ATE414863T1 - Wellendichtungsvorrichtung - Google Patents

Wellendichtungsvorrichtung

Info

Publication number
ATE414863T1
ATE414863T1 AT05028506T AT05028506T ATE414863T1 AT E414863 T1 ATE414863 T1 AT E414863T1 AT 05028506 T AT05028506 T AT 05028506T AT 05028506 T AT05028506 T AT 05028506T AT E414863 T1 ATE414863 T1 AT E414863T1
Authority
AT
Austria
Prior art keywords
outer cylindrical
driving shaft
cylindrical surface
sealing lip
sealing
Prior art date
Application number
AT05028506T
Other languages
English (en)
Inventor
Tetsuya Watanabe
Hiroki Mori
Chohei Okuno
Original Assignee
Teijin Seiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teijin Seiki Co Ltd filed Critical Teijin Seiki Co Ltd
Application granted granted Critical
Publication of ATE414863T1 publication Critical patent/ATE414863T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/32—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings
    • F16J15/324—Arrangements for lubrication or cooling of the sealing itself
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/002—Sealings comprising at least two sealings in succession
    • F16J15/006—Sealings comprising at least two sealings in succession with division of the pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/32—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings
    • F16J15/3204—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings with at least one lip
    • F16J15/3208—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings with at least one lip provided with tension elements, e.g. elastic rings
    • F16J15/3212—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings with at least one lip provided with tension elements, e.g. elastic rings with metal springs
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/32—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings
    • F16J15/3204—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings with at least one lip
    • F16J15/3232—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings with at least one lip having two or more lips
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/32—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings
    • F16J15/3204—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings with at least one lip
    • F16J15/3232—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings with at least one lip having two or more lips
    • F16J15/3236—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings with at least one lip having two or more lips with at least one lip for each surface, e.g. U-cup packings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/54—Other sealings for rotating shafts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7604—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support
    • H10P72/7626—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the construction of the shaft
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S277/00—Seal for a joint or juncture
    • Y10S277/913—Seal for fluid pressure below atmospheric, e.g. vacuum

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sealing With Elastic Sealing Lips (AREA)
  • Sealing Devices (AREA)
  • Sealing Of Bearings (AREA)
  • Heat Treatment Of Articles (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Vacuum Packaging (AREA)
  • Gasket Seals (AREA)
AT05028506T 2000-10-25 2001-10-23 Wellendichtungsvorrichtung ATE414863T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000324831 2000-10-25
JP2001291877A JP2002228010A (ja) 2000-10-25 2001-09-25 真空シール機構および真空シール装置

Publications (1)

Publication Number Publication Date
ATE414863T1 true ATE414863T1 (de) 2008-12-15

Family

ID=26602702

Family Applications (2)

Application Number Title Priority Date Filing Date
AT05028506T ATE414863T1 (de) 2000-10-25 2001-10-23 Wellendichtungsvorrichtung
AT01309001T ATE331166T1 (de) 2000-10-25 2001-10-23 Wellendichtungsvorrichtung

Family Applications After (1)

Application Number Title Priority Date Filing Date
AT01309001T ATE331166T1 (de) 2000-10-25 2001-10-23 Wellendichtungsvorrichtung

Country Status (9)

Country Link
US (2) US7090222B2 (de)
EP (2) EP1640645B1 (de)
JP (1) JP2002228010A (de)
KR (1) KR100570960B1 (de)
CN (1) CN1327150C (de)
AT (2) ATE414863T1 (de)
DE (2) DE60136658D1 (de)
HK (1) HK1044362B (de)
TW (1) TW505756B (de)

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* Cited by examiner, † Cited by third party
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US7063193B2 (en) * 2002-09-25 2006-06-20 Tochigi Fuji Sangyo Kabushiki Kaisha Seal structure for relatively rotational members
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CN108411372A (zh) * 2018-05-04 2018-08-17 常州比太黑硅科技有限公司 一种真空腔室腔内升降机构
TWI735960B (zh) 2018-09-28 2021-08-11 美商英普羅密封有限責任公司 環狀密封組件
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JP7090810B2 (ja) * 2019-07-24 2022-06-24 Nok株式会社 密封装置
EP4330567A4 (de) * 2021-04-30 2024-12-18 Abb Schweiz Ag Dichtungsanordnung und roboter
CN116025638A (zh) * 2021-10-26 2023-04-28 舍弗勒技术股份两合公司 密封装置
CN114392694A (zh) * 2021-12-27 2022-04-26 南通海嘉智能科技有限公司 天然气水合物合成装置的密封结构
JP7135224B1 (ja) * 2022-01-12 2022-09-12 Nok株式会社 ハブシールの製造方法
CN116564870A (zh) * 2022-01-27 2023-08-08 天虹科技股份有限公司 具有调整功能的键合机台
CN114311015B (zh) * 2022-02-16 2024-11-22 深圳市越疆科技有限公司 关节模组的密封结构、关节模组、机械臂和机器人
CN116292897B (zh) * 2023-01-29 2025-09-30 中国原子能科学研究院 动态密封装置及内压试验炉

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Also Published As

Publication number Publication date
CN1327150C (zh) 2007-07-18
DE60120876D1 (de) 2006-08-03
US7055825B2 (en) 2006-06-06
ATE331166T1 (de) 2006-07-15
HK1044362A1 (zh) 2002-10-18
KR100570960B1 (ko) 2006-04-13
HK1044362B (zh) 2008-03-14
TW505756B (en) 2002-10-11
KR20020032343A (ko) 2002-05-03
US20020047242A1 (en) 2002-04-25
EP1201975B1 (de) 2006-06-21
EP1201975A3 (de) 2003-08-20
EP1201975A2 (de) 2002-05-02
DE60136658D1 (de) 2009-01-02
JP2002228010A (ja) 2002-08-14
CN1350132A (zh) 2002-05-22
US7090222B2 (en) 2006-08-15
EP1640645B1 (de) 2008-11-19
EP1640645A1 (de) 2006-03-29
US20040169337A1 (en) 2004-09-02
DE60120876T2 (de) 2007-01-11

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