ATE441203T1 - System und verfahren zur analyse des stromflusses in halbleiter-plasmaerzeugungssystemen - Google Patents

System und verfahren zur analyse des stromflusses in halbleiter-plasmaerzeugungssystemen

Info

Publication number
ATE441203T1
ATE441203T1 AT06770175T AT06770175T ATE441203T1 AT E441203 T1 ATE441203 T1 AT E441203T1 AT 06770175 T AT06770175 T AT 06770175T AT 06770175 T AT06770175 T AT 06770175T AT E441203 T1 ATE441203 T1 AT E441203T1
Authority
AT
Austria
Prior art keywords
measuring
signals
current flow
plasma generation
transmission line
Prior art date
Application number
AT06770175T
Other languages
English (en)
Inventor
John Swank
Original Assignee
Bird Technologies Group Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bird Technologies Group Inc filed Critical Bird Technologies Group Inc
Application granted granted Critical
Publication of ATE441203T1 publication Critical patent/ATE441203T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R21/00—Arrangements for measuring electric power or power factor
    • G01R21/133—Arrangements for measuring electric power or power factor by using digital technique
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R23/00—Arrangements for measuring frequencies; Arrangements for analysing frequency spectra

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Drying Of Semiconductors (AREA)
  • Electron Tubes For Measurement (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
AT06770175T 2005-06-10 2006-05-10 System und verfahren zur analyse des stromflusses in halbleiter-plasmaerzeugungssystemen ATE441203T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US68976905P 2005-06-10 2005-06-10
PCT/US2006/018087 WO2006135515A1 (en) 2005-06-10 2006-05-10 System and method for analyzing power flow in semiconductor plasma generation systems

Publications (1)

Publication Number Publication Date
ATE441203T1 true ATE441203T1 (de) 2009-09-15

Family

ID=36729361

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06770175T ATE441203T1 (de) 2005-06-10 2006-05-10 System und verfahren zur analyse des stromflusses in halbleiter-plasmaerzeugungssystemen

Country Status (10)

Country Link
US (1) US7885774B2 (de)
EP (1) EP1889279B1 (de)
JP (1) JP5116667B2 (de)
KR (1) KR101306612B1 (de)
CN (1) CN100594577C (de)
AT (1) ATE441203T1 (de)
DE (1) DE602006008780D1 (de)
IL (1) IL187610A (de)
TW (1) TWI403726B (de)
WO (1) WO2006135515A1 (de)

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Also Published As

Publication number Publication date
TW200702666A (en) 2007-01-16
CN101203934A (zh) 2008-06-18
JP2008544443A (ja) 2008-12-04
TWI403726B (zh) 2013-08-01
IL187610A0 (en) 2008-03-20
JP5116667B2 (ja) 2013-01-09
US20090210181A1 (en) 2009-08-20
DE602006008780D1 (de) 2009-10-08
WO2006135515A1 (en) 2006-12-21
US7885774B2 (en) 2011-02-08
KR101306612B1 (ko) 2013-09-11
IL187610A (en) 2011-10-31
KR20080014997A (ko) 2008-02-15
EP1889279B1 (de) 2009-08-26
CN100594577C (zh) 2010-03-17
EP1889279A1 (de) 2008-02-20

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