ATE434201T1 - Bimorpher spiegel mit zwei durch einen zentralkern aus halb-flexiblem material getrennten piezoelektrischen schichten - Google Patents

Bimorpher spiegel mit zwei durch einen zentralkern aus halb-flexiblem material getrennten piezoelektrischen schichten

Info

Publication number
ATE434201T1
ATE434201T1 AT05717410T AT05717410T ATE434201T1 AT E434201 T1 ATE434201 T1 AT E434201T1 AT 05717410 T AT05717410 T AT 05717410T AT 05717410 T AT05717410 T AT 05717410T AT E434201 T1 ATE434201 T1 AT E434201T1
Authority
AT
Austria
Prior art keywords
central core
mirror
semi
flexible material
core made
Prior art date
Application number
AT05717410T
Other languages
English (en)
Inventor
Jean-Francois Carre
Jean-Jacques Ferme
Original Assignee
Seso
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seso filed Critical Seso
Application granted granted Critical
Publication of ATE434201T1 publication Critical patent/ATE434201T1/de

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/08Mirrors
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
AT05717410T 2004-02-06 2005-01-13 Bimorpher spiegel mit zwei durch einen zentralkern aus halb-flexiblem material getrennten piezoelektrischen schichten ATE434201T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0401194A FR2866122B1 (fr) 2004-02-06 2004-02-06 Miroir bimorphe.
PCT/FR2005/000075 WO2005085931A1 (fr) 2004-02-06 2005-01-13 Miroir bimorphe avec deux couches piezo-electriques separees par une ame centrale en materiau semi-rigide

Publications (1)

Publication Number Publication Date
ATE434201T1 true ATE434201T1 (de) 2009-07-15

Family

ID=34778585

Family Applications (2)

Application Number Title Priority Date Filing Date
AT07009490T ATE429660T1 (de) 2004-02-06 2005-01-13 Bimorpher spiegel mit zwei piezoelektrischen schichten
AT05717410T ATE434201T1 (de) 2004-02-06 2005-01-13 Bimorpher spiegel mit zwei durch einen zentralkern aus halb-flexiblem material getrennten piezoelektrischen schichten

Family Applications Before (1)

Application Number Title Priority Date Filing Date
AT07009490T ATE429660T1 (de) 2004-02-06 2005-01-13 Bimorpher spiegel mit zwei piezoelektrischen schichten

Country Status (14)

Country Link
US (1) US7618149B2 (de)
EP (2) EP1723461B1 (de)
JP (1) JP4739237B2 (de)
KR (1) KR101109526B1 (de)
CN (1) CN1918502B (de)
AT (2) ATE429660T1 (de)
AU (1) AU2005218206B2 (de)
BR (1) BRPI0507502B1 (de)
CA (1) CA2555806C (de)
DE (2) DE602005014136D1 (de)
DK (2) DK1723461T3 (de)
ES (2) ES2328831T3 (de)
FR (1) FR2866122B1 (de)
WO (1) WO2005085931A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5756982B2 (ja) 2009-12-28 2015-07-29 株式会社ジェイテック X線集光方法、反射面形状制御ミラー装置及び反射面形状制御ミラーの製造方法
FR2956220B1 (fr) * 2010-02-05 2012-03-23 Europ De Systemes Optiques Soc Element optique bimorphe
US8593036B2 (en) 2010-02-26 2013-11-26 Mcb Clean Room Solutions, Llc High-efficiency MEMS micro-vibrational energy harvester and process for manufacturing same
DE102010021867A1 (de) * 2010-05-28 2011-12-01 Eurocopter Deutschland Gmbh Kraftgenerator zur Anbringung an einer Struktur
US8469527B2 (en) 2011-07-01 2013-06-25 Societe Europeenne De Systemes Optiques Bimorph optical element
JP7324989B2 (ja) * 2019-07-30 2023-08-14 株式会社ジェイテックコーポレーション 形状可変ミラー
WO2023054157A1 (ja) * 2021-10-01 2023-04-06 国立大学法人東海国立大学機構 形状可変ミラーおよびx線装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4257686A (en) * 1978-12-14 1981-03-24 Itek Corporation Multiple layer piezoelectric wavefront modulator
FR2453423A1 (fr) * 1979-04-04 1980-10-31 Quantel Sa Element optique epais a courbure variable
GB2238880A (en) * 1989-12-06 1991-06-12 Marconi Gec Ltd Optical correction apparatus
RU1808159C (ru) * 1989-12-19 1993-04-07 А. В. Икрамов, А. В. Кудр шов, А. Г. Сафронов. С. В. Романов, И. М. Рощупкин и А. О. Сулимов Адаптивное биморфное зеркало
US6098460A (en) * 1995-10-09 2000-08-08 Matsushita Electric Industrial Co., Ltd. Acceleration sensor and shock detecting device using the same
RU2068191C1 (ru) * 1996-02-12 1996-10-20 Йелстаун Корпорейшн Н.В. Многослойное пьезоэлектрическое деформируемое биморфное зеркало
US6874897B2 (en) * 2000-01-27 2005-04-05 Aoptix Technologies, Inc. Deformable curvature mirror with unipolar-wiring

Also Published As

Publication number Publication date
CN1918502B (zh) 2010-10-06
US20070279775A1 (en) 2007-12-06
KR101109526B1 (ko) 2012-01-31
EP1818711A1 (de) 2007-08-15
KR20070020213A (ko) 2007-02-20
DK1723461T3 (da) 2009-10-26
WO2005085931B1 (fr) 2005-11-03
AU2005218206B2 (en) 2010-06-24
CA2555806C (fr) 2013-04-02
WO2005085931A1 (fr) 2005-09-15
DE602005014136D1 (de) 2009-06-04
ES2325040T3 (es) 2009-08-24
FR2866122A1 (fr) 2005-08-12
CN1918502A (zh) 2007-02-21
EP1723461A1 (de) 2006-11-22
JP4739237B2 (ja) 2011-08-03
FR2866122B1 (fr) 2006-05-19
BRPI0507502B1 (pt) 2017-04-11
DK1818711T3 (da) 2009-07-27
CA2555806A1 (fr) 2005-09-15
EP1818711B1 (de) 2009-04-22
JP2007527030A (ja) 2007-09-20
US7618149B2 (en) 2009-11-17
EP1723461B1 (de) 2009-06-17
DE602005014945D1 (de) 2009-07-30
ATE429660T1 (de) 2009-05-15
BRPI0507502A (pt) 2007-06-26
AU2005218206A1 (en) 2005-09-15
ES2328831T3 (es) 2009-11-18

Similar Documents

Publication Publication Date Title
WO2008081935A1 (ja) 弾性表面波装置およびその製造方法
DE602004002363D1 (de) Akustisch gekoppelter Dünnschicht-Transformator mit piezoelektrischem Material, welches entgegengesetzte C-Axen Orientierung besitzt
WO2008114653A1 (ja) 熱電変換モジュールの製造方法及び熱電変換モジュール
TW200717889A (en) Piezo actuator for cooling
ATE434201T1 (de) Bimorpher spiegel mit zwei durch einen zentralkern aus halb-flexiblem material getrennten piezoelektrischen schichten
ATE430987T1 (de) Leistungshalbleitermodul mit kontaktfedern
TW200619677A (en) Micro oscillating element
ATE476755T1 (de) Piezoelektrischer aktuator
WO2008021508A3 (en) Injection molding of ceramic elements
DE602006014043D1 (de) Piezoelektrisches Vielschichtelement, Einspritzventil mit diesem piezoelektrischen Element
ATE441216T1 (de) Elektromechanisches stellglied mit grossem frequenzbereich
ATE376180T1 (de) Element, umfassend zwei elektroden aus nanoskaligen porösen metallen, anordnung, die mehrere elemente umfasst, und deren verwendung
GB2392550B (en) Laminated piezoelectric element, actuator and printing head
EP1840105A4 (de) Piezoelektrische porzellanzusammensetzung und piezoelektrisches stellglied
SG128539A1 (en) Tunable magnetic recording medium and its fabricating method
JP2006265841A5 (de)
DE60335998D1 (de) Piezoelektrische porzellanzusammensetzung, piezoelektrisches element und herstellungsverfahren dafür
DE50307734D1 (de) Piezoaktor
WO2007124842A3 (de) Piezoelektrischer aktor mit einer ummantelung aus einem verbundwerkstoff
ITBO20010280A0 (it) Iniettore di carburante con attuatore piezoelettrico
WO2009069590A1 (ja) 圧電トランス
TW200629307A (en) Magnetic element and method of manufacturing magnetic element
WO2008082652A3 (en) Tuned laminated piezoelectric elements and methods of tuning same
DE602006004627D1 (de) Magnetkern aus Verbundmaterial und zugehöriges Herstellungsverfahren
WO2006050201A3 (en) Ceramic igniters

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties