ATE433215T1 - Passiv-gasströmungsmanagement- und - filtrierungseinrichtung zur verwendung in einem exzimer- oder transversalentladungslaser - Google Patents

Passiv-gasströmungsmanagement- und - filtrierungseinrichtung zur verwendung in einem exzimer- oder transversalentladungslaser

Info

Publication number
ATE433215T1
ATE433215T1 AT04776754T AT04776754T ATE433215T1 AT E433215 T1 ATE433215 T1 AT E433215T1 AT 04776754 T AT04776754 T AT 04776754T AT 04776754 T AT04776754 T AT 04776754T AT E433215 T1 ATE433215 T1 AT E433215T1
Authority
AT
Austria
Prior art keywords
laser
gas flow
flow management
chamber
excimer
Prior art date
Application number
AT04776754T
Other languages
English (en)
Inventor
Brian Bliven
David Turnquist
Original Assignee
Amo Mfg Usa Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Amo Mfg Usa Llc filed Critical Amo Mfg Usa Llc
Application granted granted Critical
Publication of ATE433215T1 publication Critical patent/ATE433215T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
AT04776754T 2003-07-31 2004-06-17 Passiv-gasströmungsmanagement- und - filtrierungseinrichtung zur verwendung in einem exzimer- oder transversalentladungslaser ATE433215T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/632,686 US6973112B2 (en) 2003-07-31 2003-07-31 Passive gas flow management and filtration device for use in an excimer or transverse discharge laser
PCT/US2004/019539 WO2005018059A2 (en) 2003-07-31 2004-06-17 Passive gas flow management and filtration device for use in an excimer or transverse discharge laser

Publications (1)

Publication Number Publication Date
ATE433215T1 true ATE433215T1 (de) 2009-06-15

Family

ID=34104453

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04776754T ATE433215T1 (de) 2003-07-31 2004-06-17 Passiv-gasströmungsmanagement- und - filtrierungseinrichtung zur verwendung in einem exzimer- oder transversalentladungslaser

Country Status (7)

Country Link
US (1) US6973112B2 (de)
EP (1) EP1649567B1 (de)
JP (1) JP4443566B2 (de)
AT (1) ATE433215T1 (de)
CA (1) CA2532810C (de)
DE (1) DE602004021389D1 (de)
WO (1) WO2005018059A2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7257144B2 (en) * 2004-02-11 2007-08-14 Photomedex Rare gas-halogen excimer lasers with baffles
US20070002918A1 (en) * 2005-06-30 2007-01-04 Norbert Niemoeller Acoustic shock-wave damping in pulsed gas-laser discharge
US20070030876A1 (en) * 2005-08-05 2007-02-08 Levatter Jeffrey I Apparatus and method for purging and recharging excimer laser gases
ATE510332T1 (de) * 2007-03-27 2011-06-15 Photomedex Inc Verfahren und vorrichtung für den effizienten betrieb eines gasentladungsexcimerlasers
US8043752B2 (en) * 2008-05-06 2011-10-25 Siemens Energy, Inc. Fuel cell generator with fuel electrodes that control on-cell fuel reformation
CA3177774A1 (en) * 2020-06-02 2021-04-29 James Cash Gas shut-off in a particulate removal device and method
CN116868456A (zh) 2021-03-24 2023-10-10 极光先进雷射株式会社 腔装置、气体激光装置和电子器件的制造方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2243538B1 (de) * 1973-09-06 1976-06-18 Comp Generale Electricite
US4016448A (en) * 1975-11-26 1977-04-05 United Technologies Corporation High power electric discharge method and apparatus for laser chemical synthesis and other applications
US4470701A (en) * 1980-10-17 1984-09-11 Raytheon Company Dispersion equalized ring laser gyroscope
EP0258328B1 (de) * 1986-03-12 1991-10-09 Prc Corporation Verfahren zur stabilisierung des betriebes eines axialgaslasers und axialgaslaser
US5018162A (en) * 1988-01-15 1991-05-21 Cymer Laser Technologies Compact excimer laser
US5027366A (en) * 1988-01-15 1991-06-25 Cymer Laser Technologies Compact excimer laser
CA2043512A1 (en) * 1990-06-01 1991-12-02 Mitsugu Terada Gas laser apparatus
US5711884A (en) * 1990-08-22 1998-01-27 University Of Pittsburgh Of The Commonwealth System Of Higher Education Method of filtering submicron particles with gel lattice membrane filter
DE69200247T2 (de) * 1991-04-23 1994-11-24 Matsushita Electric Ind Co Ltd Entladungsgepumpter Gaslaser mit Baffle-Trennung für kontrollierten Gasfluss an Vorionisierern.
US6450641B2 (en) * 1992-06-02 2002-09-17 Lasersight Technologies, Inc. Method of corneal analysis using a checkered placido apparatus
US5359620A (en) * 1992-11-12 1994-10-25 Cymer Laser Technologies Apparatus for, and method of, maintaining a clean window in a laser
JPH09260749A (ja) * 1996-03-22 1997-10-03 Komatsu Ltd ガスレーザ装置
US5729564A (en) * 1996-07-31 1998-03-17 Visx, Incorporated Electrostatic precipitator for a gas discharge laser
US5978405A (en) * 1998-03-06 1999-11-02 Cymer, Inc. Laser chamber with minimized acoustic and shock wave disturbances
WO2000059402A2 (en) * 1999-04-07 2000-10-12 Visx, Inc. Improved interface for laser eye surgery
CA2381130C (en) * 1999-08-23 2006-01-03 Gore Enterprise Holdings, Inc. Filter for removing contaminants from an enclosure
US7203217B2 (en) * 2000-01-25 2007-04-10 Cymer, Inc. Narrow band electric discharge gas laser having improved beam direction stability

Also Published As

Publication number Publication date
JP4443566B2 (ja) 2010-03-31
WO2005018059A3 (en) 2005-05-19
EP1649567A4 (de) 2007-10-10
US6973112B2 (en) 2005-12-06
WO2005018059A2 (en) 2005-02-24
US20050025208A1 (en) 2005-02-03
CA2532810C (en) 2012-05-08
CA2532810A1 (en) 2005-02-24
EP1649567B1 (de) 2009-06-03
EP1649567A2 (de) 2006-04-26
JP2007507858A (ja) 2007-03-29
DE602004021389D1 (de) 2009-07-16

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