ATE400084T1 - Fest montiertes akustisches volumenwellenfilter mit mehreren resonatoren und mit einem gemusterten akustischen spiegel - Google Patents

Fest montiertes akustisches volumenwellenfilter mit mehreren resonatoren und mit einem gemusterten akustischen spiegel

Info

Publication number
ATE400084T1
ATE400084T1 AT01310923T AT01310923T ATE400084T1 AT E400084 T1 ATE400084 T1 AT E400084T1 AT 01310923 T AT01310923 T AT 01310923T AT 01310923 T AT01310923 T AT 01310923T AT E400084 T1 ATE400084 T1 AT E400084T1
Authority
AT
Austria
Prior art keywords
resonator
layers
filter
metallic
acoustic
Prior art date
Application number
AT01310923T
Other languages
English (en)
Inventor
Juha Ella
Jyrki Kaitila
Meeri Talvikki Partanen
Original Assignee
Nokia Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nokia Corp filed Critical Nokia Corp
Application granted granted Critical
Publication of ATE400084T1 publication Critical patent/ATE400084T1/de

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/02125—Means for compensation or elimination of undesirable effects of parasitic elements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/564—Monolithic crystal filters implemented with thin-film techniques
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Headphones And Earphones (AREA)
  • Aerials With Secondary Devices (AREA)
AT01310923T 2001-01-02 2001-12-28 Fest montiertes akustisches volumenwellenfilter mit mehreren resonatoren und mit einem gemusterten akustischen spiegel ATE400084T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/753,214 US6496085B2 (en) 2001-01-02 2001-01-02 Solidly mounted multi-resonator bulk acoustic wave filter with a patterned acoustic mirror

Publications (1)

Publication Number Publication Date
ATE400084T1 true ATE400084T1 (de) 2008-07-15

Family

ID=25029665

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01310923T ATE400084T1 (de) 2001-01-02 2001-12-28 Fest montiertes akustisches volumenwellenfilter mit mehreren resonatoren und mit einem gemusterten akustischen spiegel

Country Status (6)

Country Link
US (1) US6496085B2 (de)
EP (1) EP1227582B8 (de)
JP (2) JP4248177B2 (de)
CN (1) CN1208898C (de)
AT (1) ATE400084T1 (de)
DE (1) DE60134621D1 (de)

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Also Published As

Publication number Publication date
US20020084873A1 (en) 2002-07-04
JP4248177B2 (ja) 2009-04-02
CN1365186A (zh) 2002-08-21
EP1227582B1 (de) 2008-07-02
DE60134621D1 (de) 2008-08-14
JP4838292B2 (ja) 2011-12-14
EP1227582A3 (de) 2004-09-22
JP2002251190A (ja) 2002-09-06
US6496085B2 (en) 2002-12-17
EP1227582A2 (de) 2002-07-31
CN1208898C (zh) 2005-06-29
EP1227582B8 (de) 2008-08-13
JP2009022052A (ja) 2009-01-29

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