159592B2 (en) 2005-06-18 2015-10-13 Futrfab, Inc. Method and apparatus for an automated tool handling system for a multilevel cleanspace fabricator
US10651063B2 (en) 2005-06-18 2020-05-12 Frederick A. Flitsch Methods of prototyping and manufacturing with cleanspace fabricators
US9059227B2 (en) 2005-06-18 2015-06-16 Futrfab, Inc. Methods and apparatus for vertically orienting substrate processing tools in a clean space
US9339900B2 (en) * 2005-08-18 2016-05-17 Futrfab, Inc. Apparatus to support a cleanspace fabricator
US10627809B2 (en) 2005-06-18 2020-04-21 Frederick A. Flitsch Multilevel fabricators
US11024527B2 (en) 2005-06-18 2021-06-01 Frederick A. Flitsch Methods and apparatus for novel fabricators with Cleanspace
US9457442B2 (en) 2005-06-18 2016-10-04 Futrfab, Inc. Method and apparatus to support process tool modules in a cleanspace fabricator
US7467024B2 (en) * 2005-08-26 2008-12-16 Flitsch Frederick A Method and apparatus for an elevator system for a multilevel cleanspace fabricator
DE102006008932A1 (de) * 2006-02-22 2007-08-23 Bellheimer Metallwerk Gmbh Lagerliftanordnung
US20070297885A1 (en) * 2006-06-27 2007-12-27 Jean Michel Processe Product designed to be used with handling system
JP4849331B2 (ja) * 2006-11-14 2012-01-11 株式会社ダイフク 物品搬送設備
JP4670808B2 (ja) * 2006-12-22 2011-04-13 ムラテックオートメーション株式会社 コンテナの搬送システム及び測定用コンテナ
JP4796024B2 (ja) * 2007-08-30 2011-10-19 東京エレクトロン株式会社 容器交換システム及び容器交換方法
WO2010135205A2 (en) * 2009-05-18 2010-11-25 Crossing Automation, Inc. Integrated systems for interfacing with substrate container storage systems
US8882433B2 (en) 2009-05-18 2014-11-11 Brooks Automation, Inc. Integrated systems for interfacing with substrate container storage systems
JP5429570B2 (ja) * 2010-03-08 2014-02-26 株式会社ダイフク 物品搬送設備
JP5440871B2 (ja) * 2010-08-20 2014-03-12 株式会社ダイフク 容器保管設備
KR101418812B1 (ko) * 2012-10-31 2014-07-16 크린팩토메이션 주식회사 웨이퍼 퍼지 가능한 천장 보관 장치
US12189828B2 (en) 2013-01-05 2025-01-07 Frederick A. Flitsch Customized smart devices and touchscreen devices and cleanspace manufacturing methods to make them
KR102174332B1 (ko) * 2014-07-30 2020-11-04 삼성전자주식회사 반도체 제조 라인의 스토커 및 상기 스토커를 이용하여 웨이퍼를 이송하는 방법
US20180155126A1 (en) * 2015-04-22 2018-06-07 Integrated Dynamics Engineering Gmbh Service cart
KR102129837B1 (ko) * 2016-03-22 2020-07-03 야마하 모터 로보틱스 홀딩스 가부시키가이샤 기판 공급 유닛 및 본딩 장치
CN105775543B (zh) * 2016-05-05 2017-09-29 傅筱萸 电力安全工器具存取装置
CN107651351B (zh) * 2016-05-05 2020-04-21 国网山东省电力公司东营供电公司 智能型电力工器具收纳取用设备
CN105936398B (zh) * 2016-06-23 2018-04-13 国网山东省电力公司济阳县供电公司 电力绝缘杆存取设备
CN105858145B (zh) * 2016-06-23 2018-01-26 国网山东省电力公司济阳县供电公司 电力工器具存取装置
US10928792B2 (en) * 2016-07-25 2021-02-23 Leridge Corporation Parallel manufacturing systems and methods
JP6693356B2 (ja) * 2016-09-09 2020-05-13 株式会社ダイフク 物品搬送装置
US12006143B2 (en) * 2017-11-14 2024-06-11 Hai Robotics Co., Ltd. Handling robot
CA3084526C (en) 2017-11-14 2024-02-20 Hai Robotics Co., Ltd. Handling robot and method for retrieving inventory item based on handling robot
US11465840B2 (en) 2017-11-14 2022-10-11 Hai Robotics Co., Ltd. Handling robot
US11396424B2 (en) 2017-11-14 2022-07-26 Hai Robotics Co., Ltd. Handling robot
US12330870B2 (en) 2017-11-14 2025-06-17 Hai Robotics Co., Ltd. Handling robot
US12103771B2 (en) 2017-11-14 2024-10-01 Hai Robotics Co., Ltd. Handling robot
WO2019140445A2 (en) 2018-01-15 2019-07-18 Alliance For Sustainable Energy, Llc Hydride enhanced growth rates in hydride vapor phase epitaxy
US11597598B2 (en) 2019-02-01 2023-03-07 Hai Robotics Co., Ltd. Handling robot
US11542135B2 (en) 2019-02-01 2023-01-03 Hai Robotics Co., Ltd. Handling robot
US12325931B2 (en) 2019-06-13 2025-06-10 Alliance For Sustainable Energy, Llc Nitrogen-enabled high growth rates in hydride vapor phase epitaxy
US20200392645A1 (en) * 2019-06-13 2020-12-17 Alliance For Sustainable Energy, Llc Hydride vapor phase epitaxy reactors
CN114242632A (zh) * 2020-06-28 2022-03-25 上海果纳半导体技术有限公司 半导体设备的载入装置以及半导体设备
CN113257723B (zh) * 2021-07-08 2022-04-22 北京北方华创微电子装备有限公司 半导体工艺设备
CN115709898B (zh) * 2022-10-25 2024-06-28 张婷 一种药剂科用取药装置

Family Cites Families (69)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3782565A (en) * 1971-12-23 1974-01-01 J Doran Automated handling system for container held material
US4532970A (en) * 1983-09-28 1985-08-06 Hewlett-Packard Company Particle-free dockable interface for integrated circuit processing
US4674939A (en) * 1984-07-30 1987-06-23 Asyst Technologies Sealed standard interface apparatus
US4636128A (en) * 1984-08-30 1987-01-13 Texas Instruments Incorporated Semiconductor slice cassette transport unit
FR2573908B1 (fr) * 1984-11-26 1986-12-26 Cogema Dispositif de transfert a double barriere etanche entre un conteneur et une enceinte de confinement
US4705444A (en) * 1985-07-24 1987-11-10 Hewlett-Packard Company Apparatus for automated cassette handling
DE3637880C2 (de) * 1986-11-06 1994-09-01 Meissner & Wurst Transportierbares Behältnis zur Handhabung von Halbleiterelementen während ihrer Herstellung sowie Verfahren zur partikelfreien Übergabe von Produkten
US4964776A (en) * 1987-12-01 1990-10-23 Tsubakimoto Chain Co. Article transfer and storage system
JPH0797564B2 (ja) * 1990-02-21 1995-10-18 国際電気株式会社 縦型半導体製造装置
JP2525284B2 (ja) * 1990-10-22 1996-08-14 ティーディーケイ株式会社 クリ―ン搬送方法及び装置
JPH088290B2 (ja) * 1990-11-02 1996-01-29 国際電気株式会社 縦型拡散・ｃｖｄ装置のウェーハカセットロード・アンロード装置
JPH081923B2 (ja) * 1991-06-24 1996-01-10 ティーディーケイ株式会社 クリーン搬送方法及び装置
US5387265A (en) * 1991-10-29 1995-02-07 Kokusai Electric Co., Ltd. Semiconductor wafer reaction furnace with wafer transfer means
US5256204A (en) * 1991-12-13 1993-10-26 United Microelectronics Corporation Single semiconductor water transfer method and manufacturing system
US5409348A (en) * 1992-05-15 1995-04-25 Tokyo Electron Limited Substrate transfer method
US5378145A (en) * 1992-07-15 1995-01-03 Tokyo Electron Kabushiki Kaisha Treatment system and treatment apparatus
JP3275390B2 (ja) * 1992-10-06 2002-04-15 神鋼電機株式会社 可搬式密閉コンテナ流通式の自動搬送システム
JP3177035B2 (ja) * 1992-11-26 2001-06-18 東京エレクトロン株式会社 縦型熱処理装置
JP3258748B2 (ja) * 1993-02-08 2002-02-18 東京エレクトロン株式会社 熱処理装置
US5527390A (en) * 1993-03-19 1996-06-18 Tokyo Electron Kabushiki Treatment system including a plurality of treatment apparatus
KR100221983B1 (ko) * 1993-04-13 1999-09-15 히가시 데쓰로 처리장치
US5344365A (en) * 1993-09-14 1994-09-06 Sematech, Inc. Integrated building and conveying structure for manufacturing under ultraclean conditions
US5645419A (en) * 1994-03-29 1997-07-08 Tokyo Electron Kabushiki Kaisha Heat treatment method and device
WO1995030239A2 (en) * 1994-04-28 1995-11-09 Semitool, Incorporated Semiconductor processing system with wafer container docking and loading station
US5544421A (en) * 1994-04-28 1996-08-13 Semitool, Inc. Semiconductor wafer processing system
EP0757844A1 (de) * 1994-04-28 1997-02-12 Semitool, Inc. Verarbeitungssysteme für halbleiter
JP3239977B2 (ja) * 1994-05-12 2001-12-17 株式会社日立国際電気 半導体製造装置
JP3331746B2 (ja) * 1994-05-17 2002-10-07 神鋼電機株式会社 搬送システム
US5984610A (en) * 1995-03-07 1999-11-16 Fortrend Engineering Corporation Pod loader interface
ES2229247T3 (es) * 1995-03-28 2005-04-16 Brooks Automation Gmbh Estacion de carga y descarga para instalaciones de tratamiento de semiconductores.
JP3478364B2 (ja) * 1995-06-15 2003-12-15 株式会社日立国際電気 半導体製造装置
US5609459A (en) * 1995-07-06 1997-03-11 Brooks Automation, Inc. Door drive mechanisms for substrate carrier and load lock
US5664925A (en) * 1995-07-06 1997-09-09 Brooks Automation, Inc. Batchloader for load lock
US5613821A (en) * 1995-07-06 1997-03-25 Brooks Automation, Inc. Cluster tool batchloader of substrate carrier
US5788458A (en) * 1995-07-10 1998-08-04 Asyst Technologies, Inc. Method and apparatus for vertical transfer of a semiconductor wafer cassette
US5895191A (en) * 1995-08-23 1999-04-20 Asyst Technologies Sealable, transportable container adapted for horizontal loading and unloading
US5810537A (en) * 1995-10-18 1998-09-22 Bye/Oasis Engineering Inc. Isolation chamber transfer apparatus
JPH09153533A (ja) * 1995-12-01 1997-06-10 Mitsubishi Electric Corp 半導体ウエハ保管システムおよびそのシステムを使用した半導体装置の製造方式
US5752796A (en) * 1996-01-24 1998-05-19 Muka; Richard S. Vacuum integrated SMIF system
US5674039A (en) * 1996-07-12 1997-10-07 Fusion Systems Corporation System for transferring articles between controlled environments
US6921467B2 (en) * 1996-07-15 2005-07-26 Semitool, Inc. Processing tools, components of processing tools, and method of making and using same for electrochemical processing of microelectronic workpieces
JP3202929B2 (ja) * 1996-09-13 2001-08-27 東京エレクトロン株式会社 処理システム
TW348162B (en) * 1996-09-30 1998-12-21 Murada Kikai Kk Work carrying system
US5885045A (en) * 1997-03-17 1999-03-23 Fortrend Engineering Corporation Integrated wafer pod-load/unload and mass-transfer system
US5980183A (en) 1997-04-14 1999-11-09 Asyst Technologies, Inc. Integrated intrabay buffer, delivery, and stocker system
US6059507A (en) * 1997-04-21 2000-05-09 Brooks Automation, Inc. Substrate processing apparatus with small batch load lock
US6579052B1 (en) * 1997-07-11 2003-06-17 Asyst Technologies, Inc. SMIF pod storage, delivery and retrieval system
US6002840A (en) * 1997-09-30 1999-12-14 Brooks Automation Inc. Substrate transport apparatus
US5934991A (en) * 1998-02-01 1999-08-10 Fortrend Engineering Corporation Pod loader interface improved clean air system
US6079927A (en) * 1998-04-22 2000-06-27 Varian Semiconductor Equipment Associates, Inc. Automated wafer buffer for use with wafer processing equipment
JP3664897B2 (ja) * 1998-11-18 2005-06-29 東京エレクトロン株式会社 縦型熱処理装置
US6435330B1 (en) * 1998-12-18 2002-08-20 Asyai Technologies, Inc. In/out load port transfer mechanism
JP2987148B1 (ja) * 1999-01-26 1999-12-06 国際電気株式会社 基板処理装置
US6120229A (en) * 1999-02-01 2000-09-19 Brooks Automation Inc. Substrate carrier as batchloader
US6304051B1 (en) * 1999-03-15 2001-10-16 Berkeley Process Control, Inc. Self teaching robotic carrier handling system
US6318945B1 (en) * 1999-07-28 2001-11-20 Brooks Automation, Inc. Substrate processing apparatus with vertically stacked load lock and substrate transport robot
EP1079421A1 (de) * 1999-08-12 2001-02-28 Semiconductor 300 GmbH & Co. KG Oberliegendes Transportsystem zum Transportieren von offenen Kassetten
US6364593B1 (en) * 2000-06-06 2002-04-02 Brooks Automation Material transport system
US6516243B2 (en) * 2001-01-16 2003-02-04 Taiwan Semiconductor Manufacturing Co., Ltd Stocker apparatus affording manual access
US6677690B2 (en) * 2001-02-02 2004-01-13 Asyst Technologies, Inc. System for safeguarding integrated intrabay pod delivery and storage system
US6585470B2 (en) * 2001-06-19 2003-07-01 Brooks Automation, Inc. System for transporting substrates
AU2002327249A1 (en) * 2001-07-13 2003-01-29 Brooks Automation, Inc. Substrate transport apparatus with multiple independent end effectors
CN1996553A (zh) * 2001-08-31 2007-07-11 阿赛斯特技术公司 用于半导体材料处理系统的一体化机架
US20030077153A1 (en) * 2001-10-19 2003-04-24 Applied Materials, Inc. Identification code reader integrated with substrate carrier robot
JP4048409B2 (ja) * 2001-10-22 2008-02-20 株式会社ダイフク 搬送設備
US20030110649A1 (en) * 2001-12-19 2003-06-19 Applied Materials, Inc. Automatic calibration method for substrate carrier handling robot and jig for performing the method
US6726429B2 (en) * 2002-02-19 2004-04-27 Vertical Solutions, Inc. Local store for a wafer processing station
US6715978B2 (en) * 2002-04-22 2004-04-06 Taiwan Semiconductor Manufacturing Co., Ltd Interbay transfer interface between an automated material handling system and a stocker
US6848882B2 (en) * 2003-03-31 2005-02-01 Taiwan Semiconductor Manufacturing Co., Ltd Apparatus and method for positioning a cassette pod onto a loadport by an overhead hoist transport system

Also Published As

Publication number Publication date
AU2003278268A1 (en) 2004-03-29
FR2844258B1 (fr) 2005-06-03
JP2005538541A (ja) 2005-12-15
US20040047714A1 (en) 2004-03-11
DE60321707D1 (de) 2008-07-31
WO2004023530A3 (fr) 2004-04-08
EP1561236B1 (de) 2008-06-18
WO2004023530A2 (fr) 2004-03-18
CN1698178A (zh) 2005-11-16
KR20050057250A (ko) 2005-06-16
CA2497310A1 (fr) 2004-03-18
EP1561236A2 (de) 2005-08-10
FR2844258A1 (fr) 2004-03-12

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