ATE399281T1 - Durchflussregelventil und durchflussregelvorrichtung - Google Patents

Durchflussregelventil und durchflussregelvorrichtung

Info

Publication number
ATE399281T1
ATE399281T1 AT05090002T AT05090002T ATE399281T1 AT E399281 T1 ATE399281 T1 AT E399281T1 AT 05090002 T AT05090002 T AT 05090002T AT 05090002 T AT05090002 T AT 05090002T AT E399281 T1 ATE399281 T1 AT E399281T1
Authority
AT
Austria
Prior art keywords
flow control
control device
control valve
valve
diaphragms
Prior art date
Application number
AT05090002T
Other languages
English (en)
Inventor
Akinori Igawa
Shoji Takemoto
Original Assignee
Toflo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toflo Corp filed Critical Toflo Corp
Application granted granted Critical
Publication of ATE399281T1 publication Critical patent/ATE399281T1/de

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00Actuating devices; Operating means; Releasing devices
    • F16K31/12Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/126Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a diaphragm, bellows, or the like
    • F16K31/1262Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a diaphragm, bellows, or the like one side of the diaphragm being spring loaded
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00Control of fluid pressure
    • G05D16/14Control of fluid pressure with auxiliary non-electric power
    • G05D16/18Control of fluid pressure with auxiliary non-electric power derived from an external source
    • G05D16/185Control of fluid pressure with auxiliary non-electric power derived from an external source using membranes within the main valve
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32Details
    • F16K1/34Cutting-off parts, e.g. valve members, seats
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00Construction of housing; Use of materials therefor
    • F16K27/02Construction of housing; Use of materials therefor of lift valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00Actuating devices; Operating means; Releasing devices
    • F16K31/12Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/126Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a diaphragm, bellows, or the like
    • F16K31/1268Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a diaphragm, bellows, or the like with a plurality of the diaphragms
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/7722Line condition change responsive valves
    • Y10T137/7758Pilot or servo controlled
    • Y10T137/7759Responsive to change in rate of fluid flow
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/7722Line condition change responsive valves
    • Y10T137/7758Pilot or servo controlled
    • Y10T137/7761Electrically actuated valve

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
  • Fluid-Driven Valves (AREA)
  • Vehicle Body Suspensions (AREA)
AT05090002T 2004-01-06 2005-01-03 Durchflussregelventil und durchflussregelvorrichtung ATE399281T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004001131A JP3583123B1 (ja) 2004-01-06 2004-01-06 流量制御弁及び流量制御装置

Publications (1)

Publication Number Publication Date
ATE399281T1 true ATE399281T1 (de) 2008-07-15

Family

ID=33411193

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05090002T ATE399281T1 (de) 2004-01-06 2005-01-03 Durchflussregelventil und durchflussregelvorrichtung

Country Status (8)

Country Link
US (1) US7163024B2 (de)
EP (1) EP1553339B1 (de)
JP (1) JP3583123B1 (de)
KR (1) KR100675747B1 (de)
CN (1) CN100366961C (de)
AT (1) ATE399281T1 (de)
DE (1) DE602005007637D1 (de)
TW (1) TWI257985B (de)

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JP2007058337A (ja) * 2005-08-22 2007-03-08 Asahi Organic Chem Ind Co Ltd 流体制御装置
US20080099705A1 (en) * 2006-10-25 2008-05-01 Enfield Technologies, Llc Retaining element for a mechanical component
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US8528598B2 (en) * 2007-07-20 2013-09-10 Parker-Hannifin Corporation Flow splitter
US20090101213A1 (en) * 2007-10-19 2009-04-23 Rivatek, Inc. Apparatus for controlling and metering fluid flow
JP5202101B2 (ja) * 2008-05-21 2013-06-05 旭有機材工業株式会社 ミキシングバルブ及びそれを用いたミキシング装置
KR101124475B1 (ko) 2009-08-17 2012-03-16 주식회사 우당기술산업 유량조절밸브
JP5292231B2 (ja) * 2009-09-01 2013-09-18 川崎重工業株式会社 制御弁
JP4815538B2 (ja) * 2010-01-15 2011-11-16 シーケーディ株式会社 真空制御システムおよび真空制御方法
KR101191514B1 (ko) 2010-11-15 2012-10-15 윤승찬 웨이브 스프링을 이용한 가스압력조절기
US9476516B2 (en) 2011-07-15 2016-10-25 Mecanique Analytique Inc. Actuator
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US9146007B2 (en) * 2012-11-27 2015-09-29 Lam Research Ag Apparatus for liquid treatment of work pieces and flow control system for use in same
JP6093206B2 (ja) 2013-03-07 2017-03-08 サーパス工業株式会社 流量調整装置
JP6111862B2 (ja) * 2013-05-24 2017-04-12 日立金属株式会社 流量制御弁及びそれを用いたマスフローコントローラ
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JP5602969B1 (ja) * 2014-03-06 2014-10-08 東フロコーポレーション株式会社 電磁アクチュエータ
JP5635207B1 (ja) * 2014-07-09 2014-12-03 東フロコーポレーション株式会社 電磁アクチュエータ
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JP2016223479A (ja) * 2015-05-28 2016-12-28 アイシン精機株式会社 流体制御弁
WO2016206190A1 (zh) * 2015-06-24 2016-12-29 广东美的生活电器制造有限公司 阀体、具有该阀体的咖啡机及咖啡机的控制方法
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JP6632901B2 (ja) * 2016-02-03 2020-01-22 サーパス工業株式会社 流量調整装置
US11926518B1 (en) * 2016-06-13 2024-03-12 Cleland Sales Corporation Shutoff valve system for dispensing a beverage
JP6864533B2 (ja) 2017-04-18 2021-04-28 アズビル株式会社 空気圧制御装置および調節弁
US11060895B2 (en) * 2017-05-22 2021-07-13 Panasonic Intellectual Property Management Co., Ltd. Gas meter including a measurement unit in communication with a shutoff valve in an extended section within a meter body
IT201700060646A1 (it) * 2017-06-01 2018-12-01 Ali Group Srl Carpigiani Valvola ad azionamento pneumatico per una macchina per la produzione di prodotti alimentari liquidi o semiliquidi e macchina comprendente detta valvola.
CN109424773B (zh) * 2017-09-05 2020-06-12 尤尼罗库株式会社 调节器
CN107479586A (zh) * 2017-09-13 2017-12-15 武汉华星光电技术有限公司 一种清洗机流量控制系统及方法
US20190346867A1 (en) * 2018-05-14 2019-11-14 Critical Systems, Inc. Pressure control for gas system payback
CN110735930A (zh) * 2018-07-18 2020-01-31 北京七星华创流量计有限公司 气体流量调节装置及质量流量控制器
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CN109595374B (zh) * 2019-01-14 2024-05-10 中国长江电力股份有限公司 一种双隔膜结构持压泄压控制导阀及控制方法
US12215804B2 (en) * 2019-05-17 2025-02-04 Lam Research Corporation Cooling of air actuated valve using actuating air
CN110425115B (zh) * 2019-08-14 2021-05-07 珠海格力节能环保制冷技术研究中心有限公司 压缩机及具有其的制冷设备
CN110706541B (zh) * 2019-10-23 2021-11-09 山东同其工业互联网有限公司 一种压力流量控制系统实训器
KR102326247B1 (ko) * 2020-02-21 2021-11-12 한국기술교육대학교 산학협력단 배기압 조절 장치
JP7531288B2 (ja) * 2020-02-25 2024-08-09 東京エレクトロン株式会社 バルブ装置
KR102154962B1 (ko) 2020-05-29 2020-09-10 김신호 반도체 세정 공정용 정량 공급을 위한 미소유량 컨트롤밸브 구조
JP7761379B2 (ja) * 2020-09-14 2025-10-28 株式会社堀場エステック 流体制御弁及び流体制御装置
CN112197011B (zh) * 2020-09-30 2022-07-05 福建骏格科技有限公司 一种能控制负压输入的封闭引流装置用控压阀
CN112089965A (zh) * 2020-09-30 2020-12-18 福建骏格科技有限公司 一种封闭引流装置用控压阀
CN112212030B (zh) * 2020-11-03 2023-06-20 安徽龙泽实业有限公司 气动隔膜阀
CN117432861A (zh) * 2022-07-12 2024-01-23 南京菡束环保设备有限公司 开关阀
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Also Published As

Publication number Publication date
TWI257985B (en) 2006-07-11
KR100675747B1 (ko) 2007-01-29
JP3583123B1 (ja) 2004-10-27
US20050145278A1 (en) 2005-07-07
EP1553339A1 (de) 2005-07-13
TW200523491A (en) 2005-07-16
CN1654863A (zh) 2005-08-17
US7163024B2 (en) 2007-01-16
JP2005196401A (ja) 2005-07-21
EP1553339B1 (de) 2008-06-25
DE602005007637D1 (de) 2008-08-07
KR20050072393A (ko) 2005-07-11
CN100366961C (zh) 2008-02-06

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