ATE439579T1 - Verfahren zum befestigen einer probe an einem manipulator - Google Patents

Verfahren zum befestigen einer probe an einem manipulator

Info

Publication number
ATE439579T1
ATE439579T1 AT08159145T AT08159145T ATE439579T1 AT E439579 T1 ATE439579 T1 AT E439579T1 AT 08159145 T AT08159145 T AT 08159145T AT 08159145 T AT08159145 T AT 08159145T AT E439579 T1 ATE439579 T1 AT E439579T1
Authority
AT
Austria
Prior art keywords
sample
manipulator
tip
tem
cryogenic temperature
Prior art date
Application number
AT08159145T
Other languages
English (en)
Inventor
Uwe Luecken
Michael Hayles
Original Assignee
Fei Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from EP07111419A external-priority patent/EP2009420A1/de
Priority claimed from EP07111430A external-priority patent/EP2009421A1/de
Application filed by Fei Co filed Critical Fei Co
Application granted granted Critical
Publication of ATE439579T1 publication Critical patent/ATE439579T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/04—Devices for withdrawing samples in the solid state, e.g. by cutting
    • G01N1/06—Devices for withdrawing samples in the solid state, e.g. by cutting providing a thin slice, e.g. microtome
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/286—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q involving mechanical work, e.g. chopping, disintegrating, compacting, homogenising
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/32—Micromanipulators structurally combined with microscopes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2001—Maintaining constant desired temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/208—Elements or methods for movement independent of sample stage for influencing or moving or contacting or transferring the sample or parts thereof, e.g. prober needles or transfer needles in FIB/SEM systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3174—Etching microareas
    • H01J2237/31745—Etching microareas for preparing specimen to be viewed in microscopes or analyzed in microanalysers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Die Bonding (AREA)
AT08159145T 2007-06-29 2008-06-27 Verfahren zum befestigen einer probe an einem manipulator ATE439579T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP07111419A EP2009420A1 (de) 2007-06-29 2007-06-29 Verfahren zum Befestigen einer Probe an einem Manipulator
EP07111430A EP2009421A1 (de) 2007-06-29 2007-06-29 Verfahren zum Abtrennen einer Lamelle aus einer Bohrprobe zur TEM-Prüfung

Publications (1)

Publication Number Publication Date
ATE439579T1 true ATE439579T1 (de) 2009-08-15

Family

ID=39863660

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08159145T ATE439579T1 (de) 2007-06-29 2008-06-27 Verfahren zum befestigen einer probe an einem manipulator

Country Status (5)

Country Link
US (1) US7845245B2 (de)
EP (1) EP2009422B1 (de)
JP (1) JP4722969B2 (de)
AT (1) ATE439579T1 (de)
DE (1) DE602008000086D1 (de)

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EP2402475A1 (de) 2010-06-30 2012-01-04 Fei Company Strahleninduzierte Ablagerung bei kryogenischen Temperaturen
JP5065516B2 (ja) 2010-08-04 2012-11-07 エフ イー アイ カンパニ 薄い電子検出器における後方散乱の減少
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EP2509097A1 (de) 2011-04-07 2012-10-10 FEI Company Verfahren zum Schutz eines Strahlungsdetektors in einem Ladungsteilcheninstrument
US20120286175A1 (en) * 2011-05-12 2012-11-15 Gatan, Inc. Cooled manipulator tip for removal of frozen material
US8604446B2 (en) * 2011-08-08 2013-12-10 The State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of The University Of Oregon Devices and methods for cryo lift-out with in situ probe
US20130050431A1 (en) * 2011-08-29 2013-02-28 Shiseido Company, Ltd. Method of observing cross-section of cosmetic material
WO2013033325A1 (en) * 2011-08-31 2013-03-07 The Trustees Of Columbia University In The City Of New York Systems and methods for a sample exchange refrigerator
EP2579575A1 (de) 2011-10-06 2013-04-10 FEI Company Verfahren zum Erfassen von Daten mit einem Bildsensor
DE102011122607B4 (de) 2011-12-30 2013-08-29 Stiftung Caesar Center Of Advanced European Studies And Research Verfahren zum Extrahieren einer Probe aus einem tiefgeforenen Substrat und Befestigen der Probe an einem Probenhalter in einem Elektronenmikroskop
US8884248B2 (en) * 2012-02-13 2014-11-11 Fei Company Forming a vitrified sample for electron microscopy
EP2626885A1 (de) * 2012-02-13 2013-08-14 FEI Company Formen einer Probe aus glasartigem Eis für ein Elektronenmikroskop
EP2685233A1 (de) * 2012-07-13 2014-01-15 Fei Company Bilden einer Elektronenmikroskopprobe aus hochdruckgefrorenem Material
EP2706342B1 (de) * 2012-09-11 2015-07-08 Fei Company Zusammenwirkendes Kapillarröhrchen und Verschluss zur Verwendung in einem Hochdrucktiefkühlgerät
DE102012217761B4 (de) * 2012-09-28 2020-02-06 Carl Zeiss Microscopy Gmbh Verfahren zur Vermeidung von Artefakten beim Serial Block Face Imaging
EP2765591B1 (de) * 2013-02-08 2016-07-13 FEI Company Probenvorbereitungshalter
US8872105B2 (en) * 2013-02-19 2014-10-28 Fei Company In situ reactivation of fluorescence marker
EP2813835B1 (de) 2013-06-14 2016-09-07 Fei Company Verfahren zum Schweißen einer gefrorenen wässrigen Probe an eine Mikrosonde
US9429560B2 (en) 2013-09-06 2016-08-30 IonOptix LLC Cell grabber with unitary construction
KR101480379B1 (ko) * 2013-11-20 2015-01-09 한국표준과학연구원 상변화 기반의 온습도계 점검장치 및 그 제어방법과 그 점검방법
CN103868769A (zh) * 2014-02-21 2014-06-18 上海华力微电子有限公司 一种平面透射电镜样品及其制备方法
WO2016084162A1 (ja) * 2014-11-26 2016-06-02 株式会社日立ハイテクノロジーズ イオンビーム装置
EP3386297B1 (de) 2015-12-07 2025-04-23 CooperSurgical, Inc. Niedrigtemperaturprobenträger
FR3075983B1 (fr) * 2017-12-22 2021-07-23 Univ Des Antilles Dispositif de nano-manipulation et procede de caracterisation utilisant un tel dispositif
NL2024445B1 (en) 2019-12-12 2021-09-01 Delmic Ip B V Method and manipulation device for handling samples
WO2021120167A1 (en) * 2019-12-20 2021-06-24 Jiangsu Jitri Micro-Nano Automation Institute Co., Ltd. Method and apparatus for manipulating micro-nanometer sized samples and uses thereof
WO2022239830A1 (ja) * 2021-05-12 2022-11-17 国立大学法人大阪大学 顕微鏡、及び観察方法
US11808679B2 (en) 2022-01-27 2023-11-07 Expresslo Llc Method and apparatus for cryogenic and environmental controlled specimen handling
CN118130209B (zh) * 2024-03-08 2024-10-11 中国地质调查局油气资源调查中心 一种基于双束聚焦离子显微镜制备页岩有机质超薄样品的方法

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EP1515360B1 (de) 2003-06-13 2011-01-19 Fei Company Verfahren und Vorrichtung zum Manipulieren von mikroskopischen Proben
JP3887356B2 (ja) 2003-07-08 2007-02-28 エスアイアイ・ナノテクノロジー株式会社 薄片試料作製方法
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ATE459091T1 (de) * 2004-07-01 2010-03-15 Fei Co Methode zum entfernen einer mikroskopischen probe von einem substrat
EP1612836B1 (de) 2004-07-01 2010-02-24 FEI Company Methode zum Entfernen einer mikroskopischen Probe von einem Substrat
US7381971B2 (en) 2004-07-28 2008-06-03 Omniprobe, Inc. Method and apparatus for in-situ probe tip replacement inside a charged particle beam microscope
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EP2009421A1 (de) 2007-06-29 2008-12-31 FEI Company Verfahren zum Abtrennen einer Lamelle aus einer Bohrprobe zur TEM-Prüfung

Also Published As

Publication number Publication date
US20090000400A1 (en) 2009-01-01
JP4722969B2 (ja) 2011-07-13
DE602008000086D1 (de) 2009-09-24
JP2009014719A (ja) 2009-01-22
US7845245B2 (en) 2010-12-07
EP2009422B1 (de) 2009-08-12
EP2009422A1 (de) 2008-12-31

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