ATE451712T1 - Mikrorelais mit neuem aufbau - Google Patents

Mikrorelais mit neuem aufbau

Info

Publication number
ATE451712T1
ATE451712T1 AT01810322T AT01810322T ATE451712T1 AT E451712 T1 ATE451712 T1 AT E451712T1 AT 01810322 T AT01810322 T AT 01810322T AT 01810322 T AT01810322 T AT 01810322T AT E451712 T1 ATE451712 T1 AT E451712T1
Authority
AT
Austria
Prior art keywords
mcp
new construction
contact piece
micro relay
drive capacitor
Prior art date
Application number
AT01810322T
Other languages
English (en)
Inventor
Ralf Struempler
Original Assignee
Abb Research Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Abb Research Ltd filed Critical Abb Research Ltd
Application granted granted Critical
Publication of ATE451712T1 publication Critical patent/ATE451712T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0078—Switches making use of microelectromechanical systems [MEMS] with parallel movement of the movable contact relative to the substrate

Landscapes

  • Micromachines (AREA)
  • Relay Circuits (AREA)
  • Investigation Of Foundation Soil And Reinforcement Of Foundation Soil By Compacting Or Drainage (AREA)
AT01810322T 2001-03-29 2001-03-29 Mikrorelais mit neuem aufbau ATE451712T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP01810322A EP1246215B1 (de) 2001-03-29 2001-03-29 Mikrorelais mit neuem Aufbau

Publications (1)

Publication Number Publication Date
ATE451712T1 true ATE451712T1 (de) 2009-12-15

Family

ID=8183834

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01810322T ATE451712T1 (de) 2001-03-29 2001-03-29 Mikrorelais mit neuem aufbau

Country Status (3)

Country Link
EP (1) EP1246215B1 (de)
AT (1) ATE451712T1 (de)
DE (1) DE50115251D1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6975193B2 (en) 2003-03-25 2005-12-13 Rockwell Automation Technologies, Inc. Microelectromechanical isolating circuit
JPWO2005015595A1 (ja) * 2003-08-07 2006-10-05 富士通株式会社 マイクロスイッチング素子およびその製造方法
DE602005027131D1 (de) * 2005-11-28 2011-05-05 Abb Research Ltd Elektrostatisches stellglied
US20250118501A1 (en) * 2023-10-10 2025-04-10 Raytheon Company Micro-electromechanical systems switch with beam movement orthogonal to force

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4126107C2 (de) * 1991-08-07 1993-12-16 Bosch Gmbh Robert Beschleunigungssensor und Verfahren zur Herstellung
US5179499A (en) * 1992-04-14 1993-01-12 Cornell Research Foundation, Inc. Multi-dimensional precision micro-actuator
KR100459887B1 (ko) * 1999-01-11 2004-12-03 삼성전자주식회사 삼차원 빗살 가진 구조물 및 이를 채용한 관성 감지 센서와 액츄

Also Published As

Publication number Publication date
EP1246215A1 (de) 2002-10-02
DE50115251D1 (de) 2010-01-21
EP1246215B1 (de) 2009-12-09

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Legal Events

Date Code Title Description
REN Ceased due to non-payment of the annual fee