ATE428897T1 - Vorrichtung zum steuern einer flüssigkeit in einem mikromechanischen heizwasserspeicher - Google Patents

Vorrichtung zum steuern einer flüssigkeit in einem mikromechanischen heizwasserspeicher

Info

Publication number
ATE428897T1
ATE428897T1 AT99948357T AT99948357T ATE428897T1 AT E428897 T1 ATE428897 T1 AT E428897T1 AT 99948357 T AT99948357 T AT 99948357T AT 99948357 T AT99948357 T AT 99948357T AT E428897 T1 ATE428897 T1 AT E428897T1
Authority
AT
Austria
Prior art keywords
housing
fluid
thermally conductive
controlling
liquid
Prior art date
Application number
AT99948357T
Other languages
English (en)
Inventor
Bradford Cozad
Original Assignee
Smc Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Smc Kk filed Critical Smc Kk
Application granted granted Critical
Publication of ATE428897T1 publication Critical patent/ATE428897T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0015—Diaphragm or membrane valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0044—Electric operating means therefor using thermo-electric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
    • F16K99/0061—Operating means specially adapted for microvalves actuated by fluids actuated by an expanding gas or liquid volume
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0094—Micropumps

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Temperature-Responsive Valves (AREA)
  • Micromachines (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Cookers (AREA)
AT99948357T 1998-09-25 1999-09-24 Vorrichtung zum steuern einer flüssigkeit in einem mikromechanischen heizwasserspeicher ATE428897T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/161,185 US6160243A (en) 1998-09-25 1998-09-25 Apparatus and method for controlling fluid in a micromachined boiler
PCT/US1999/021796 WO2000019161A1 (en) 1998-09-25 1999-09-24 Apparatus and method for controlling fluid in a micromachined boiler

Publications (1)

Publication Number Publication Date
ATE428897T1 true ATE428897T1 (de) 2009-05-15

Family

ID=22580190

Family Applications (1)

Application Number Title Priority Date Filing Date
AT99948357T ATE428897T1 (de) 1998-09-25 1999-09-24 Vorrichtung zum steuern einer flüssigkeit in einem mikromechanischen heizwasserspeicher

Country Status (9)

Country Link
US (1) US6160243A (de)
EP (1) EP1116003B1 (de)
JP (1) JP4496422B2 (de)
KR (1) KR100754576B1 (de)
CN (1) CN1238684C (de)
AT (1) ATE428897T1 (de)
AU (1) AU6155799A (de)
DE (1) DE69940742D1 (de)
WO (1) WO2000019161A1 (de)

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SE0100422D0 (sv) * 2001-02-08 2001-02-08 Goeran Langstedt Mikroelektromekanisk- och nanoteknikbaserad flödes- och analysanordning
FR2828245B1 (fr) * 2001-04-27 2005-11-11 Poudres & Explosifs Ste Nale Microactionneurs pyrotechniques pour microsystemes
JP3756429B2 (ja) * 2001-07-12 2006-03-15 Ｓｍｃ株式会社 流量制御弁
JP2003094395A (ja) * 2001-09-26 2003-04-03 Olympus Optical Co Ltd アレイ化マイクロ流体素子
US20030116552A1 (en) * 2001-12-20 2003-06-26 Stmicroelectronics Inc. Heating element for microfluidic and micromechanical applications
EP1490601B1 (de) * 2002-03-23 2007-08-15 Starbridge Systems Limited Mikromechanische bauelemente
US6838114B2 (en) 2002-05-24 2005-01-04 Micron Technology, Inc. Methods for controlling gas pulsing in processes for depositing materials onto micro-device workpieces
US6821347B2 (en) 2002-07-08 2004-11-23 Micron Technology, Inc. Apparatus and method for depositing materials onto microelectronic workpieces
US6817373B2 (en) * 2002-07-26 2004-11-16 Applera Corporation One-directional microball valve for a microfluidic device
US6955725B2 (en) 2002-08-15 2005-10-18 Micron Technology, Inc. Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces
US6884296B2 (en) * 2002-08-23 2005-04-26 Micron Technology, Inc. Reactors having gas distributors and methods for depositing materials onto micro-device workpieces
US20040040502A1 (en) * 2002-08-29 2004-03-04 Micron Technology, Inc. Micromachines for delivering precursors and gases for film deposition
US20040040503A1 (en) * 2002-08-29 2004-03-04 Micron Technology, Inc. Micromachines for delivering precursors and gases for film deposition
US6869818B2 (en) * 2002-11-18 2005-03-22 Redwood Microsystems, Inc. Method for producing and testing a corrosion-resistant channel in a silicon device
US7335396B2 (en) 2003-04-24 2008-02-26 Micron Technology, Inc. Methods for controlling mass flow rates and pressures in passageways coupled to reaction chambers and systems for depositing material onto microfeature workpieces in reaction chambers
US7192001B2 (en) * 2003-05-08 2007-03-20 The Regents Of The University Of Michigan Office Of Technology Transfer Thermopneumatic microvalve
US7235138B2 (en) 2003-08-21 2007-06-26 Micron Technology, Inc. Microfeature workpiece processing apparatus and methods for batch deposition of materials on microfeature workpieces
US7344755B2 (en) 2003-08-21 2008-03-18 Micron Technology, Inc. Methods and apparatus for processing microfeature workpieces; methods for conditioning ALD reaction chambers
US7422635B2 (en) 2003-08-28 2008-09-09 Micron Technology, Inc. Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces
US7056806B2 (en) 2003-09-17 2006-06-06 Micron Technology, Inc. Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces
US7282239B2 (en) 2003-09-18 2007-10-16 Micron Technology, Inc. Systems and methods for depositing material onto microfeature workpieces in reaction chambers
US7323231B2 (en) 2003-10-09 2008-01-29 Micron Technology, Inc. Apparatus and methods for plasma vapor deposition processes
US7581511B2 (en) 2003-10-10 2009-09-01 Micron Technology, Inc. Apparatus and methods for manufacturing microfeatures on workpieces using plasma vapor processes
US7647886B2 (en) 2003-10-15 2010-01-19 Micron Technology, Inc. Systems for depositing material onto workpieces in reaction chambers and methods for removing byproducts from reaction chambers
US7258892B2 (en) 2003-12-10 2007-08-21 Micron Technology, Inc. Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition
US7906393B2 (en) 2004-01-28 2011-03-15 Micron Technology, Inc. Methods for forming small-scale capacitor structures
US7309056B2 (en) * 2004-03-26 2007-12-18 Smc Kabushiki Kaisha Dual pedestal shut-off valve
US7584942B2 (en) 2004-03-31 2009-09-08 Micron Technology, Inc. Ampoules for producing a reaction gas and systems for depositing materials onto microfeature workpieces in reaction chambers
US8133554B2 (en) 2004-05-06 2012-03-13 Micron Technology, Inc. Methods for depositing material onto microfeature workpieces in reaction chambers and systems for depositing materials onto microfeature workpieces
US7699932B2 (en) 2004-06-02 2010-04-20 Micron Technology, Inc. Reactors, systems and methods for depositing thin films onto microfeature workpieces
CN105805400A (zh) * 2016-05-16 2016-07-27 江苏微全芯生物科技有限公司 温控阀芯组件、温控阀、微流道控制芯片及控制系统
US20250065324A1 (en) * 2021-04-23 2025-02-27 The General Hospital Corporation Fluidic transistors and uses thereof

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US2241086A (en) * 1939-01-28 1941-05-06 Gen Motors Corp Refrigerating apparatus
US3538744A (en) * 1967-11-09 1970-11-10 Phillips Petroleum Co Chromatography apparatus
DE2749240C3 (de) * 1977-11-03 1980-09-11 Danfoss A/S, Nordborg (Daenemark) Regelvorrichtung für das Ventil einer Kälteanlage
US4267853A (en) * 1978-02-13 1981-05-19 Toho Gasu Kabushiki Daisha Self-closing gas pipes and pipe joints
GB2150780B (en) * 1983-11-30 1986-10-08 Standard Telephones Cables Ltd Optical actuator
US4792977A (en) * 1986-03-12 1988-12-20 Beltone Electronics Corporation Hearing aid circuit
US4824073A (en) * 1986-09-24 1989-04-25 Stanford University Integrated, microminiature electric to fluidic valve
US4935040A (en) * 1989-03-29 1990-06-19 The Perkin-Elmer Corporation Miniature devices useful for gas chromatography
US5186001A (en) * 1991-11-08 1993-02-16 University Of Southern California Transient energy release microdevices and methods
US5333831A (en) * 1993-02-19 1994-08-02 Hewlett-Packard Company High performance micromachined valve orifice and seat
DE69415549T2 (de) * 1993-10-04 1999-08-19 Res International Mikromaschinen-flüssigkeitsfluss-regulator
US5649423A (en) * 1994-06-07 1997-07-22 Sandia Corporation Micromechanism linear actuator with capillary force sealing
US5546757A (en) * 1994-09-07 1996-08-20 General Electric Company Refrigeration system with electrically controlled expansion valve
US5846396A (en) * 1994-11-10 1998-12-08 Sarnoff Corporation Liquid distribution system
US5966501A (en) * 1996-04-19 1999-10-12 Themion Systems International Method for controlling the viscosity of a fluid in a defined volume
KR0185071B1 (ko) * 1996-08-01 1999-04-01 유환덕 트랙터용 무단변속기 제어장치
US5865417A (en) * 1996-09-27 1999-02-02 Redwood Microsystems, Inc. Integrated electrically operable normally closed valve
EP0954450A4 (de) * 1997-01-24 2000-03-22 California Inst Of Techn Mikroelektromechanisches ventil

Also Published As

Publication number Publication date
EP1116003A4 (de) 2006-12-06
DE69940742D1 (de) 2009-05-28
AU6155799A (en) 2000-04-17
JP2002525215A (ja) 2002-08-13
KR100754576B1 (ko) 2007-09-05
KR20010090575A (ko) 2001-10-18
EP1116003A1 (de) 2001-07-18
CN1238684C (zh) 2006-01-25
CN1331792A (zh) 2002-01-16
US6160243A (en) 2000-12-12
JP4496422B2 (ja) 2010-07-07
EP1116003B1 (de) 2009-04-15
WO2000019161A1 (en) 2000-04-06

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