ATE441216T1 - Elektromechanisches stellglied mit grossem frequenzbereich - Google Patents

Elektromechanisches stellglied mit grossem frequenzbereich

Info

Publication number
ATE441216T1
ATE441216T1 AT05711065T AT05711065T ATE441216T1 AT E441216 T1 ATE441216 T1 AT E441216T1 AT 05711065 T AT05711065 T AT 05711065T AT 05711065 T AT05711065 T AT 05711065T AT E441216 T1 ATE441216 T1 AT E441216T1
Authority
AT
Austria
Prior art keywords
actuator
backing
actuator backing
electromechanical actuator
frequency range
Prior art date
Application number
AT05711065T
Other languages
English (en)
Inventor
Stefan Johansson
Mats Bexell
Anders Jansson
Original Assignee
Piezomotor Uppsala Aktiebolag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Piezomotor Uppsala Aktiebolag filed Critical Piezomotor Uppsala Aktiebolag
Application granted granted Critical
Publication of ATE441216T1 publication Critical patent/ATE441216T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/009—Thermal details, e.g. cooling means
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04—Constructional details
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/08—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using travelling waves, i.e. Rayleigh surface waves
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H10N30/2023—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having polygonal or rectangular shape

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Micromachines (AREA)
AT05711065T 2004-02-17 2005-02-16 Elektromechanisches stellglied mit grossem frequenzbereich ATE441216T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/778,348 US7067958B2 (en) 2004-02-17 2004-02-17 Wide frequency range electromechanical actuator
PCT/SE2005/000205 WO2005078815A1 (en) 2004-02-17 2005-02-16 Wide frequency range electromechanical actuator

Publications (1)

Publication Number Publication Date
ATE441216T1 true ATE441216T1 (de) 2009-09-15

Family

ID=34838158

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05711065T ATE441216T1 (de) 2004-02-17 2005-02-16 Elektromechanisches stellglied mit grossem frequenzbereich

Country Status (7)

Country Link
US (1) US7067958B2 (de)
EP (1) EP1726049B1 (de)
JP (1) JP4955406B2 (de)
KR (1) KR20070004629A (de)
AT (1) ATE441216T1 (de)
DE (1) DE602005016225D1 (de)
WO (1) WO2005078815A1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4697929B2 (ja) * 2003-11-13 2011-06-08 キヤノン株式会社 積層圧電素子及び振動波駆動装置
US20070055182A1 (en) * 2005-07-20 2007-03-08 Ust, Inc. Thermally enhanced ultrasound transducer method
US8237335B2 (en) * 2005-07-20 2012-08-07 Ust, Inc. Thermally enhanced ultrasound transducer means
US8446071B2 (en) * 2005-07-20 2013-05-21 Ust, Inc. Thermally enhanced ultrasound transducer system
US7405510B2 (en) * 2005-07-20 2008-07-29 Ust, Inc. Thermally enhanced piezoelectric element
US7378779B2 (en) * 2005-07-20 2008-05-27 Ust, Inc. Thermally enhanced piezoelectric composite system and method
US7420321B2 (en) * 2006-03-03 2008-09-02 Piezomotor Uppsala Ab Heat efficient micromotor
US7355325B2 (en) * 2006-06-15 2008-04-08 Piezomotor Uppsala Ab Wide frequency range electromechanical actuator
KR100857095B1 (ko) 2006-10-18 2008-09-05 현대자동차주식회사 압전소자를 이용한 리니어 액츄에이터
US8022596B2 (en) 2008-12-12 2011-09-20 Piezomotor Uppsala Ab Guided electromechanical motor
US8228602B2 (en) * 2009-03-25 2012-07-24 Dublin City University Of Collins Avenue Super critical angle fluorescence scanning system
KR20120103613A (ko) 2009-11-11 2012-09-19 피에조모터 웁살라 에이비 전자기계적 모터에 수직력의 제공
WO2011147467A1 (en) 2010-05-28 2011-12-01 Piezomotor Uppsala Ab Rotating load bearer
DE112010005916B4 (de) 2010-09-29 2023-02-09 Piezomotor Uppsala Aktiebolag Elektromechanischer Aktuator
WO2012097868A1 (en) 2011-01-18 2012-07-26 Piezomotor Uppsala Ab Operation of electromechanical actuator devices
EP2937913A1 (de) 2014-04-25 2015-10-28 Physik Instrumente (PI) GmbH & Co. Kg Piezoelektrischer Aktor für einen Ultraschallmotor
DE102014221001A1 (de) * 2014-10-16 2016-04-21 Picofine GmbH Antriebsvorrichtung und -verfahren zur linearen und/oder rotatorischen Positionierung

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02197272A (ja) * 1989-01-25 1990-08-03 Canon Inc 大出力型振動波モータ
GB2183929B (en) * 1985-08-05 1989-11-15 Canon Kk Vibration wave motor
US5345137A (en) * 1991-04-08 1994-09-06 Olympus Optical Co., Ltd. Two-dimensionally driving ultrasonic motor
JPH052594U (ja) * 1991-06-21 1993-01-14 オムロン株式会社 超音波モータ
JPH05168253A (ja) * 1991-12-16 1993-07-02 Nec Corp 移動機構
JP2905643B2 (ja) * 1992-05-29 1999-06-14 住友重機械工業株式会社 圧電リニアアクチュエータ
DE4408618B4 (de) 1994-03-15 2004-04-22 Physik Instrumente (Pi) Gmbh & Co Verstellantrieb aus Bimorphelementen
DE19605214A1 (de) * 1995-02-23 1996-08-29 Bosch Gmbh Robert Ultraschallantriebselement
AU5707796A (en) * 1996-03-26 1997-10-17 Mats Bexell An actuator motor and a method for fabrication of such an actuator
JP3792790B2 (ja) * 1996-07-23 2006-07-05 キヤノン株式会社 振動波モータ
US6313566B1 (en) 1997-07-08 2001-11-06 John Cunningham Piezoelectric motor
JPH1189257A (ja) * 1997-09-08 1999-03-30 Alps Electric Co Ltd 振動型アクチュエータ
JPH11206156A (ja) * 1997-11-14 1999-07-30 Canon Inc 振動型モータのための制御装置
JP3133302B2 (ja) * 1999-06-29 2001-02-05 新日本製鐵株式会社 黒色低熱膨張セラミックス焼結体及びその製造方法
JP2001355574A (ja) * 2000-06-13 2001-12-26 Matsushita Electric Ind Co Ltd 圧電ポンプ及び該圧電ポンプを用いた冷却装置
US6337532B1 (en) * 2000-08-11 2002-01-08 Piezomotor Uppsala Ab Fine walking actuator
JP3964193B2 (ja) * 2000-12-22 2007-08-22 日本碍子株式会社 マトリクス型アクチュエータ
US6864620B2 (en) * 2000-12-22 2005-03-08 Ngk Insulators, Ltd. Matrix type actuator
DE10148267B4 (de) 2001-06-08 2005-11-24 Physik Instrumente (Pi) Gmbh & Co. Kg Piezolinearantrieb mit einer Gruppe von Piezostapelaktoren sowie Verfahren zum Betreiben eines solchen Antriebes
JP2003243282A (ja) * 2002-02-14 2003-08-29 Nikon Corp ステージ装置及び露光装置
EP1502310B1 (de) 2002-05-06 2008-11-12 Epcos Ag Piezoaktor und verfahren zu dessen herstellung

Also Published As

Publication number Publication date
KR20070004629A (ko) 2007-01-09
EP1726049A1 (de) 2006-11-29
US20050179343A1 (en) 2005-08-18
EP1726049B1 (de) 2009-08-26
DE602005016225D1 (de) 2009-10-08
WO2005078815A1 (en) 2005-08-25
JP2007527689A (ja) 2007-09-27
JP4955406B2 (ja) 2012-06-20
US7067958B2 (en) 2006-06-27

Similar Documents

Publication Publication Date Title
ATE441216T1 (de) Elektromechanisches stellglied mit grossem frequenzbereich
WO2005123825A3 (en) High thermal conductivity materials with grafted surface functional groups
WO2006102273A3 (en) High-performance electroactive polymer transducers
ATE548415T1 (de) Wärmeleitungszusammensetzung
DE602006002899D1 (de) Fühlbare Rückführung
EP2306512A3 (de) Kühlkörper und Leitungsmodul
DE60331164D1 (de) Modifizierte polymere flockungsmittel mit verbesserter leistungscharakteristik
JP2011500359A5 (de)
WO2008130012A1 (ja) パワー半導体モジュール
ATE555012T1 (de) Strukturbondungsanordnung
JP2006066813A5 (de)
TW200623929A (en) Transducer
SE0502791L (sv) Metod för att uppta hål i värmesmältbara material
TW200508288A (en) Plastic bonding method
DE50102300D1 (de) Hochgefülltes Kunststoffteil
TW200602699A (en) Antistatic laminated body and polarizing plate using the same
DE60320198D1 (de) Piezoelektrischer Aktuator und Plattenlaufwerk mit diesem
ATE506700T1 (de) Solarzellenverbund und solareinheit mit diesem solarzellenverbund
TW200742486A (en) Electroluminescent device and electroluminescent device unit
WO2004066669A3 (en) Anisotropic acoustic impedance matching material
DE502005006970D1 (de) Ski oder dergleichen schneegleitgerät mit bindungs-montagehilfe
EP1863046A4 (de) Schaltarray
ATE455353T1 (de) Magnetisches element
TW200731490A (en) Chip assembly and method of manufacturing thereof
TW200637469A (en) Thermal interface material and method of making the same

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties