ATE405867T1 - Dreidimensionale strukturen für einen inkjet- druckkopf und relevanter herstellungsprozess - Google Patents

Dreidimensionale strukturen für einen inkjet- druckkopf und relevanter herstellungsprozess

Info

Publication number
ATE405867T1
ATE405867T1 AT04806883T AT04806883T ATE405867T1 AT E405867 T1 ATE405867 T1 AT E405867T1 AT 04806883 T AT04806883 T AT 04806883T AT 04806883 T AT04806883 T AT 04806883T AT E405867 T1 ATE405867 T1 AT E405867T1
Authority
AT
Austria
Prior art keywords
manufacturing process
print head
polymerization
dimensional structures
inkjet print
Prior art date
Application number
AT04806883T
Other languages
English (en)
Inventor
Fulvio Cominetti
Luigina Gino
Original Assignee
Telecom Italia Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Telecom Italia Spa filed Critical Telecom Italia Spa
Application granted granted Critical
Publication of ATE405867T1 publication Critical patent/ATE405867T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/091—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Push-Button Switches (AREA)
AT04806883T 2004-12-22 2004-12-22 Dreidimensionale strukturen für einen inkjet- druckkopf und relevanter herstellungsprozess ATE405867T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/IT2004/000718 WO2006067814A1 (en) 2004-12-22 2004-12-22 Tridimensional structures for an ink jet printhead and relevant manufacturing process

Publications (1)

Publication Number Publication Date
ATE405867T1 true ATE405867T1 (de) 2008-09-15

Family

ID=35266774

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04806883T ATE405867T1 (de) 2004-12-22 2004-12-22 Dreidimensionale strukturen für einen inkjet- druckkopf und relevanter herstellungsprozess

Country Status (6)

Country Link
US (1) US8263293B2 (de)
EP (1) EP1828847B1 (de)
JP (1) JP4603586B2 (de)
AT (1) ATE405867T1 (de)
DE (1) DE602004016062D1 (de)
WO (1) WO2006067814A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE602006013356D1 (de) * 2006-07-13 2010-05-12 Telecom Italia Spa Tintenstrahlpatrone mit einer aus einer härtbaren harzzusammensetzung hergestellten schicht
ITMI20111011A1 (it) * 2011-06-06 2012-12-07 Telecom Italia Spa Testina di stampa a getto d'inchiostro comprendente uno strato realizzato con una composizione di resina reticolabile
JP5783854B2 (ja) * 2011-09-01 2015-09-24 キヤノン株式会社 液体吐出ヘッドの製造方法、および液体吐出ヘッド
US12600130B2 (en) 2023-08-22 2026-04-14 Brady Worldwide, Inc. Ejection head nozzle flooding control

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61249767A (ja) * 1985-04-27 1986-11-06 Canon Inc 液体噴射記録ヘツド
JP3317597B2 (ja) * 1994-10-18 2002-08-26 富士写真フイルム株式会社 ポジ型感光性組成物
US5683856A (en) * 1994-10-18 1997-11-04 Fuji Photo Film Co., Ltd. Positive-working photosensitive composition
JP2974279B2 (ja) * 1995-07-06 1999-11-10 イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー ポリアミド酸を含有するホトレジスト層を有するインクジェットヘッド
JP3592014B2 (ja) * 1995-12-22 2004-11-24 キヤノン株式会社 液体噴射記録ヘッドの製造方法、該方法によって製造される液体噴射記録ヘッド及び該記録ヘッドを具備する記録装置
US6123863A (en) * 1995-12-22 2000-09-26 Canon Kabushiki Kaisha Process for producing liquid-jet recording head, liquid-jet recording head produced thereby, and recording apparatus equipped with recording head
JPH09325496A (ja) * 1996-06-04 1997-12-16 Sony Corp 感光性組成物
US5981137A (en) * 1997-03-17 1999-11-09 Polaroid Corporation Photographic film assemblages and methods of making
JP3873372B2 (ja) * 1997-05-26 2007-01-24 住友化学株式会社 ポジ型フォトレジスト組成物
JP2000275835A (ja) * 1999-03-25 2000-10-06 Mitsubishi Chemicals Corp パターン形成方法
JP2001179990A (ja) * 1999-12-22 2001-07-03 Canon Inc インクジェット記録ヘッド及びその製造方法
WO2002077710A2 (en) * 2001-03-22 2002-10-03 Shipley Company, L.L.C. Photoresist compositions for short wavelength imaging
KR100823815B1 (ko) * 2001-04-23 2008-04-21 신에쓰 가가꾸 고교 가부시끼가이샤 에스테르 구조를 갖는 신규 3급 아민 화합물 및 그 제조방법
TW588038B (en) * 2001-07-12 2004-05-21 Daikin Ind Ltd Process for preparing fluorine-containing norbornene derivative
TW574614B (en) * 2001-09-27 2004-02-01 Shinetsu Chemical Co Chemically amplified resist compositions and patterning process
KR100557556B1 (ko) * 2001-10-25 2006-03-03 주식회사 하이닉스반도체 산 확산 방지용 포토레지스트 첨가제 및 이를 함유하는포토레지스트 조성물
US6797457B2 (en) * 2001-10-31 2004-09-28 United Microelectronics Corp. Method for improving the resolution of optic lithography
KR100396559B1 (ko) * 2001-11-05 2003-09-02 삼성전자주식회사 일체형 잉크젯 프린트헤드의 제조 방법
US6703178B2 (en) * 2002-05-28 2004-03-09 Everlight Usa, Inc. Chemical amplified photoresist compositions
JP4131864B2 (ja) * 2003-11-25 2008-08-13 東京応化工業株式会社 化学増幅型ポジ型感光性熱硬化性樹脂組成物、硬化物の形成方法、及び機能素子の製造方法
US7335463B2 (en) * 2004-12-16 2008-02-26 Palo Alto Research Center, Inc. Electroplated three dimensional ink jet manifold and nozzle structures using successive lithography and electroplated sacrificial layers

Also Published As

Publication number Publication date
JP2008525220A (ja) 2008-07-17
DE602004016062D1 (de) 2008-10-02
EP1828847A1 (de) 2007-09-05
WO2006067814A8 (en) 2007-06-14
US20080113277A1 (en) 2008-05-15
US8263293B2 (en) 2012-09-11
EP1828847B1 (de) 2008-08-20
WO2006067814A1 (en) 2006-06-29
JP4603586B2 (ja) 2010-12-22

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