ATE412523T1 - Flüssigkeitsausstosskopf und dazugehöriges herstellungsverfahren - Google Patents

Flüssigkeitsausstosskopf und dazugehöriges herstellungsverfahren

Info

Publication number
ATE412523T1
ATE412523T1 AT02020228T AT02020228T ATE412523T1 AT E412523 T1 ATE412523 T1 AT E412523T1 AT 02020228 T AT02020228 T AT 02020228T AT 02020228 T AT02020228 T AT 02020228T AT E412523 T1 ATE412523 T1 AT E412523T1
Authority
AT
Austria
Prior art keywords
plate member
orifice plate
substrate
liquid discharge
liquid
Prior art date
Application number
AT02020228T
Other languages
English (en)
Inventor
Tadayoshi Inamoto
Haruhiko Terai
Hiroyuki Yamamoto
Yoshiaki Kurihara
Kenji Yabe
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Kk filed Critical Canon Kk
Application granted granted Critical
Publication of ATE412523T1 publication Critical patent/ATE412523T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14032—Structure of the pressure chamber
    • B41J2/1404—Geometrical characteristics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/1433—Structure of nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/11—Embodiments of or processes related to ink-jet heads characterised by specific geometrical characteristics

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
AT02020228T 2001-09-12 2002-09-10 Flüssigkeitsausstosskopf und dazugehöriges herstellungsverfahren ATE412523T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001276757A JP4731763B2 (ja) 2001-09-12 2001-09-12 液体噴射記録ヘッドおよびその製造方法

Publications (1)

Publication Number Publication Date
ATE412523T1 true ATE412523T1 (de) 2008-11-15

Family

ID=19101412

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02020228T ATE412523T1 (de) 2001-09-12 2002-09-10 Flüssigkeitsausstosskopf und dazugehöriges herstellungsverfahren

Country Status (7)

Country Link
US (1) US6799831B2 (de)
EP (2) EP1293343B1 (de)
JP (1) JP4731763B2 (de)
KR (1) KR100506436B1 (de)
CN (1) CN1241743C (de)
AT (1) ATE412523T1 (de)
DE (1) DE60229601D1 (de)

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JP4731763B2 (ja) 2001-09-12 2011-07-27 キヤノン株式会社 液体噴射記録ヘッドおよびその製造方法
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CN1317736C (zh) * 2003-08-14 2007-05-23 明基电通股份有限公司 单片流体喷射装置的制作方法
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JP5183187B2 (ja) * 2007-12-14 2013-04-17 キヤノン株式会社 液体吐出ヘッド
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JP5312009B2 (ja) 2008-01-23 2013-10-09 キヤノン株式会社 液体噴射記録ヘッド
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JP5288831B2 (ja) * 2008-02-27 2013-09-11 キヤノン株式会社 インクジェット記録ヘッドの製造方法
JP5322719B2 (ja) * 2008-03-24 2013-10-23 キヤノン株式会社 インクジェット記録ヘッド
JP5294720B2 (ja) * 2008-06-17 2013-09-18 キヤノン株式会社 インクジェット記録ヘッド
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JP5188308B2 (ja) 2008-07-29 2013-04-24 キヤノン株式会社 インクジェット記録ヘッド
JP5132463B2 (ja) * 2008-07-29 2013-01-30 キヤノン株式会社 記録ヘッド
US8388099B2 (en) * 2009-07-22 2013-03-05 Canon Kabushiki Kaisha Ink jet recording head
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JP5596954B2 (ja) * 2009-10-08 2014-09-24 キヤノン株式会社 液体供給部材、液体供給部材の製造方法及び液体吐出ヘッドの製造方法
JP5393423B2 (ja) * 2009-12-10 2014-01-22 キヤノン株式会社 インク吐出ヘッド及びその製造方法
US8765498B2 (en) * 2010-05-19 2014-07-01 Canon Kabushiki Kaisha Method of manufacturing liquid discharge head substrate, method of manufacturing liquid discharge head, and method of manufacturing liquid discharge head assembly
JP5106601B2 (ja) * 2010-08-26 2012-12-26 キヤノン株式会社 液体吐出ヘッド用基板の製造方法、液体吐出ヘッドの製造方法、及び液体吐出ヘッド用基板の検査方法
JP5865019B2 (ja) * 2010-11-17 2016-02-17 キヤノン株式会社 液滴吐出ヘッドおよびその製造方法
US20120306047A1 (en) * 2011-06-06 2012-12-06 Shenzhen China Star Optoelectronics Technology Co. Ltd. Chip-on-film structure for liquid crystal panel
JP5911264B2 (ja) 2011-11-01 2016-04-27 キヤノン株式会社 液体吐出ヘッドの製造方法
JP6120645B2 (ja) 2012-04-18 2017-04-26 キヤノン株式会社 液体吐出ヘッド
JP2013240990A (ja) * 2012-04-27 2013-12-05 Canon Inc 液体吐出ヘッドおよびその製造方法
JP6021415B2 (ja) * 2012-04-27 2016-11-09 キヤノン株式会社 液体吐出ヘッド、および記録装置
JP6180143B2 (ja) * 2013-03-22 2017-08-16 キヤノン株式会社 液体吐出ヘッドの製造方法
JP2014233960A (ja) * 2013-06-05 2014-12-15 キヤノン株式会社 流路構成体および流路構成体の製造方法
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JP6727842B2 (ja) * 2015-03-04 2020-07-22 キヤノン株式会社 構造体の製造方法
JP6961978B2 (ja) * 2017-03-30 2021-11-05 ブラザー工業株式会社 液滴吐出ヘッド
JP7652641B2 (ja) 2021-06-25 2025-03-27 キヤノン株式会社 液体吐出ヘッド
JP7825980B2 (ja) 2021-11-29 2026-03-09 キヤノン株式会社 液体吐出装置
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JP4731763B2 (ja) 2001-09-12 2011-07-27 キヤノン株式会社 液体噴射記録ヘッドおよびその製造方法

Also Published As

Publication number Publication date
EP1950040B1 (de) 2012-06-06
JP4731763B2 (ja) 2011-07-27
EP1293343A3 (de) 2003-09-24
KR100506436B1 (ko) 2005-08-11
US20030048328A1 (en) 2003-03-13
US6799831B2 (en) 2004-10-05
EP1950040A2 (de) 2008-07-30
EP1950040A3 (de) 2008-08-20
EP1293343A2 (de) 2003-03-19
EP1293343B1 (de) 2008-10-29
CN1404995A (zh) 2003-03-26
CN1241743C (zh) 2006-02-15
KR20030023512A (ko) 2003-03-19
DE60229601D1 (de) 2008-12-11
JP2003080717A (ja) 2003-03-19

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