ATE454484T1 - Verfahren zum herstellen von glatten barriereschichten und verbundmaterial mit glatter barriereschicht - Google Patents

Verfahren zum herstellen von glatten barriereschichten und verbundmaterial mit glatter barriereschicht

Info

Publication number
ATE454484T1
ATE454484T1 AT03017419T AT03017419T ATE454484T1 AT E454484 T1 ATE454484 T1 AT E454484T1 AT 03017419 T AT03017419 T AT 03017419T AT 03017419 T AT03017419 T AT 03017419T AT E454484 T1 ATE454484 T1 AT E454484T1
Authority
AT
Austria
Prior art keywords
smooth barrier
composite material
barrier layer
applying
producing
Prior art date
Application number
AT03017419T
Other languages
English (en)
Inventor
Matthias Bicker
Stephan Behle
Andreas Luettringhaus-Henkel
Gregor Arnold
Uwe Rothaar
Michaela Klause
Lutz Klippe
Marten Walther
Original Assignee
Schott Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/EP2002/008853 external-priority patent/WO2003014415A1/de
Application filed by Schott Ag filed Critical Schott Ag
Application granted granted Critical
Publication of ATE454484T1 publication Critical patent/ATE454484T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C23C16/029—Graded interfaces
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C23C16/402—Silicon dioxide
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0235—Containers
    • B65G2201/0244—Bottles

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Laminated Bodies (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Chemical Vapour Deposition (AREA)
AT03017419T 2002-08-07 2003-08-01 Verfahren zum herstellen von glatten barriereschichten und verbundmaterial mit glatter barriereschicht ATE454484T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/EP2002/008853 WO2003014415A1 (de) 2001-08-07 2002-08-07 Verbundmaterial aus einem substratmaterial und einem barriereschichtmaterial
DE10258681A DE10258681A1 (de) 2002-08-07 2002-12-13 Verfahren zum Herstellen von glatten Barriereschichten und Verbundmaterial mit glatter Barriereschicht

Publications (1)

Publication Number Publication Date
ATE454484T1 true ATE454484T1 (de) 2010-01-15

Family

ID=30775627

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03017419T ATE454484T1 (de) 2002-08-07 2003-08-01 Verfahren zum herstellen von glatten barriereschichten und verbundmaterial mit glatter barriereschicht

Country Status (2)

Country Link
AT (1) ATE454484T1 (de)
DE (2) DE10258681A1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10258678B4 (de) * 2002-12-13 2004-12-30 Schott Ag Schnelles Verfahren zur Herstellung von Multilayer-Barriereschichten
DE10342401B4 (de) * 2003-09-13 2014-10-30 Schott Ag Verbundmaterialien mit einer Morphologie-beeinflussenden Schicht, Verfahren zu deren Herstellung sowie Verwendung des Verbundmaterials
DE102004017241B4 (de) * 2004-04-05 2012-09-27 Schott Ag Verbundmaterial und Verfahren zu seiner Herstellung
DE102004017236B4 (de) * 2004-04-05 2012-10-25 Schott Ag Verbundmaterial mit verbesserter chemischer Beständigkeit und Verfahren zu dessen Herstellung
DE102004028369B4 (de) * 2004-06-11 2007-05-31 Schott Ag Verfahren und Vorrichtung zum Behandeln von Substraten in einer Rundläuferanlage
DE102004042431B4 (de) * 2004-08-31 2008-07-03 Schott Ag Verfahren und Vorrichtung zur Plasmabeschichtung von Werkstücken mit spektraler Auswertung der Prozessparameter und Verwendung der Vorrichtung
DE102004061464B4 (de) 2004-12-17 2008-12-11 Schott Ag Substrat mit feinlaminarer Barriereschutzschicht und Verfahren zu dessen Herstellung
DE102006058771B4 (de) 2006-12-12 2018-03-01 Schott Ag Behälter mit verbesserter Restentleerbarkeit und Verfahren zu dessen Herstellung
EP2279283A1 (de) * 2008-03-27 2011-02-02 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur herstellung eines mehrkomponentigen, polymer- und metallhaltigen schichtsystems, vorrichtung und beschichteter gegenstand
DE102010055155A1 (de) * 2010-12-15 2012-06-21 Khs Corpoplast Gmbh Verfahren zur Plasmabehandlung von Werkstücken sowie Werkstück mit Gasbarriereschicht
DE102011104730A1 (de) * 2011-06-16 2012-12-20 Khs Corpoplast Gmbh Verfahren zur Plasmabehandlung von Werkstücken sowie Werkstück mit Gasbarriereschicht
DE102014102543A1 (de) * 2014-02-26 2015-08-27 Krones Ag Vorrichtung und Verfahren zur Inspektion von Behältern
DE102020105000A1 (de) 2020-02-26 2021-08-26 Khs Corpoplast Gmbh Verfahren zur Beschichtung von Behältern sowie beschichteter Behälter
DE102023117131A1 (de) 2023-06-29 2025-01-02 Khs Gmbh Vorrichtung zur Versorgung einer Beschichtungsanlage mit benötigten Prozessgasen und Verfahren zum Betreiben einer solchen Gasversorgungsvorrichtung

Also Published As

Publication number Publication date
DE50312313D1 (de) 2010-02-25
DE10258681A1 (de) 2004-02-26

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Legal Events

Date Code Title Description
REN Ceased due to non-payment of the annual fee