ATE422714T1 - Aktor mit reduzierter antriebskapazität - Google Patents

Aktor mit reduzierter antriebskapazität

Info

Publication number
ATE422714T1
ATE422714T1 AT05807477T AT05807477T ATE422714T1 AT E422714 T1 ATE422714 T1 AT E422714T1 AT 05807477 T AT05807477 T AT 05807477T AT 05807477 T AT05807477 T AT 05807477T AT E422714 T1 ATE422714 T1 AT E422714T1
Authority
AT
Austria
Prior art keywords
layer
actuator
drive capacity
reduced drive
piezoelectric
Prior art date
Application number
AT05807477T
Other languages
English (en)
Inventor
Andreas Bibl
Jeffrey Birkmeyer
Original Assignee
Fujifilm Dimatix Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujifilm Dimatix Inc filed Critical Fujifilm Dimatix Inc
Application granted granted Critical
Publication of ATE422714T1 publication Critical patent/ATE422714T1/de

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14491—Electrical connection

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Fluid-Damping Devices (AREA)
  • Valve-Gear Or Valve Arrangements (AREA)
  • Valve Device For Special Equipments (AREA)
AT05807477T 2004-08-02 2005-08-01 Aktor mit reduzierter antriebskapazität ATE422714T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/910,450 US7344228B2 (en) 2004-08-02 2004-08-02 Actuator with reduced drive capacitance

Publications (1)

Publication Number Publication Date
ATE422714T1 true ATE422714T1 (de) 2009-02-15

Family

ID=35517302

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05807477T ATE422714T1 (de) 2004-08-02 2005-08-01 Aktor mit reduzierter antriebskapazität

Country Status (8)

Country Link
US (1) US7344228B2 (de)
EP (1) EP1779445B1 (de)
JP (1) JP4773444B2 (de)
KR (1) KR101114143B1 (de)
CN (1) CN100514691C (de)
AT (1) ATE422714T1 (de)
DE (1) DE602005012704D1 (de)
WO (1) WO2006015378A2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7420317B2 (en) * 2004-10-15 2008-09-02 Fujifilm Dimatix, Inc. Forming piezoelectric actuators
US7388319B2 (en) * 2004-10-15 2008-06-17 Fujifilm Dimatix, Inc. Forming piezoelectric actuators
JP5639738B2 (ja) * 2008-02-14 2014-12-10 日本碍子株式会社 圧電／電歪素子の製造方法
WO2009143354A2 (en) * 2008-05-23 2009-11-26 Fujifilm Corporation Insulated film use in a mems device
US8454132B2 (en) 2009-12-14 2013-06-04 Fujifilm Corporation Moisture protection of fluid ejector
US8297742B2 (en) * 2010-03-19 2012-10-30 Fujifilm Corporation Bonded circuits and seals in a printing device
US8556364B2 (en) * 2010-07-01 2013-10-15 Fujifilm Dimatix, Inc. Determining whether a flow path is ready for ejecting a drop
CN102794989A (zh) * 2011-05-27 2012-11-28 研能科技股份有限公司 压电式喷墨头结构
JP2013154611A (ja) * 2012-01-31 2013-08-15 Seiko Epson Corp 液体噴射ヘッドおよび液体噴射装置
ITUB20159497A1 (it) * 2015-12-24 2017-06-24 St Microelectronics Srl Dispositivo piezoelettrico mems e relativo procedimento di fabbricazione
GB2546097B (en) * 2016-01-08 2020-12-30 Xaar Technology Ltd Droplet deposition head
CN110087886B (zh) 2016-12-19 2021-06-22 富士胶卷迪马蒂克斯股份有限公司 流体输送系统的致动器
JP7214468B2 (ja) 2018-12-25 2023-01-30 キヤノン株式会社 液体吐出ヘッド

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3344888B2 (ja) 1995-12-28 2002-11-18 日本碍子株式会社 圧電／電歪膜型素子及びその製造方法
EP0800920B1 (de) * 1996-04-10 2002-02-06 Seiko Epson Corporation Tintenstrahlaufzeichnungskopf
JP3552013B2 (ja) * 1996-12-09 2004-08-11 セイコーエプソン株式会社 インクジェット式記録ヘッド
WO1999004976A1 (en) * 1997-07-25 1999-02-04 Seiko Epson Corporation Ink jet recording head and ink jet recorder
WO2001060621A1 (en) 2000-02-18 2001-08-23 Fujitsu Limited Ink-jet recording head and method for manufacturing the same
JP3846406B2 (ja) 2002-01-10 2006-11-15 株式会社村田製作所 電子部品、その製造方法、それを用いたフィルタおよびデュプレクサならびに電子通信機器
DE60332174D1 (de) * 2002-02-19 2010-05-27 Brother Ind Ltd Tintenstrahldruckkopf und dazugehöriges Herstellungsverfahren, Tintenstrahldrucker und Herstellungsverfahren eines Aktors
JP3812658B2 (ja) * 2002-03-15 2006-08-23 セイコーエプソン株式会社 インクジェット式記録ヘッド及びその製造方法並びにインクジェット式記録装置
JP3991894B2 (ja) 2002-03-18 2007-10-17 セイコーエプソン株式会社 圧電アクチュエータの製造方法、液体噴射ヘッドの製造方法、及び、アクチュエータ母部材
JP2004001431A (ja) 2002-03-25 2004-01-08 Seiko Epson Corp 液体噴射ヘッド及び液体噴射装置
JP4186494B2 (ja) 2002-04-01 2008-11-26 セイコーエプソン株式会社 液体噴射ヘッド

Also Published As

Publication number Publication date
EP1779445A2 (de) 2007-05-02
KR101114143B1 (ko) 2012-03-13
JP4773444B2 (ja) 2011-09-14
WO2006015378A3 (en) 2006-03-23
JP2008508850A (ja) 2008-03-21
CN101040394A (zh) 2007-09-19
EP1779445B1 (de) 2009-02-11
WO2006015378A2 (en) 2006-02-09
US20060023032A1 (en) 2006-02-02
US7344228B2 (en) 2008-03-18
KR20070047318A (ko) 2007-05-04
DE602005012704D1 (de) 2009-03-26
CN100514691C (zh) 2009-07-15

Similar Documents

Publication Publication Date Title
DE602005012704D1 (de) Aktor mit reduzierter antriebskapazität
EP1835550A3 (de) Gehäusekonstruktion für Festkörperbeleuchtungsvorrichtungen und Herstellungsverfahren dafür
TW200703391A (en) Electrochemical device
ATE517752T1 (de) Piezoelektrischer aktuator und herstellungsverfahren dafür
ATE504095T1 (de) Hörgerät mit wiederaufladbarer batterie und wiederaufladbare batterie
ATE432537T1 (de) Piezoelektrischer aktor
EP1331667A3 (de) Anzeigevorrichtung und Herstellungsverfahren
WO2007095061A3 (en) Device including semiconductor nanocrystals and a layer including a doped organic material and methods
WO2008089401A3 (en) Flexible transparent electrodes via nanowires and sacrificial conductive layer
WO2007094476A8 (en) Light-emitting diode
WO2008137140A3 (en) Monolithic integration of nonplanar solar cells
ATE524852T1 (de) Hybridbatterie
EP1211702A4 (de) Aktivierter kohlenstoff für elektrischen doppelschichtkondensator
WO2008049040A3 (en) Electrode for energy storage device
WO2008019073A3 (en) System and method for creating electric isolation between layers for photovoltaic applications
DE602007006401D1 (de) Lithium-Akku, der eine Stromkollektor-Elektroden-Anordung mit Expansionsräumen umfasst, und entsprechendes Herstellungsverfahren
WO2010134302A3 (en) Method for manufacturing a capacitive electromechanical transducer
WO2009044698A1 (ja) 半導体発光素子および半導体発光素子の製造方法
WO2006095566A8 (en) Nitride semiconductor light-emitting device and method for fabrication thereof
WO2006035744A8 (ja) 絶縁体被膜層担持電極を有する気体励起装置、及び気体励起方法
WO2008143976A3 (en) Permanent magnet motor including a double rotor
FR2954626B1 (fr) Resonateur acoustique comprenant un electret, et procede de fabrication de ce resonateur, application aux filtres commutables a resonateurs couples
ATE417367T1 (de) Oled-vorrichtung
WO2003067640A3 (de) Verfahren zur herstellung und aufbau einer speicherzelle
ATE467267T1 (de) Resonator

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties