ATE404849T1 - Kapazitiver lagesensor - Google Patents

Kapazitiver lagesensor

Info

Publication number
ATE404849T1
ATE404849T1 AT02710997T AT02710997T ATE404849T1 AT E404849 T1 ATE404849 T1 AT E404849T1 AT 02710997 T AT02710997 T AT 02710997T AT 02710997 T AT02710997 T AT 02710997T AT E404849 T1 ATE404849 T1 AT E404849T1
Authority
AT
Austria
Prior art keywords
movement
position sensor
capacitive position
displacement
tubes
Prior art date
Application number
AT02710997T
Other languages
English (en)
Inventor
David Kenneth Thomas
Andrew Loach
Graham Ferguson
Original Assignee
Renishaw Plc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renishaw Plc filed Critical Renishaw Plc
Application granted granted Critical
Publication of ATE404849T1 publication Critical patent/ATE404849T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
    • G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
    • G01B7/012—Contact-making feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
    • G01D5/2415—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap adapted for encoders

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Measuring Fluid Pressure (AREA)
  • Vehicle Body Suspensions (AREA)
AT02710997T 2001-01-30 2002-01-30 Kapazitiver lagesensor ATE404849T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB0102324.1A GB0102324D0 (en) 2001-01-30 2001-01-30 Capacitance type displacement responsive device and a suspension system for a displacement responsive device

Publications (1)

Publication Number Publication Date
ATE404849T1 true ATE404849T1 (de) 2008-08-15

Family

ID=9907768

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02710997T ATE404849T1 (de) 2001-01-30 2002-01-30 Kapazitiver lagesensor

Country Status (9)

Country Link
US (1) US6683780B2 (de)
EP (2) EP1261845B1 (de)
JP (1) JP4578771B2 (de)
CN (1) CN1307406C (de)
AT (1) ATE404849T1 (de)
DE (1) DE60228167D1 (de)
GB (1) GB0102324D0 (de)
RU (1) RU2293945C2 (de)
WO (1) WO2002061378A1 (de)

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DE102008019115B4 (de) * 2008-04-16 2014-05-22 Siemens Aktiengesellschaft Wägezelle
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GB0904180D0 (en) 2009-03-11 2009-04-22 Renishaw Plc Apparatus and method for digitising impedance
CN102003974B (zh) * 2009-08-28 2012-06-13 鸿富锦精密工业（深圳）有限公司 运动感测器
TWI420109B (zh) * 2009-09-01 2013-12-21 Hon Hai Prec Ind Co Ltd 運動感測器
EP2479530A1 (de) 2011-01-19 2012-07-25 Renishaw PLC Analoge Messsonde für Maschinenwerkzeugvorrichtung sowie Betriebsverfahren
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TWI458938B (zh) * 2011-01-19 2014-11-01 Renishaw Plc 用於機械工具裝置之類比量測探針
KR20130061958A (ko) * 2011-12-02 2013-06-12 한국전자통신연구원 전자펜의 필압 측정장치
DE102012210277B3 (de) 2012-06-19 2013-08-22 Behr-Hella Thermocontrol Gmbh Kapazitiver Sensor zur Erfassung der Bewegung eines Objekts
JP5939633B2 (ja) * 2012-07-05 2016-06-22 株式会社ワコム 容量可変型コンデンサ
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CN103234440B (zh) * 2013-04-18 2015-08-19 赵飚 三维测量头
CN103411525B (zh) * 2013-06-05 2016-01-20 电子科技大学 一种圆柱电容位移传感器及调理电路
WO2014199134A1 (en) * 2013-06-10 2014-12-18 Renishaw Plc Selective laser solidification apparatus and method
GB201310398D0 (en) 2013-06-11 2013-07-24 Renishaw Plc Additive manufacturing apparatus and method
CN103557781B (zh) * 2013-09-10 2017-06-30 林立 双单极电容差分位移传感器
DE102013015237A1 (de) 2013-09-13 2015-03-19 Blum-Novotest Gmbh Rauheits-Messinstrument zum Einsatz in einer Werkzeugmaschine und Verfahren zur Rauheitsmessung in einer Werkzeugmaschine
CN104135811A (zh) * 2014-08-13 2014-11-05 哈尔滨工业大学 一种可在三自由度运动的多探针支架
WO2015158930A1 (en) * 2015-02-13 2015-10-22 Advanced Silicon Sa Active pen with tip pressure sensor
GB201505458D0 (en) 2015-03-30 2015-05-13 Renishaw Plc Additive manufacturing apparatus and methods
CN105180813B (zh) * 2015-09-30 2019-06-07 北方民族大学 一种直接入射式光臂放大型二维线性测头
CN105136038B (zh) * 2015-09-30 2019-06-07 北方民族大学 一种直接入射式光臂放大型三维扫描测头
US9933867B2 (en) 2015-12-30 2018-04-03 Synaptics Incorporated Active pen capacitive displacement gauge
JP6715110B2 (ja) * 2016-06-30 2020-07-01 日本精機株式会社 ストロークセンサ及び鞍乗り型車両
JP6542743B2 (ja) * 2016-11-18 2019-07-10 株式会社ミツトヨ 測定プローブ
CN106839959B (zh) * 2016-12-19 2019-05-03 西安交通大学 一种多向位移测量测头
US10866080B2 (en) * 2018-11-01 2020-12-15 Mitutoyo Corporation Inductive position detection configuration for indicating a measurement device stylus position
CN108007357A (zh) * 2017-11-14 2018-05-08 成都华量传感器有限公司 板弹簧测量结构及位移传感器
IT201800005159A1 (it) * 2018-05-08 2019-11-08 Trasduttore di posizione capacitivo e relativo dispsoitivo joystick e metodo di controllo.
US11543899B2 (en) 2018-11-01 2023-01-03 Mitutoyo Corporation Inductive position detection configuration for indicating a measurement device stylus position and including coil misalignment compensation
US11740064B2 (en) 2018-11-01 2023-08-29 Mitutoyo Corporation Inductive position detection configuration for indicating a measurement device stylus position
US10914570B2 (en) * 2018-11-01 2021-02-09 Mitutoyo Corporation Inductive position detection configuration for indicating a measurement device stylus position
US11644298B2 (en) 2018-11-01 2023-05-09 Mitutoyo Corporation Inductive position detection configuration for indicating a measurement device stylus position
CN109916289B (zh) * 2019-03-22 2020-08-07 哈尔滨工业大学 一种自变向电感式位移测量传感器
JP6815440B2 (ja) * 2019-06-12 2021-01-20 株式会社ミツトヨ 測定プローブ
CN112729642B (zh) * 2020-12-07 2023-01-13 北京星航机电装备有限公司 一种压簧力值的测试工装及测试方法
US11644299B2 (en) 2020-12-31 2023-05-09 Mitutoyo Corporation Inductive position sensor signal gain control for coordinate measuring machine probe
KR102586865B1 (ko) * 2021-02-18 2023-10-06 황강선 컴팩트 타입의 기계 부품 검사용 탐침 유닛 및 이를 이용한 다중 탐침 검사장치
EP4148372A1 (de) 2021-09-09 2023-03-15 Renishaw PLC Messsonde
DE102021210531A1 (de) 2021-09-22 2023-03-23 Dr. Johannes Heidenhain Gmbh Tastkopf
US11713956B2 (en) 2021-12-22 2023-08-01 Mitutoyo Corporation Shielding for sensor configuration and alignment of coordinate measuring machine probe
US11733021B2 (en) 2021-12-22 2023-08-22 Mitutoyo Corporation Modular configuration for coordinate measuring machine probe
JP2023167383A (ja) * 2022-05-12 2023-11-24 株式会社キーエンス 画像測定装置及びタッチプローブ
EP4386311A1 (de) * 2022-12-15 2024-06-19 Hexagon Technology Center GmbH Berührungsauslösesonde mit kapazitivem sensor
EP4679030A1 (de) 2024-07-11 2026-01-14 Renishaw plc Abtastsonde und verfahren
CN118518587B (zh) * 2024-07-22 2024-09-17 常州锦奥制辊机械有限公司 一种镜面辊表面缺陷检测装置及检测方法

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Also Published As

Publication number Publication date
WO2002061378A1 (en) 2002-08-08
EP1967826A2 (de) 2008-09-10
GB0102324D0 (en) 2001-03-14
US20030048592A1 (en) 2003-03-13
EP1967826B1 (de) 2018-11-14
EP1261845B1 (de) 2008-08-13
US6683780B2 (en) 2004-01-27
EP1967826A3 (de) 2014-08-27
EP1261845A1 (de) 2002-12-04
DE60228167D1 (de) 2008-09-25
JP2004520589A (ja) 2004-07-08
CN1307406C (zh) 2007-03-28
RU2293945C2 (ru) 2007-02-20
CN1457422A (zh) 2003-11-19
JP4578771B2 (ja) 2010-11-10

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Legal Events

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