ATE454555T1 - FRICTION VACUUM PUMP - Google Patents

FRICTION VACUUM PUMP

Info

Publication number
ATE454555T1
ATE454555T1 AT05791919T AT05791919T ATE454555T1 AT E454555 T1 ATE454555 T1 AT E454555T1 AT 05791919 T AT05791919 T AT 05791919T AT 05791919 T AT05791919 T AT 05791919T AT E454555 T1 ATE454555 T1 AT E454555T1
Authority
AT
Austria
Prior art keywords
housing
rotor
pump
seals
vacuum pump
Prior art date
Application number
AT05791919T
Other languages
German (de)
Inventor
Ralf Adamietz
Roland Blumenthal
Dirk Kalisch
Original Assignee
Oerlikon Leybold Vacuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum Gmbh filed Critical Oerlikon Leybold Vacuum Gmbh
Application granted granted Critical
Publication of ATE454555T1 publication Critical patent/ATE454555T1/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Rotary Pumps (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

A friction vacuum pump ( 10 ) comprises a housing ( 12 ) defining a vaneless pump stator ( 30 ), a rotor drive and a rotor support which rotatably supports a pump rotor ( 16 ) provided with a vane ( 18 ). The housing ( 12 ) surrounds the overall axial length of the pump rotor ( 16 ), the rotor drive and the rotor support. Prior art housings are of multipart configuration and thus comprise seals between the housing portions. The seals are difficult to coat and may be or become locations where leaks occur. In contrast, the housing ( 12 ) is of one-piece configuration such that, in any case, the region of the housing ( 12 ) which is in contact with the vacuum gas is free of seals.
AT05791919T 2004-10-01 2005-09-21 FRICTION VACUUM PUMP ATE454555T1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004047930A DE102004047930A1 (en) 2004-10-01 2004-10-01 Friction vacuum pump
PCT/EP2005/054735 WO2006037730A1 (en) 2004-10-01 2005-09-21 Drag vacuum pump

Publications (1)

Publication Number Publication Date
ATE454555T1 true ATE454555T1 (en) 2010-01-15

Family

ID=35427899

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05791919T ATE454555T1 (en) 2004-10-01 2005-09-21 FRICTION VACUUM PUMP

Country Status (7)

Country Link
US (1) US20080206041A1 (en)
EP (1) EP1797331B1 (en)
JP (1) JP2008514862A (en)
CN (1) CN100458171C (en)
AT (1) ATE454555T1 (en)
DE (2) DE102004047930A1 (en)
WO (1) WO2006037730A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1395718B1 (en) * 2009-09-30 2012-10-19 Nuovo Pignone Spa ASSRAL FLOW COMPRESSOR WITH WALL, REACTOR AND METHOD
US9279417B2 (en) 2013-04-26 2016-03-08 Sol-Electrica, Llc Solar power system
WO2015039443A1 (en) * 2013-09-18 2015-03-26 北京北仪创新真空技术有限责任公司 Atmospheric impact resistant molecular pump
CN103452872A (en) * 2013-09-18 2013-12-18 北京北仪创新真空技术有限责任公司 Atmosphere-impact-resisting molecular pump
CN104613008B (en) * 2015-02-28 2017-10-24 北京北仪创新真空技术有限责任公司 A kind of rotor of molecular pump
EP3670924B1 (en) * 2019-11-19 2021-11-17 Pfeiffer Vacuum Gmbh Vacuum pump and method for producing same

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE625444C (en) * 1934-02-24 1936-02-08 Leybold S Nachfolger A G E Molecular air pump
JPS60139098U (en) * 1984-02-24 1985-09-13 セイコ−精機株式会社 Combined axial flow molecular pump
DE3705912A1 (en) * 1987-02-24 1988-09-01 Alcatel Hochvakuumtechnik Gmbh HIGH VACUUM PUMP WITH A BELL-SHAPED ROTOR
FR2611818B1 (en) * 1987-02-26 1991-04-19 Cit Alcatel ROTARY MOLECULAR VACUUM PUMP OF THE GAEDE CHANNEL TYPE
FR2641582B1 (en) * 1989-01-09 1991-03-22 Cit Alcatel GAEDE CHANNEL TYPE VACUUM PUMP
JPH03222895A (en) * 1990-01-26 1991-10-01 Hitachi Koki Co Ltd Thread-grooved vacuum pump
JP3486000B2 (en) * 1995-03-31 2004-01-13 日本原子力研究所 Screw groove vacuum pump
DE19756837C2 (en) * 1997-12-19 1999-09-30 K Busch Gmbh Druck & Vakuum Dr Molecular and viscosity pump
FR2776029B1 (en) * 1998-03-16 2000-06-23 Alsthom Cge Alcatel TURBOMOLECULAR PUMP
DE19846188A1 (en) * 1998-10-07 2000-04-13 Leybold Vakuum Gmbh Friction vacuum pump with stator and rotor
US6302641B1 (en) * 2000-01-07 2001-10-16 Kashiyama Kougyou Industry Co., Ltd. Multiple type vacuum pump
US6514035B2 (en) * 2000-01-07 2003-02-04 Kashiyama Kougyou Industry Co., Ltd. Multiple-type pump
DE10224604B4 (en) * 2002-06-04 2014-01-30 Oerlikon Leybold Vacuum Gmbh evacuation device

Also Published As

Publication number Publication date
EP1797331A1 (en) 2007-06-20
JP2008514862A (en) 2008-05-08
CN101031724A (en) 2007-09-05
WO2006037730A1 (en) 2006-04-13
DE102004047930A1 (en) 2006-04-06
EP1797331B1 (en) 2010-01-06
US20080206041A1 (en) 2008-08-28
DE502005008839D1 (en) 2010-02-25
CN100458171C (en) 2009-02-04

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Legal Events

Date Code Title Description
REN Ceased due to non-payment of the annual fee