ATE409678T1 - Verfahren zur herstellung von trichlorsilan - Google Patents

Verfahren zur herstellung von trichlorsilan

Info

Publication number
ATE409678T1
ATE409678T1 AT04748762T AT04748762T ATE409678T1 AT E409678 T1 ATE409678 T1 AT E409678T1 AT 04748762 T AT04748762 T AT 04748762T AT 04748762 T AT04748762 T AT 04748762T AT E409678 T1 ATE409678 T1 AT E409678T1
Authority
AT
Austria
Prior art keywords
silicon
bed reactor
trichlorosilane
reaction
production
Prior art date
Application number
AT04748762T
Other languages
English (en)
Inventor
Jan-Otto Hoel
Harry Rong
Torbjorn Roe
Harald Oye
Original Assignee
Elkem Materials
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=27800779&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE409678(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Elkem Materials filed Critical Elkem Materials
Application granted granted Critical
Publication of ATE409678T1 publication Critical patent/ATE409678T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
    • C01B33/10742—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material
    • C01B33/10757—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material with the preferential formation of trichlorosilane
    • C01B33/10763—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material with the preferential formation of trichlorosilane from silicon
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Catalysts (AREA)
AT04748762T 2003-07-07 2004-06-24 Verfahren zur herstellung von trichlorsilan ATE409678T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NO20033093A NO321276B1 (no) 2003-07-07 2003-07-07 Fremgangsmate for fremstilling av triklorsilan og silisium for bruk ved fremstilling av triklorsilan

Publications (1)

Publication Number Publication Date
ATE409678T1 true ATE409678T1 (de) 2008-10-15

Family

ID=27800779

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04748762T ATE409678T1 (de) 2003-07-07 2004-06-24 Verfahren zur herstellung von trichlorsilan

Country Status (11)

Country Link
US (1) US7462341B2 (de)
EP (1) EP1680357B1 (de)
JP (1) JP4778896B2 (de)
KR (1) KR100752810B1 (de)
CN (1) CN100349797C (de)
AT (1) ATE409678T1 (de)
DE (2) DE04748762T1 (de)
EA (1) EA009060B1 (de)
ES (1) ES2310741T3 (de)
NO (1) NO321276B1 (de)
WO (1) WO2005003030A1 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NO20043828L (no) * 2004-09-13 2006-03-14 Elkem As Fremgangsmate for fremstilling av triklorsilan, fremgangsmate for fremstilling av silisium og silisium for bruk ved fremstilling av triklorsilan
NO20054402L (no) * 2005-09-22 2007-03-23 Elkem As Method for production of trichlorosilane and silicon for use in the production of trichlorosilane
PL2371383T3 (pl) 2005-12-29 2016-01-29 Boehringer Ingelheim Vetmedica Inc Zastosowanie kompozycji immunogennej do zmniejszania objawów klinicznych u świń
KR101573933B1 (ko) * 2008-02-29 2015-12-02 미쓰비시 마테리알 가부시키가이샤 트리클로로실란의 제조 방법 및 제조 장치
US20100264362A1 (en) * 2008-07-01 2010-10-21 Yongchae Chee Method of producing trichlorosilane (TCS) rich Chlorosilane product stably from a fluidized gas phase reactor (FBR) and the structure of the reactor
DE102008041974A1 (de) 2008-09-10 2010-03-11 Evonik Degussa Gmbh Vorrichtung, deren Verwendung und ein Verfahren zur energieautarken Hydrierung von Chlorsilanen
WO2010074673A1 (en) * 2008-12-23 2010-07-01 Arise Technologies Corporation Method and apparatus for the production of chlorosilanes
CN101798086B (zh) * 2009-01-20 2013-07-24 三菱综合材料株式会社 三氯硅烷制造装置以及三氯硅烷制造方法
US8168123B2 (en) * 2009-02-26 2012-05-01 Siliken Chemicals, S.L. Fluidized bed reactor for production of high purity silicon
EP2421659A1 (de) 2009-04-20 2012-02-29 Ae Polysilicon Corporation Reaktor mit siliciumbeschichteten metalloberflächen
TWI454309B (zh) * 2009-04-20 2014-10-01 Jiangsu Zhongneng Polysilicon Technology Dev Co Ltd 用於將反應排出氣體冷卻之方法及系統
NO20100358A1 (no) * 2010-03-12 2011-09-13 Elkem As Fremgangsmate for fremstilling av triklorsilan fra silisium, hydrogen og silisiumtetraklorid
NO334216B1 (no) 2010-08-13 2014-01-13 Elkem As Fremgangsmåte for fremstilling av triklorsilan og silisium for bruk ved fremstilling av triklorsilan
KR20140136985A (ko) * 2012-03-14 2014-12-01 센트로섬 포토볼타익스 유에스에이, 인크. 트리클로로실란의 제조
US8875728B2 (en) 2012-07-12 2014-11-04 Siliken Chemicals, S.L. Cooled gas distribution plate, thermal bridge breaking system, and related methods
US20160008784A1 (en) * 2013-03-13 2016-01-14 Sitec Gmbh Temperature management in chlorination processes and systems related thereto
DE102013215011A1 (de) 2013-07-31 2015-02-05 Wacker Chemie Ag Verfahren zur Herstellung von Trichlorsilan
KR101580171B1 (ko) 2014-01-23 2015-12-24 한국화학연구원 금속 실리사이드 표면개질 방법, 표면개질된 금속 실리사이드를 이용한 삼염화실란의 제조방법 및 제조장치
EP3233732B8 (de) * 2014-12-19 2020-06-17 DDP Specialty Electronic Materials US 9, LLC Verfahren zur herstellung von mono-wasserstoff-trihalosilanen
MY209092A (en) * 2019-05-29 2025-06-20 Wacker Chemie Ag Process for producing trichlorosilane with structure-optimised silicon particles
JP7278888B2 (ja) * 2019-06-28 2023-05-22 高純度シリコン株式会社 トリクロロシランの製造方法
WO2025158801A1 (ja) * 2024-01-24 2025-07-31 株式会社トクヤマ クロロシラン類の製造方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2380995A (en) * 1941-09-26 1945-08-07 Gen Electric Preparation of organosilicon halides
US4247528A (en) * 1979-04-11 1981-01-27 Dow Corning Corporation Method for producing solar-cell-grade silicon
US4585643A (en) * 1985-05-31 1986-04-29 Union Carbide Corporation Process for preparing chlorosilanes from silicon and hydrogen chloride using an oxygen promoter
DE3809784C1 (de) * 1988-03-23 1989-07-13 Huels Ag, 4370 Marl, De
KR950002860B1 (ko) * 1992-06-13 1995-03-27 한국과학기술연구원 클로로알켄닐실란들과그제조방법
US5871705A (en) * 1996-09-19 1999-02-16 Tokuyama Corporation Process for producing trichlorosilane
DE19645359A1 (de) * 1996-11-04 1998-05-07 Bayer Ag Verfahren zur Herstellung von Alkylhalogensilanen
DE10063863A1 (de) 2000-12-21 2003-07-10 Solarworld Ag Wirbelbettreaktor für die Trichlorsilansynthese
JP3812642B2 (ja) * 2001-02-14 2006-08-23 信越化学工業株式会社 オルガノハロシランの製造方法
DE10118483C1 (de) * 2001-04-12 2002-04-18 Wacker Chemie Gmbh Staubrückführung bei der Direktsynthese von Chlor- und Methylchlorsilanen in Wirbelschicht
NO20014148A (no) * 2001-08-27 2003-02-03 Elkem As Fremgangsmåte for fjerning av forurensinger fra silisiuminneholdende residuer
CN101460398B (zh) * 2006-04-13 2012-08-29 卡伯特公司 通过闭合环路方法生产硅

Also Published As

Publication number Publication date
JP2007527352A (ja) 2007-09-27
WO2005003030A1 (en) 2005-01-13
NO20033093L (no) 2005-01-10
CN100349797C (zh) 2007-11-21
KR20060056306A (ko) 2006-05-24
NO321276B1 (no) 2006-04-18
ES2310741T3 (es) 2009-01-16
EA200600192A1 (ru) 2006-06-30
KR100752810B1 (ko) 2007-08-29
US7462341B2 (en) 2008-12-09
CN1819971A (zh) 2006-08-16
DE602004016876D1 (de) 2008-11-13
US20070086936A1 (en) 2007-04-19
NO20033093D0 (no) 2003-07-07
DE04748762T1 (de) 2007-06-06
EP1680357A1 (de) 2006-07-19
JP4778896B2 (ja) 2011-09-21
EA009060B1 (ru) 2007-10-26
EP1680357B1 (de) 2008-10-01

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