ATE407237T1 - Einkristalldiamant hergestellt durch cvd - Google Patents

Einkristalldiamant hergestellt durch cvd

Info

Publication number
ATE407237T1
ATE407237T1 AT01940878T AT01940878T ATE407237T1 AT E407237 T1 ATE407237 T1 AT E407237T1 AT 01940878 T AT01940878 T AT 01940878T AT 01940878 T AT01940878 T AT 01940878T AT E407237 T1 ATE407237 T1 AT E407237T1
Authority
AT
Austria
Prior art keywords
cvd
single crystal
crystal diamond
diamond made
diamond
Prior art date
Application number
AT01940878T
Other languages
English (en)
Inventor
Geoffrey Alan Scarsbrook
Philip Maurice Martineau
John Lloyd Collins
Ricardo Simon Sussmann
Baerbel Susanne Charlotte Dorn
Andrew John Whitehead
Daniel James Twitchen
Original Assignee
Element Six Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB0014693A external-priority patent/GB0014693D0/en
Priority claimed from GB0106930A external-priority patent/GB0106930D0/en
Application filed by Element Six Pty Ltd filed Critical Element Six Pty Ltd
Application granted granted Critical
Publication of ATE407237T1 publication Critical patent/ATE407237T1/de

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02Epitaxial-layer growth
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02Elements
    • C30B29/04Diamond
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02Epitaxial-layer growth
    • C30B25/10Heating of the reaction chamber or the substrate
    • C30B25/105Heating of the reaction chamber or the substrate by irradiation or electric discharge
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/26Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263Coating layer not in excess of 5 mils thick or equivalent
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/30Self-sustaining carbon mass or layer with impregnant or other layer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
AT01940878T 2000-06-15 2001-06-14 Einkristalldiamant hergestellt durch cvd ATE407237T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0014693A GB0014693D0 (en) 2000-06-15 2000-06-15 Diamnond
GB0106930A GB0106930D0 (en) 2001-03-20 2001-03-20 Diamond

Publications (1)

Publication Number Publication Date
ATE407237T1 true ATE407237T1 (de) 2008-09-15

Family

ID=26244497

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01940878T ATE407237T1 (de) 2000-06-15 2001-06-14 Einkristalldiamant hergestellt durch cvd

Country Status (15)

Country Link
US (3) US20040221795A1 (de)
EP (2) EP1983080B8 (de)
JP (1) JP4695821B2 (de)
KR (1) KR100837033B1 (de)
CN (1) CN1243855C (de)
AT (1) ATE407237T1 (de)
AU (2) AU2001274368B2 (de)
CA (1) CA2412853C (de)
CZ (1) CZ302228B6 (de)
DE (1) DE60135653D1 (de)
GB (1) GB2383588B (de)
IL (2) IL153380A0 (de)
RU (1) RU2288302C2 (de)
TW (1) TW548351B (de)
WO (1) WO2001096633A1 (de)

Families Citing this family (88)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8591856B2 (en) 1998-05-15 2013-11-26 SCIO Diamond Technology Corporation Single crystal diamond electrochemical electrode
US6582513B1 (en) 1998-05-15 2003-06-24 Apollo Diamond, Inc. System and method for producing synthetic diamond
US6858080B2 (en) 1998-05-15 2005-02-22 Apollo Diamond, Inc. Tunable CVD diamond structures
GB2379451B (en) * 2000-06-15 2004-05-05 Element Six Thick single crystal diamond layer method for making it and gemstones produced from the layer
IL153380A0 (en) 2000-06-15 2003-07-06 Element Six Pty Ltd Single crystal diamond prepared by cvd
AU2001281404B2 (en) 2001-08-08 2008-07-03 Apollo Diamond, Inc. System and method for producing synthetic diamond
GB0130005D0 (en) * 2001-12-14 2002-02-06 Diamanx Products Ltd Boron doped diamond
GB0130004D0 (en) * 2001-12-14 2002-02-06 Diamanx Products Ltd Coloured diamond
AU2003259418A1 (en) * 2002-09-06 2004-03-29 Element Six Limited Coloured diamond
GB0220767D0 (en) 2002-09-06 2002-10-16 Diamanx Products Ltd Diamond radiation detector
GB0221949D0 (en) * 2002-09-20 2002-10-30 Diamanx Products Ltd Single crystal diamond
GB0227261D0 (en) 2002-11-21 2002-12-31 Element Six Ltd Optical quality diamond material
GB2396249B (en) * 2002-11-21 2005-01-12 Bookham Technology Plc Wavelength locker
FR2849867B1 (fr) 2003-01-10 2005-03-25 Centre Nat Rech Scient Croissance diamant a grande vitesse par plasma micro-onde en regime pulse.
US7115241B2 (en) * 2003-07-14 2006-10-03 Carnegie Institution Of Washington Ultrahard diamonds and method of making thereof
JP4623356B2 (ja) * 2003-12-02 2011-02-02 住友電気工業株式会社 単結晶ダイヤモンド
US7481879B2 (en) 2004-01-16 2009-01-27 Sumitomo Electric Industries, Ltd. Diamond single crystal substrate manufacturing method and diamond single crystal substrate
KR101277232B1 (ko) 2004-09-10 2013-06-26 카네기 인스티튜션 오브 워싱턴 초인성 cvd 단결정 다이아몬드 및 이의 삼차원 성장
US7615203B2 (en) 2004-11-05 2009-11-10 Sumitomo Electric Industries, Ltd. Single crystal diamond
JP2008526682A (ja) * 2005-01-11 2008-07-24 アポロ ダイヤモンド,インク ダイヤモンド製医療装置
US7122837B2 (en) 2005-01-11 2006-10-17 Apollo Diamond, Inc Structures formed in diamond
US7829377B2 (en) * 2005-01-11 2010-11-09 Apollo Diamond, Inc Diamond medical devices
JP5594613B2 (ja) * 2005-04-15 2014-09-24 住友電気工業株式会社 単結晶ダイヤモンドおよびその製造方法
JP5002982B2 (ja) * 2005-04-15 2012-08-15 住友電気工業株式会社 単結晶ダイヤモンドの製造方法
GB0508889D0 (en) * 2005-04-29 2005-06-08 Element Six Ltd Diamond transistor and method of manufacture thereof
KR20080044206A (ko) 2005-05-25 2008-05-20 카네기 인스티튜션 오브 워싱턴 신속한 성장 속도의 무색 단결정 cvd 다이아몬드
AU2006260656A1 (en) 2005-06-22 2006-12-28 Element Six Limited High colour diamond layer
US20110005564A1 (en) * 2005-10-11 2011-01-13 Dimerond Technologies, Inc. Method and Apparatus Pertaining to Nanoensembles Having Integral Variable Potential Junctions
TWI410538B (zh) 2005-11-15 2013-10-01 Carnegie Inst Of Washington 建基於以快速生長速率製造之單晶cvd鑽石的新穎鑽石的用途/應用
EP1957689B1 (de) 2005-12-09 2011-04-20 Element Six Technologies (PTY) LTD Synthetischer diamant mit hoher kristalliner qualität
GB0622695D0 (en) 2006-11-14 2006-12-27 Element Six Ltd Robust radiation detector comprising diamond
WO2008090513A2 (en) 2007-01-22 2008-07-31 Element Six Limited Diamond electronic devices including a surface and methods for their manufacture
GB0813490D0 (en) 2008-07-23 2008-08-27 Element Six Ltd Solid state material
GB0813491D0 (en) 2008-07-23 2008-08-27 Element Six Ltd Diamond Material
GB0819001D0 (en) 2008-10-16 2008-11-26 Diamond Detectors Ltd Contacts on diamond
US9067797B2 (en) * 2009-04-28 2015-06-30 Xi Chu Methods and systems to produce large particle diamonds
US9017632B2 (en) 2009-06-26 2015-04-28 Element Six Technologies Limited Diamond material
GB201000768D0 (en) * 2010-01-18 2010-03-03 Element Six Ltd CVD single crystal diamond material
US9017633B2 (en) 2010-01-18 2015-04-28 Element Six Technologies Limited CVD single crystal diamond material
EP2539978B1 (de) * 2010-02-24 2021-03-31 Macquarie University Systeme und verfahren für einen mittel-bis-fern-infrarot diamant raman laser
GB201013112D0 (en) 2010-08-04 2010-09-22 Element Six Ltd A diamond optical element
GB201015260D0 (en) 2010-09-14 2010-10-27 Element Six Ltd A microfluidic cell and a spin resonance device for use therewith
GB201021985D0 (en) * 2010-12-24 2011-02-02 Element Six Ltd Dislocation engineering in single crystal synthetic diamond material
CN102636805B (zh) * 2011-02-15 2013-04-24 西北核技术研究所 半导体探测器γ/X射线电荷收集效率的测量方法及系统
GB201107730D0 (en) 2011-05-10 2011-06-22 Element Six Ltd Diamond sensors, detectors and quantum devices
US20130026492A1 (en) * 2011-07-30 2013-01-31 Akhan Technologies Inc. Diamond Semiconductor System and Method
ITMI20112273A1 (it) * 2011-12-15 2013-06-16 St Microelectronics Srl Metodo per la produzione di una fetta di carburo di silicio e relativa attrezzatura
GB201121642D0 (en) * 2011-12-16 2012-01-25 Element Six Ltd Single crtstal cvd synthetic diamond material
US8829331B2 (en) 2012-08-10 2014-09-09 Dimerond Technologies Llc Apparatus pertaining to the co-generation conversion of light into electricity
US9040395B2 (en) 2012-08-10 2015-05-26 Dimerond Technologies, Llc Apparatus pertaining to solar cells having nanowire titanium oxide cores and graphene exteriors and the co-generation conversion of light into electricity using such solar cells
US8586999B1 (en) 2012-08-10 2013-11-19 Dimerond Technologies, Llc Apparatus pertaining to a core of wide band-gap material having a graphene shell
GB201214370D0 (en) * 2012-08-13 2012-09-26 Element Six Ltd Thick polycrystalline synthetic diamond wafers for heat spreading applications and microwave plasma chemical vapour deposition synthesis techniques
GB201216697D0 (en) * 2012-09-19 2012-10-31 Element Six Ltd Single crystal chemical vapour deposited synthetic diamond materials having uniform colour
RU2539903C2 (ru) * 2012-11-09 2015-01-27 Федеральное государственное бюджетное учреждение науки Институт общей физики им. А,М. Прохорова Российской академии наук (ИОФ РАН) Способ доводки ориентации подложек для эпитаксии алмаза
GB201301556D0 (en) 2013-01-29 2013-03-13 Element Six Ltd Synthetic diamond materials for quantum and optical applications and methods of making the same
CN103103609B (zh) * 2013-03-05 2015-08-19 三门峡纵横超硬材料有限公司 N型金刚石半导体单晶及其生产方法
CN104603335B (zh) * 2013-04-09 2017-10-17 住友电气工业株式会社 单晶金刚石和金刚石工具
GB201320302D0 (en) 2013-11-18 2014-01-01 Element Six Ltd Diamond components for quantum imaging sensing and information processing devices
GB201320304D0 (en) * 2013-11-18 2014-01-01 Element Six Ltd Methods of fabricating synthetic diamond materials using microwave plasma actived chemical vapour deposition techniques and products obtained using said
SG10201505413VA (en) * 2015-01-14 2016-08-30 Iia Technologies Pte Ltd Electronic device grade single crystal diamonds and method of producing the same
EP3045570B1 (de) * 2015-01-14 2019-05-22 IIA Technologies Pte. Ltd. Einkristalline diamanten für elektronische vorrichtungen und verfahren zur herstellung davon
US9441940B2 (en) 2015-01-21 2016-09-13 Uchicago Argonne, Llc Piezoresistive boron doped diamond nanowire
CN104775154B (zh) * 2015-04-25 2017-06-27 哈尔滨工业大学 一种同质外延生长单晶金刚石时控制表面温度的方法
US9484474B1 (en) 2015-07-02 2016-11-01 Uchicago Argonne, Llc Ultrananocrystalline diamond contacts for electronic devices
US9741561B2 (en) 2015-07-10 2017-08-22 Uchicago Argonne, Llc Transparent nanocrystalline diamond coatings and devices
GB201516814D0 (en) 2015-09-23 2015-11-04 Element Six Technologies Ltd Method of fabricating a plurality of single crystal CVD synthetic diamonds
CN107305185A (zh) * 2016-04-25 2017-10-31 潘栋雄 利用拉曼在三阶光谱的特征峰区分天然与合成钻石的方法
US10690604B2 (en) * 2016-08-25 2020-06-23 Purdue Research Foundation Sensors and methods of identifying a gas, and levitated spin-optomechanical systems
US10475673B2 (en) 2016-09-28 2019-11-12 Stmicroelectronics S.R.L. Apparatus for manufacturing a silicon carbide wafer
GB201620413D0 (en) 2016-12-01 2017-01-18 Element Six Tech Ltd Single crystal synthetic diamond material via chemical vapour deposition
CN106835274A (zh) * 2017-01-23 2017-06-13 中国科学院半导体研究所 异质外延金刚石及其制备方法
GB201707486D0 (en) 2017-05-10 2017-06-21 Univ Bristol Radiation powered devices comprising diamond material
EP3686321A4 (de) * 2017-09-19 2021-07-28 Sumitomo Electric Industries, Ltd. Monokristalliner diamant und herstellungsverfahren dafür
GB201807787D0 (en) 2018-05-14 2018-06-27 Element Six Tech Ltd Polycrystalline chemical vapour deposition synthetic diamond material
US11309177B2 (en) 2018-11-06 2022-04-19 Stmicroelectronics S.R.L. Apparatus and method for manufacturing a wafer
GB201904435D0 (en) 2019-03-29 2019-05-15 Element Six Tech Ltd Single crystal synthetic diamond material
EP3977521A4 (de) 2019-06-03 2023-05-10 Dimerond Technologies, LLC Hocheffiziente graphen-breitband-halbleiter-heteroübergangssolarzellen
IT201900015416A1 (it) 2019-09-03 2021-03-03 St Microelectronics Srl Apparecchio per la crescita di una fetta di materiale semiconduttore, in particolare di carburo di silicio, e procedimento di fabbricazione associato
WO2021097382A1 (en) * 2019-11-14 2021-05-20 Massachusetts Institute Of Technology Diamond rotors for mas-nmr
CA3198650A1 (en) * 2020-10-13 2022-04-21 Jayeshkumar Dhirajlal MISTRY A process for producing diamonds
GB2614218B (en) 2021-07-06 2024-06-19 Element Six Tech Ltd Single crystal diamond component and method for producing
GB2614521A (en) 2021-10-19 2023-07-12 Element Six Tech Ltd CVD single crystal diamond
GB2614530B (en) 2021-12-23 2024-12-11 Element Six Tech Ltd Diamond sensor
GB202219497D0 (en) 2022-12-22 2023-02-08 Element Six Tech Ltd Single crystal diamond
US20240209498A1 (en) * 2022-12-23 2024-06-27 Great Lakes Crystal Technologies, Inc. Variable-temperature vapor deposition process
GB202305972D0 (en) 2023-04-24 2023-06-07 Element Six Tech Ltd Method of manufacturing single crystal diamonds
GB2630986A (en) 2023-06-16 2024-12-18 Element Six Tech Ltd Single crystal diamond product
GB2700307A (en) 2024-02-28 2026-01-14 Element Six Tech Ltd Composite diamond material

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2571795B2 (ja) 1987-11-17 1997-01-16 住友電気工業株式会社 紫色ダイヤモンドおよびその製造方法
JP2691219B2 (ja) * 1988-10-17 1997-12-17 並木精密宝石株式会社 ダイヤモンドの合成法
JP2775903B2 (ja) * 1989-10-04 1998-07-16 住友電気工業株式会社 ダイヤモンド半導体素子
JPH04305096A (ja) 1991-04-01 1992-10-28 Sumitomo Electric Ind Ltd 高品質気相合成ダイヤモンドの低温形成法
US5328855A (en) * 1991-07-25 1994-07-12 Matsushita Electric Industrial Co., Ltd. Formation of semiconductor diamond
US5614019A (en) 1992-06-08 1997-03-25 Air Products And Chemicals, Inc. Method for the growth of industrial crystals
US5443032A (en) * 1992-06-08 1995-08-22 Air Products And Chemicals, Inc. Method for the manufacture of large single crystals
EP0582397A3 (de) * 1992-08-05 1995-01-25 Crystallume CVD-Diamant-Material für einen Strahlungsdetektor und Herstellungsverfahren.
JPH06107494A (ja) 1992-09-24 1994-04-19 Sumitomo Electric Ind Ltd ダイヤモンドの気相成長法
US5474021A (en) 1992-09-24 1995-12-12 Sumitomo Electric Industries, Ltd. Epitaxial growth of diamond from vapor phase
JP3314444B2 (ja) 1993-03-15 2002-08-12 住友電気工業株式会社 赤色ダイヤモンドおよび桃色ダイヤモンド
CA2127832C (en) * 1993-07-20 2001-02-20 Grant Lu Cvd diamond radiation detector
JP3484749B2 (ja) 1994-04-04 2004-01-06 住友電気工業株式会社 ダイヤモンドの合成法
US5451430A (en) * 1994-05-05 1995-09-19 General Electric Company Method for enhancing the toughness of CVD diamond
EP0688026A1 (de) 1994-06-17 1995-12-20 General Electric Company Widerstand auf einem Substrat aus Diamant
JP4291886B2 (ja) 1994-12-05 2009-07-08 住友電気工業株式会社 低欠陥ダイヤモンド単結晶及びその合成方法
US5803967A (en) * 1995-05-31 1998-09-08 Kobe Steel Usa Inc. Method of forming diamond devices having textured and highly oriented diamond layers therein
GB9616043D0 (en) * 1996-07-31 1996-09-11 De Beers Ind Diamond Diamond
JPH10236899A (ja) * 1997-02-27 1998-09-08 Matsushita Electric Works Ltd 不純物定量測定方法
JP4032482B2 (ja) 1997-04-18 2008-01-16 住友電気工業株式会社 単結晶ダイヤモンドの製造方法
JP3125046B2 (ja) * 1997-11-21 2001-01-15 工業技術院長 ダイヤモンド単結晶薄膜製造方法
GB9812341D0 (en) 1998-06-08 1998-08-05 De Beers Ind Diamond Detector for ionising radiation
GB2379451B (en) 2000-06-15 2004-05-05 Element Six Thick single crystal diamond layer method for making it and gemstones produced from the layer
IL153380A0 (en) * 2000-06-15 2003-07-06 Element Six Pty Ltd Single crystal diamond prepared by cvd
GB0130004D0 (en) * 2001-12-14 2002-02-06 Diamanx Products Ltd Coloured diamond
GB0130005D0 (en) * 2001-12-14 2002-02-06 Diamanx Products Ltd Boron doped diamond
US7019876B2 (en) * 2002-07-29 2006-03-28 Hewlett-Packard Development Company, L.P. Micro-mirror with rotor structure
GB0220767D0 (en) * 2002-09-06 2002-10-16 Diamanx Products Ltd Diamond radiation detector
AU2003259418A1 (en) 2002-09-06 2004-03-29 Element Six Limited Coloured diamond
GB0221949D0 (en) * 2002-09-20 2002-10-30 Diamanx Products Ltd Single crystal diamond
GB0227261D0 (en) * 2002-11-21 2002-12-31 Element Six Ltd Optical quality diamond material
AU2004303615A1 (en) 2003-12-12 2005-07-07 Element Six Limited Method of incorporating a mark in CVD diamond
DE602004016394D1 (de) 2003-12-12 2008-10-16 Element Six Ltd Verfahren zum einbringen einer markierung in einen cvd-diamanten

Also Published As

Publication number Publication date
GB2383588B (en) 2004-05-05
KR100837033B1 (ko) 2008-06-10
CN1243855C (zh) 2006-03-01
US9103050B2 (en) 2015-08-11
AU2001274368B2 (en) 2004-10-28
AU7436801A (en) 2001-12-24
US8501143B2 (en) 2013-08-06
IL153380A (en) 2006-08-20
JP2004503460A (ja) 2004-02-05
EP1292726A1 (de) 2003-03-19
DE60135653D1 (de) 2008-10-16
EP1292726B1 (de) 2008-09-03
JP4695821B2 (ja) 2011-06-08
US20040221795A1 (en) 2004-11-11
CA2412853C (en) 2009-08-25
RU2288302C2 (ru) 2006-11-27
EP1983080B1 (de) 2017-02-01
CN1441860A (zh) 2003-09-10
GB0300199D0 (en) 2003-02-05
US20090175777A1 (en) 2009-07-09
EP1983080A2 (de) 2008-10-22
GB2383588A (en) 2003-07-02
US20130202518A1 (en) 2013-08-08
CA2412853A1 (en) 2001-12-20
HK1057583A1 (en) 2004-04-08
TW548351B (en) 2003-08-21
IL153380A0 (en) 2003-07-06
EP1292726B8 (de) 2008-10-29
EP1983080A3 (de) 2012-12-19
EP1983080B8 (de) 2017-08-02
CZ302228B6 (cs) 2011-01-05
WO2001096633A1 (en) 2001-12-20
KR20030046338A (ko) 2003-06-12
CZ20024227A3 (cs) 2003-12-17

Similar Documents

Publication Publication Date Title
ATE407237T1 (de) Einkristalldiamant hergestellt durch cvd
GB2400116B (en) Boron doped diamond
WO2003024865A8 (de) Verfahren zur herstellung von mikro-elektromechanischen bauelementen
PH12013500599B1 (en) Polarizing photochromic devices and methods of making the same
GEP20084399B (en) Crystal forms of azithromycin
ATE549071T1 (de) Filterstruktur enthaltend polymernanofasern
DE60124631D1 (de) Vorrichtung zur Dämpfung von Drehmomentschwankungen mit einer Struktur zur Verringerung von Ausrichtungsfehlern des Drehmomentbegrenzers beim Zusammenbau
BR0206601B1 (pt) composição adesiva.
DE69526938D1 (de) Thermisch durch freie Radikale härtende Klebstoffe, Härtungsverfahren und dadurch hergestellte Gegenstände
BR0306905A (pt) Vacinas de flavivìrus
SE0300056D0 (sv) New glass material
WO2002001622A3 (en) Novel non-crystalline oxides for use in microelectronic, optical, and other applications
TW428306B (en) Packaging method for thin-film passive device on silicon
TW346653B (en) Silicon wafer and method of manufacturing the same
AU3950300A (en) Siliceous substrate with a silane layer and its manufacture
ATE385232T1 (de) Verfahren zur herstellung von 3, 3', 6, 6'- tetraalkylen-2, 2'-biphenolen und 3, 3', 6, 6'- tetraalkylen-5, 5'-dihalo-2, 2' biphenolen
BR0107592A (pt) Compostos calcilìticos
DE60124148D1 (de) Kalzilytische verbindungen
TW200531837A (en) Slotted substrates and methods of forming
PT1241314E (pt) Vidraca temperada sem encaixilhamento
DE50101337D1 (de) Formgebungseinrichtung zur Herstellung von Rohren aus Betongemenge
CY1110139T1 (el) Γλυκοπεπτιδικα αντιβιοτικα
NO20035819L (no) Fremgangsmate for fremstilling av overflateelement og overflateelement
BR9303522A (pt) Composiçao de argamassa colante elástica a processo de fabricaçao.
AU2001260709A1 (en) Single crystal silicon carbide and method for producing the same

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties