ATE454555T1 - Reibungsvakuumpumpe - Google Patents

Reibungsvakuumpumpe

Info

Publication number
ATE454555T1
ATE454555T1 AT05791919T AT05791919T ATE454555T1 AT E454555 T1 ATE454555 T1 AT E454555T1 AT 05791919 T AT05791919 T AT 05791919T AT 05791919 T AT05791919 T AT 05791919T AT E454555 T1 ATE454555 T1 AT E454555T1
Authority
AT
Austria
Prior art keywords
housing
rotor
pump
seals
vacuum pump
Prior art date
Application number
AT05791919T
Other languages
English (en)
Inventor
Ralf Adamietz
Roland Blumenthal
Dirk Kalisch
Original Assignee
Oerlikon Leybold Vacuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum Gmbh filed Critical Oerlikon Leybold Vacuum Gmbh
Application granted granted Critical
Publication of ATE454555T1 publication Critical patent/ATE454555T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Rotary Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
AT05791919T 2004-10-01 2005-09-21 Reibungsvakuumpumpe ATE454555T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004047930A DE102004047930A1 (de) 2004-10-01 2004-10-01 Reibungsvakuumpumpe
PCT/EP2005/054735 WO2006037730A1 (de) 2004-10-01 2005-09-21 Reibungsvakuumpumpe

Publications (1)

Publication Number Publication Date
ATE454555T1 true ATE454555T1 (de) 2010-01-15

Family

ID=35427899

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05791919T ATE454555T1 (de) 2004-10-01 2005-09-21 Reibungsvakuumpumpe

Country Status (7)

Country Link
US (1) US20080206041A1 (de)
EP (1) EP1797331B1 (de)
JP (1) JP2008514862A (de)
CN (1) CN100458171C (de)
AT (1) ATE454555T1 (de)
DE (2) DE102004047930A1 (de)
WO (1) WO2006037730A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1395718B1 (it) 2009-09-30 2012-10-19 Nuovo Pignone Spa Compressore a flusso assiale a sbalzo, reattore e metodo
US9279417B2 (en) 2013-04-26 2016-03-08 Sol-Electrica, Llc Solar power system
CN103452872A (zh) * 2013-09-18 2013-12-18 北京北仪创新真空技术有限责任公司 一种抗大气冲击的分子泵
WO2015039443A1 (zh) * 2013-09-18 2015-03-26 北京北仪创新真空技术有限责任公司 一种抗大气冲击的分子泵
CN104613008B (zh) * 2015-02-28 2017-10-24 北京北仪创新真空技术有限责任公司 一种分子泵的转子
EP3670924B1 (de) * 2019-11-19 2021-11-17 Pfeiffer Vacuum Gmbh Vakuumpumpe und verfahren zur herstellung einer solchen

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE625444C (de) * 1934-02-24 1936-02-08 Leybold S Nachfolger A G E Molekularluftpumpe
JPS60139098U (ja) * 1984-02-24 1985-09-13 セイコ−精機株式会社 組合せ型軸流分子ポンプ
DE3705912A1 (de) * 1987-02-24 1988-09-01 Alcatel Hochvakuumtechnik Gmbh Hochvakuumpumpe mit einem glockenfoermigen rotor
FR2611818B1 (fr) * 1987-02-26 1991-04-19 Cit Alcatel Pompe rotative a vide moleculaire du type a canal de gaede
FR2641582B1 (fr) * 1989-01-09 1991-03-22 Cit Alcatel Pompe a vide du type a canal de gaede
JPH03222895A (ja) * 1990-01-26 1991-10-01 Hitachi Koki Co Ltd ねじ溝真空ポンプ
JP3486000B2 (ja) * 1995-03-31 2004-01-13 日本原子力研究所 ねじ溝真空ポンプ
DE19756837C2 (de) * 1997-12-19 1999-09-30 K Busch Gmbh Druck & Vakuum Dr Molekular- und Viskositätspumpe
FR2776029B1 (fr) * 1998-03-16 2000-06-23 Alsthom Cge Alcatel Pompe turbomoleculaire
DE19846188A1 (de) * 1998-10-07 2000-04-13 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
US6302641B1 (en) * 2000-01-07 2001-10-16 Kashiyama Kougyou Industry Co., Ltd. Multiple type vacuum pump
US6514035B2 (en) * 2000-01-07 2003-02-04 Kashiyama Kougyou Industry Co., Ltd. Multiple-type pump
DE10224604B4 (de) * 2002-06-04 2014-01-30 Oerlikon Leybold Vacuum Gmbh Evakuierungseinrichtung

Also Published As

Publication number Publication date
JP2008514862A (ja) 2008-05-08
WO2006037730A1 (de) 2006-04-13
US20080206041A1 (en) 2008-08-28
CN100458171C (zh) 2009-02-04
DE502005008839D1 (de) 2010-02-25
DE102004047930A1 (de) 2006-04-06
EP1797331B1 (de) 2010-01-06
CN101031724A (zh) 2007-09-05
EP1797331A1 (de) 2007-06-20

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Legal Events

Date Code Title Description
REN Ceased due to non-payment of the annual fee