ATE446667T1 - Verfahren zur herstellung eines substrats - Google Patents
Verfahren zur herstellung eines substratsInfo
- Publication number
- ATE446667T1 ATE446667T1 AT02768784T AT02768784T ATE446667T1 AT E446667 T1 ATE446667 T1 AT E446667T1 AT 02768784 T AT02768784 T AT 02768784T AT 02768784 T AT02768784 T AT 02768784T AT E446667 T1 ATE446667 T1 AT E446667T1
- Authority
- AT
- Austria
- Prior art keywords
- substrate
- another
- producing
- conductive material
- vias
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/4038—Through-connections; Vertical interconnect access [VIA] connections
- H05K3/4053—Through-connections; Vertical interconnect access [VIA] connections by thick-film techniques
- H05K3/4061—Through-connections; Vertical interconnect access [VIA] connections by thick-film techniques for via connections in inorganic insulating substrates
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/11—Treatments characterised by their effect, e.g. heating, cooling, roughening
- H05K2203/1147—Sealing or impregnating, e.g. of pores
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
- Switches That Are Operated By Magnetic Or Electric Fields (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US31805501P | 2001-09-07 | 2001-09-07 | |
| US3827601A | 2001-12-31 | 2001-12-31 | |
| PCT/US2002/028020 WO2003023388A1 (en) | 2001-09-07 | 2002-09-04 | Sensor substrate and method of fabricating same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE446667T1 true ATE446667T1 (de) | 2009-11-15 |
Family
ID=32473896
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT02768784T ATE446667T1 (de) | 2001-09-07 | 2002-09-04 | Verfahren zur herstellung eines substrats |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP1436605B1 (de) |
| JP (1) | JP2005502403A (de) |
| AT (1) | ATE446667T1 (de) |
| AU (1) | AU2002331796A1 (de) |
| CA (2) | CA2776343A1 (de) |
| DE (1) | DE60234113D1 (de) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10004433B2 (en) * | 2014-07-07 | 2018-06-26 | Verily Life Sciences Llc | Electrochemical sensor chip |
| JP7564251B2 (ja) * | 2020-06-10 | 2024-10-08 | アボット ダイアベティス ケア インコーポレイテッド | 一つ以上の検出促進強化を備える被検物質センサ |
| CN116314142B (zh) * | 2023-05-08 | 2023-07-21 | 粤芯半导体技术股份有限公司 | 薄膜器件性能测试结构、测试方法及测试结构的制备方法 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5821011A (en) * | 1989-10-11 | 1998-10-13 | Medtronic, Inc. | Body implanted device with electrical feedthrough |
| JP2501492B2 (ja) * | 1991-03-08 | 1996-05-29 | 日本碍子株式会社 | セラミックス基板およびその製造方法 |
| JP2559977B2 (ja) * | 1992-07-29 | 1996-12-04 | インターナショナル・ビジネス・マシーンズ・コーポレイション | バイアに係るクラックを除去する方法及び構造、並びに、半導体セラミックパッケージ基板。 |
| JP2756223B2 (ja) * | 1993-07-02 | 1998-05-25 | 株式会社三協精機製作所 | 基板の貫通電極 |
| US5569958A (en) * | 1994-05-26 | 1996-10-29 | Cts Corporation | Electrically conductive, hermetic vias and their use in high temperature chip packages |
| US5683758A (en) * | 1995-12-18 | 1997-11-04 | Lucent Technologies Inc. | Method of forming vias |
| JPH1140911A (ja) * | 1997-07-17 | 1999-02-12 | Alps Electric Co Ltd | プリント基板 |
| US6259937B1 (en) * | 1997-09-12 | 2001-07-10 | Alfred E. Mann Foundation | Implantable substrate sensor |
| DE19742072B4 (de) * | 1997-09-24 | 2005-11-24 | Robert Bosch Gmbh | Verfahren zur Herstellung druckdichter Durchkontaktierungen |
-
2002
- 2002-09-04 CA CA2776343A patent/CA2776343A1/en not_active Abandoned
- 2002-09-04 JP JP2003527410A patent/JP2005502403A/ja active Pending
- 2002-09-04 DE DE60234113T patent/DE60234113D1/de not_active Expired - Lifetime
- 2002-09-04 CA CA2459401A patent/CA2459401C/en not_active Expired - Fee Related
- 2002-09-04 AU AU2002331796A patent/AU2002331796A1/en not_active Abandoned
- 2002-09-04 AT AT02768784T patent/ATE446667T1/de not_active IP Right Cessation
- 2002-09-04 EP EP02768784A patent/EP1436605B1/de not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| CA2459401C (en) | 2013-11-26 |
| JP2005502403A (ja) | 2005-01-27 |
| AU2002331796A1 (en) | 2003-03-24 |
| EP1436605A4 (de) | 2006-10-04 |
| CA2776343A1 (en) | 2003-03-20 |
| EP1436605B1 (de) | 2009-10-21 |
| EP1436605A1 (de) | 2004-07-14 |
| DE60234113D1 (de) | 2009-12-03 |
| CA2459401A1 (en) | 2003-03-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |