ATE510332T1 - Verfahren und vorrichtung für den effizienten betrieb eines gasentladungsexcimerlasers - Google Patents

Verfahren und vorrichtung für den effizienten betrieb eines gasentladungsexcimerlasers

Info

Publication number
ATE510332T1
ATE510332T1 AT08744395T AT08744395T ATE510332T1 AT E510332 T1 ATE510332 T1 AT E510332T1 AT 08744395 T AT08744395 T AT 08744395T AT 08744395 T AT08744395 T AT 08744395T AT E510332 T1 ATE510332 T1 AT E510332T1
Authority
AT
Austria
Prior art keywords
laser
pressure
gases
excimer laser
gas discharge
Prior art date
Application number
AT08744395T
Other languages
English (en)
Inventor
Jeffrey I Levatter
James Morris
David Brooks
Original Assignee
Photomedex Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Photomedex Inc filed Critical Photomedex Inc
Application granted granted Critical
Publication of ATE510332T1 publication Critical patent/ATE510332T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
    • H01S3/131—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
    • H01S3/134—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation in gas lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex
    • H01S3/2253—XeCl, i.e. xenon chloride is comprised for lasing around 308 nm

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
AT08744395T 2007-03-27 2008-03-26 Verfahren und vorrichtung für den effizienten betrieb eines gasentladungsexcimerlasers ATE510332T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US92027207P 2007-03-27 2007-03-27
PCT/US2008/058293 WO2008118975A2 (en) 2007-03-27 2008-03-26 Method and apparatus for efficiently operating a gas discharge excimer laser

Publications (1)

Publication Number Publication Date
ATE510332T1 true ATE510332T1 (de) 2011-06-15

Family

ID=39789265

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08744395T ATE510332T1 (de) 2007-03-27 2008-03-26 Verfahren und vorrichtung für den effizienten betrieb eines gasentladungsexcimerlasers

Country Status (6)

Country Link
US (2) US20080240197A1 (de)
EP (1) EP2140529B1 (de)
KR (1) KR20100015929A (de)
AT (1) ATE510332T1 (de)
TW (1) TW200903935A (de)
WO (1) WO2008118975A2 (de)

Families Citing this family (11)

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AU2002245163A1 (en) * 2000-10-20 2002-07-24 Photomedex Controlled dose delivery of ultraviolet light for treating skin disorders
US7144248B2 (en) * 2001-10-18 2006-12-05 Irwin Dean S Device for oral UV photo-therapy
US20070032844A1 (en) * 2005-08-05 2007-02-08 Levatter Jeffrey I Targeted UV phototherapy light block
US20070030876A1 (en) * 2005-08-05 2007-02-08 Levatter Jeffrey I Apparatus and method for purging and recharging excimer laser gases
ATE510332T1 (de) * 2007-03-27 2011-06-15 Photomedex Inc Verfahren und vorrichtung für den effizienten betrieb eines gasentladungsexcimerlasers
JP6310390B2 (ja) * 2012-06-26 2018-04-11 ギガフォトン株式会社 レーザ装置の制御方法及びレーザ装置
US9116445B2 (en) 2012-11-29 2015-08-25 Kla-Tencor Corporation Resonant cavity conditioning for improved nonlinear crystal performance
CN105556641A (zh) * 2013-07-23 2016-05-04 恩特格里斯公司 化学试剂的远程传送
US8929419B1 (en) * 2013-08-13 2015-01-06 Lightmachinery Inc. Excimer laser with gas purification
US9634455B1 (en) * 2016-02-16 2017-04-25 Cymer, Llc Gas optimization in a gas discharge light source
US11581692B2 (en) * 2019-06-18 2023-02-14 KLA Corp. Controlling pressure in a cavity of a light source

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Also Published As

Publication number Publication date
EP2140529B1 (de) 2011-05-18
WO2008118975A2 (en) 2008-10-02
EP2140529A2 (de) 2010-01-06
TW200903935A (en) 2009-01-16
KR20100015929A (ko) 2010-02-12
WO2008118975A3 (en) 2009-04-16
US20080240197A1 (en) 2008-10-02
US20100232469A1 (en) 2010-09-16

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