ATE469723T1 - Vorrichtung zur industriellen verarbeitung eines materials durch optische strahlung - Google Patents

Vorrichtung zur industriellen verarbeitung eines materials durch optische strahlung

Info

Publication number
ATE469723T1
ATE469723T1 AT04801267T AT04801267T ATE469723T1 AT E469723 T1 ATE469723 T1 AT E469723T1 AT 04801267 T AT04801267 T AT 04801267T AT 04801267 T AT04801267 T AT 04801267T AT E469723 T1 ATE469723 T1 AT E469723T1
Authority
AT
Austria
Prior art keywords
optical radiation
industrial processing
optical
optical power
power distribution
Prior art date
Application number
AT04801267T
Other languages
English (en)
Inventor
Malcolm Paul Varnham
Original Assignee
Spi Lasers Uk Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Spi Lasers Uk Ltd filed Critical Spi Lasers Uk Ltd
Application granted granted Critical
Publication of ATE469723T1 publication Critical patent/ATE469723T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073—Shaping the laser spot
    • B23K26/0734—Shaping the laser spot into an annular shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067—Fibre lasers
    • H01S3/06708—Constructional details of the fibre, e.g. compositions, cross-section, shape or tapering
    • H01S3/06729—Peculiar transverse fibre profile

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Lasers (AREA)
  • Glass Compositions (AREA)
  • Surgical Instruments (AREA)
  • Laser Surgery Devices (AREA)
  • Treatment Of Fiber Materials (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
AT04801267T 2003-12-05 2004-12-06 Vorrichtung zur industriellen verarbeitung eines materials durch optische strahlung ATE469723T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0328370.2A GB0328370D0 (en) 2003-12-05 2003-12-05 Apparatus for providing optical radiation
PCT/GB2004/005113 WO2005053895A1 (en) 2003-12-05 2004-12-06 Apparatus for the industrial processing of a material by optical radiation

Publications (1)

Publication Number Publication Date
ATE469723T1 true ATE469723T1 (de) 2010-06-15

Family

ID=30129784

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04801267T ATE469723T1 (de) 2003-12-05 2004-12-06 Vorrichtung zur industriellen verarbeitung eines materials durch optische strahlung

Country Status (8)

Country Link
US (1) US7592568B2 (de)
EP (1) EP1699589B1 (de)
JP (1) JP2007518566A (de)
AT (1) ATE469723T1 (de)
CA (1) CA2547777C (de)
DE (1) DE602004027540D1 (de)
GB (1) GB0328370D0 (de)
WO (1) WO2005053895A1 (de)

Families Citing this family (86)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2893873B1 (fr) 2005-11-25 2008-12-12 Air Liquide Procede de coupage avec un laser a fibre d'acier inoxydable
FR2893872B1 (fr) * 2005-11-25 2008-10-17 Air Liquide Procede de coupage avec un laser a fibre d'acier c-mn
GB2434483A (en) * 2006-01-20 2007-07-25 Fianium Ltd High-Power Short Optical Pulse Source
US8629368B2 (en) * 2006-01-30 2014-01-14 Dm3D Technology, Llc High-speed, ultra precision manufacturing station that combines direct metal deposition and EDM
FR2897007B1 (fr) * 2006-02-03 2008-04-11 Air Liquide Procede de coupage avec un laser a fibre avec controle des parametres du faisceau
EP2016652B1 (de) * 2006-05-11 2014-06-18 SPI Lasers UK Limited Vorrichtung zur bereitstellung optischer strahlung
JP4784406B2 (ja) * 2006-06-13 2011-10-05 住友電気工業株式会社 ファイバレーザ装置およびレーザ加工方法
FR2909020B1 (fr) * 2006-11-29 2009-07-17 Safmatic Sa Machine de coupage ou soudage laser a fibre d'ytterbium
US7437046B2 (en) * 2007-02-12 2008-10-14 Furukawa Electric North America, Inc. Optical fiber configuration for dissipating stray light
JP2008291832A (ja) * 2007-04-26 2008-12-04 Ngk Spark Plug Co Ltd レーザ点火装置およびレーザ点火型内燃機関
DE102007028081B3 (de) * 2007-06-15 2008-11-20 Laserinstitut Mittelsachsen E.V. Lasereinrichtung zur Generierung von Laserstrahlen mit einem bestimmten Strahlprofil
WO2009043964A1 (en) * 2007-10-03 2009-04-09 Optoelectronics Research Centre, Tampere University Of Technology Active optical fiber and method for fabricating an active optical fiber
US9857536B2 (en) * 2008-07-14 2018-01-02 Chiral Photonics, Inc. Optical component assembly for use with an optical device
US8822954B2 (en) * 2008-10-23 2014-09-02 Intematix Corporation Phosphor based authentication system
JP2010167433A (ja) * 2009-01-21 2010-08-05 Omron Corp レーザ照射装置およびレーザ加工装置
EP2418041B1 (de) * 2009-04-07 2024-09-18 Hamamatsu Photonics K.K. Laserbearbeitungsvorrichtung und laserbearbeitungsverfahren
US8081667B2 (en) * 2009-09-14 2011-12-20 Gapontsev Valentin P Single-mode high power multimode fiber laser system
US8934509B2 (en) * 2009-11-23 2015-01-13 Lockheed Martin Corporation Q-switched oscillator seed-source for MOPA laser illuminator method and apparatus
DE102010003750A1 (de) * 2010-04-08 2011-10-13 Trumpf Laser- Und Systemtechnik Gmbh Verfahren und Anordnung zum Verändern der Strahlprofilcharakteristik eines Laserstrahls mittels einer Mehrfachclad-Faser
US20120153184A1 (en) * 2010-12-21 2012-06-21 Honeywell International Inc. Luminescent phosphor-containing materials, and methods for their production and use in authenticating articles
JP5348155B2 (ja) * 2011-02-28 2013-11-20 オムロン株式会社 レーザ加工装置
DE102011078173B4 (de) 2011-06-28 2020-06-18 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Verfahren zum Laserschneiden eines mit einer Folie versehenen Werkstücks mittels zweier Laserstrahlen sowie dazugehörige Laserschneidmaschine
CN104136952B (zh) 2011-12-09 2018-05-25 朗美通运营有限责任公司 用于改变激光束的光束参数积的光学器件和方法
US9339890B2 (en) 2011-12-13 2016-05-17 Hypertherm, Inc. Optimization and control of beam quality for material processing
GB2510370A (en) 2013-01-31 2014-08-06 Gsi Group Ltd Fibre Optical Laser Combiner
KR102241193B1 (ko) * 2013-03-15 2021-04-19 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 레이저 빔 위치결정 시스템용의 위상 어레이 조향
US10126494B2 (en) * 2013-06-14 2018-11-13 Chiral Photonics, Inc. Configurable polarization mode coupler
US10838155B2 (en) 2013-06-14 2020-11-17 Chiral Photonics, Inc. Multichannel optical coupler
US10914891B2 (en) * 2013-06-14 2021-02-09 Chiral Photonics, Inc. Multichannel optical coupler
US10101536B2 (en) * 2013-06-14 2018-10-16 Chiral Photonics, Inc. Multichannel optical coupler array
US9817191B2 (en) * 2013-06-14 2017-11-14 Chiral Photonics, Inc. Multichannel optical coupler array
US11966091B2 (en) * 2013-06-14 2024-04-23 Chiral Photonics, Inc. Multichannel optical coupler array
US10564348B2 (en) * 2013-06-14 2020-02-18 Chiral Photonics, Inc. Passive aligning optical coupler array
US11156781B2 (en) * 2013-06-14 2021-10-26 Chiral Photonics, Inc. Passive aligning optical coupler array
US10069271B2 (en) 2014-06-02 2018-09-04 Nlight, Inc. Scalable high power fiber laser
US10618131B2 (en) 2014-06-05 2020-04-14 Nlight, Inc. Laser patterning skew correction
CN105720463B (zh) 2014-08-01 2021-05-14 恩耐公司 光纤和光纤传输的激光器中的背向反射保护与监控
WO2016058624A1 (de) 2014-10-13 2016-04-21 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Optische anordnung mit einer kopplungseinrichtung und faserlaseranordnung sowie verfahren zum bearbeiten eines werkstücks unter verwendung einer solchenoptischen anordnung
US9837783B2 (en) 2015-01-26 2017-12-05 Nlight, Inc. High-power, single-mode fiber sources
GB201502109D0 (en) 2015-02-09 2015-03-25 Commw Of Australia Represented By Dept Of Defence An active optical fibre
GB2536276B (en) 2015-03-12 2019-11-13 Powerphotonic Ltd Field mapper
US10050404B2 (en) * 2015-03-26 2018-08-14 Nlight, Inc. Fiber source with cascaded gain stages and/or multimode delivery fiber with low splice loss
HUE056149T2 (hu) 2015-06-09 2022-01-28 Corelase Oy Lézeres megmunkáló berendezés és eljárás és egy optikai egység ehhez
WO2017008022A1 (en) * 2015-07-08 2017-01-12 Nlight, Inc. Fiber with depressed central index for increased beam parameter product
EP3353584B1 (de) 2015-09-24 2020-06-10 NLIGHT, Inc. Steuerung eines strahlparameterprodukts (bpp) durch änderung des faser-to-faser-winkels
WO2017091505A1 (en) 2015-11-23 2017-06-01 Nlight, Inc. Fine-scale temporal control for laser material processing
US11179807B2 (en) 2015-11-23 2021-11-23 Nlight, Inc. Fine-scale temporal control for laser material processing
DE102016000051A1 (de) * 2016-01-05 2017-07-06 Siltectra Gmbh Verfahren und Vorrichtung zum planaren Erzeugen von Modifikationen in Festkörpern
JP6796142B2 (ja) * 2016-04-06 2020-12-02 テラダイオード， インコーポレーテッド 可変レーザビームプロファイルのための光ファイバ構造および方法
DE102016205930A1 (de) * 2016-04-08 2017-10-12 Siemens Aktiengesellschaft Umschmelzen mit gleichzeitiger Erzeugung einer Druckringzone
JP6602860B2 (ja) * 2016-07-15 2019-11-06 コアレイズ オーワイ レーザ加工装置及びレーザ加工方法
CN109475975B (zh) * 2016-08-04 2021-08-17 通快激光英国有限公司 用于激光加工材料的装置和方法
US10732439B2 (en) 2016-09-29 2020-08-04 Nlight, Inc. Fiber-coupled device for varying beam characteristics
US10751834B2 (en) 2016-09-29 2020-08-25 Nlight, Inc. Optical beam delivery device formed of optical fibers configured for beam divergence or mode coupling control
US10656427B2 (en) 2016-09-29 2020-05-19 Nlight, Inc. Multicore fiber-coupled optical probing techniques
US10673199B2 (en) 2016-09-29 2020-06-02 Nlight, Inc. Fiber-based saturable absorber
US10730785B2 (en) 2016-09-29 2020-08-04 Nlight, Inc. Optical fiber bending mechanisms
CN109791252B (zh) * 2016-09-29 2021-06-29 恩耐公司 可调整的光束特性
US10682726B2 (en) 2016-09-29 2020-06-16 Nlight, Inc. Beam modification structures and methods of modifying optical beam characteristics using the beam modification structures
US10673197B2 (en) 2016-09-29 2020-06-02 Nlight, Inc. Fiber-based optical modulator
US10668567B2 (en) 2016-09-29 2020-06-02 Nlight, Inc. Multi-operation laser tooling for deposition and material processing operations
US10661391B2 (en) 2016-09-29 2020-05-26 Nlight, Inc. Method of forming pores in three-dimensional objects
US10673198B2 (en) 2016-09-29 2020-06-02 Nlight, Inc. Fiber-coupled laser with time varying beam characteristics
KR102636850B1 (ko) * 2016-12-08 2024-02-14 코렐라스 오와이 레이저 처리 장치 및 방법
EP3607389B1 (de) 2017-04-04 2023-06-07 Nlight, Inc. Optische referenzerzeugung für die kalibrierung von galvanometrischen scannern
JP6674422B2 (ja) * 2017-09-14 2020-04-01 フタバ産業株式会社 レーザ溶接装置、及び、部材の製造方法
CN111526966B (zh) * 2017-12-29 2022-08-05 可利雷斯股份有限公司 激光处理装置及方法
WO2019234623A1 (en) 2018-06-05 2019-12-12 Elesta S.R.L. Optical fiber device for laser thermal ablation and thermal therapy
US11262591B2 (en) 2018-11-09 2022-03-01 Kla Corporation System and method for pumping laser sustained plasma with an illumination source having modified pupil power distribution
WO2020101970A1 (en) * 2018-11-12 2020-05-22 Panasonic intellectual property Management co., Ltd Optical fiber structures and methods for beam shaping
JP7487197B2 (ja) * 2018-12-03 2024-05-20 アイピージー フォトニクス コーポレーション 制御可能な出力ビーム強度プロファイルを有する超高ファイバレーザシステム
JP7291501B2 (ja) * 2019-03-11 2023-06-15 株式会社フジクラ レーザ加工装置
CN113891777B (zh) * 2019-03-28 2024-10-25 松下知识产权经营株式会社 利用高频光束整形的材料加工
CN110412769B (zh) * 2019-07-12 2020-06-23 武汉锐科光纤激光技术股份有限公司 一种光纤激光合束器
WO2021045074A1 (ja) * 2019-09-03 2021-03-11 株式会社フジクラ 光増幅装置
DE102019125103A1 (de) * 2019-09-18 2021-03-18 Bystronic Laser Ag Bearbeitungsvorrichtung zur Laserbearbeitung eines Werkstücks, Verfahren zur Laserbearbeitung eines Werkstücks
DE102019215968A1 (de) * 2019-10-17 2021-04-22 Trumpf Laser- Und Systemtechnik Gmbh Laserschweißverfahren für Eckverbindungen von Werkstückteilen
US12210185B2 (en) 2020-02-24 2025-01-28 Chiral Photonics, Inc. Wavelength division multiplexers for space division multiplexing (SDM-WDM devices)
EP4134715A4 (de) * 2020-04-08 2024-04-24 Fujikura Ltd. Glasfaser und faserlaservorrichtung
JP7450447B2 (ja) * 2020-04-14 2024-03-15 株式会社ディスコ レーザー加工装置
WO2021241545A1 (ja) * 2020-05-26 2021-12-02 株式会社フジクラ 光コンバイナ及びレーザ装置
CN116056829A (zh) * 2020-07-07 2023-05-02 松下知识产权经营株式会社 用于更改光束形状和强度的阶跃芯光纤结构和方法
CN113555760A (zh) * 2021-09-22 2021-10-26 中国工程物理研究院激光聚变研究中心 一种光纤激光模式动态调控系统及方法
DE102022128170A1 (de) * 2022-10-25 2024-04-25 TRUMPF Werkzeugmaschinen SE + Co. KG Technik zum Verrunden einer Werkstückkante
DE102024124519A1 (de) * 2024-08-28 2026-03-05 TRUMPF Laser- und Systemtechnik SE Verfahren und Vorrichtung zum abtragenden Laserbearbeiten
CN119627600B (zh) * 2024-12-10 2026-03-20 湖南大科激光有限公司 可调环模光纤激光器及其激光焊接稳定性评价方法

Family Cites Families (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3777150A (en) * 1972-07-17 1973-12-04 Bell Telephone Labor Inc Mode detection and delay equalization in multimode optical fiber transmission systems
US4467168A (en) * 1981-04-01 1984-08-21 Creative Glassworks International Method of cutting glass with a laser and an article made therewith
JPS60263427A (ja) * 1984-06-12 1985-12-26 Fujitsu Ltd 半導体装置の製造方法
FR2643466B1 (fr) * 1989-02-21 1991-04-19 France Etat Dispositif pour le controle et l'ajustement de l'alignement modal de fibres optiques
JPH03216287A (ja) * 1990-01-19 1991-09-24 Fanuc Ltd レーザ切断加工方法
US5231464A (en) * 1990-03-26 1993-07-27 Research Development Corporation Of Japan Highly directional optical system and optical sectional image forming apparatus employing the same
DE9013943U1 (de) 1990-10-06 1991-01-03 Trumpf GmbH & Co, 7257 Ditzingen Laserdüse
DK168180B1 (da) * 1991-07-19 1994-02-21 Lycom As Fremgangsmåde til at forstærke et optisk signal, optisk forstærker til udøvelse af fremgangsmåden, og anvendelse af en sådan optisk forstærker som lyskilde
US5609781A (en) 1992-10-23 1997-03-11 Mitsubishi Denki Kabushiki Kaisha Machining head and laser machining apparatus
TW270907B (de) 1992-10-23 1996-02-21 Mitsubishi Electric Machine
JPH06218565A (ja) * 1993-01-20 1994-08-09 Mitsubishi Electric Corp レーザ加工装置
DE19511393B4 (de) * 1995-03-28 2005-08-25 Carl Baasel Lasertechnik Gmbh Gerät zur Substratbehandlung, insbesondere zum Perforieren von Papier
GB9507719D0 (en) 1995-04-13 1995-05-31 Boc Group Plc Machining of materials
US6018533A (en) * 1995-04-21 2000-01-25 Ceramoptec Industries, Inc. Optical fiber and integrated optic lasers with enhanced output power
US5956447A (en) * 1996-05-07 1999-09-21 Univ Central Florida Device and method for image acquisition through multi-mode fiber
US5877890A (en) * 1996-10-30 1999-03-02 Rutgers, The State University Of New Jersey Optical-fiber amplifier having high-saturation output
GB9625231D0 (en) * 1996-12-04 1997-01-22 Univ Southampton Optical amplifiers & lasers
GB9814526D0 (en) * 1998-07-03 1998-09-02 Univ Southampton Optical fibre and optical fibre device
JP2000091678A (ja) * 1998-09-11 2000-03-31 Nec Corp ファイバレーザ照射装置
JP2000111753A (ja) * 1998-09-30 2000-04-21 Fujikura Ltd レーザ光伝送用光ファイバ
TW419607B (en) * 1999-01-13 2001-01-21 Sumitomo Electric Industries Optical fiber grating element, manufacture method of the same and optical filter
US20030024913A1 (en) * 2002-04-15 2003-02-06 Downes Joseph P. Laser scanning method and system for marking articles such as printed circuit boards, integrated circuits and the like
US6376797B1 (en) 2000-07-26 2002-04-23 Ase Americas, Inc. Laser cutting of semiconductor materials
US6423928B1 (en) 2000-10-12 2002-07-23 Ase Americas, Inc. Gas assisted laser cutting of thin and fragile materials
FR2817782B1 (fr) * 2000-12-13 2003-02-28 Air Liquide Procede et installation de coupage laser avec tete de decoupe a double flux et double foyer
KR100345448B1 (ko) * 2000-12-21 2002-07-26 한국전자통신연구원 이중 파장 광섬유 레이저
ATE418743T1 (de) * 2001-03-30 2009-01-15 Ocg Technology Licensing Llc Ringkernfaser
US7253032B2 (en) * 2001-04-20 2007-08-07 Semiconductor Energy Laboratory Co., Ltd. Method of flattening a crystallized semiconductor film surface by using a plate
US6831934B2 (en) * 2001-05-29 2004-12-14 Apollo Instruments, Inc. Cladding pumped fiber laser
EP1280247B1 (de) * 2001-07-23 2003-10-01 Alcatel Optischer Faserverstärker und Kommunikationssystem unter Verwendung desselben
DE102004062849A1 (de) * 2004-12-27 2006-07-06 Carl Baasel Lasertechnik Gmbh & Co. Kg Laseraktive optische Faser für einen Faserlaser oder einen faseroptischen Verstärker

Also Published As

Publication number Publication date
DE602004027540D1 (de) 2010-07-15
US7592568B2 (en) 2009-09-22
CA2547777C (en) 2013-01-15
EP1699589A1 (de) 2006-09-13
US20060219673A1 (en) 2006-10-05
WO2005053895A1 (en) 2005-06-16
CA2547777A1 (en) 2005-06-16
JP2007518566A (ja) 2007-07-12
EP1699589B1 (de) 2010-06-02
GB0328370D0 (en) 2004-01-14

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