ATE471457T1 - Mikrofluidische vorrichtung - Google Patents

Mikrofluidische vorrichtung

Info

Publication number
ATE471457T1
ATE471457T1 AT08169675T AT08169675T ATE471457T1 AT E471457 T1 ATE471457 T1 AT E471457T1 AT 08169675 T AT08169675 T AT 08169675T AT 08169675 T AT08169675 T AT 08169675T AT E471457 T1 ATE471457 T1 AT E471457T1
Authority
AT
Austria
Prior art keywords
transport channel
working chamber
microfluidic device
fluid
electrodes
Prior art date
Application number
AT08169675T
Other languages
English (en)
Inventor
Mihai Patrascu
Mercedes Crego Calama
Martijn Goedbloed
Koray Karakaya
Original Assignee
Stichting Imec Nederland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stichting Imec Nederland filed Critical Stichting Imec Nederland
Application granted granted Critical
Publication of ATE471457T1 publication Critical patent/ATE471457T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/06—Pumps having fluid drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/12—Machines, pumps, or pumping installations having flexible working members having peristaltic action
    • F04B43/14—Machines, pumps, or pumping installations having flexible working members having peristaltic action having plate-like flexible members
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Micromachines (AREA)
  • Reciprocating Pumps (AREA)
  • Materials For Photolithography (AREA)
AT08169675T 2007-11-23 2008-11-21 Mikrofluidische vorrichtung ATE471457T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US98963607P 2007-11-23 2007-11-23
EP07076017 2007-11-23

Publications (1)

Publication Number Publication Date
ATE471457T1 true ATE471457T1 (de) 2010-07-15

Family

ID=39277122

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08169675T ATE471457T1 (de) 2007-11-23 2008-11-21 Mikrofluidische vorrichtung

Country Status (4)

Country Link
US (1) US8353682B2 (de)
EP (1) EP2071189B1 (de)
AT (1) ATE471457T1 (de)
DE (1) DE602008001547D1 (de)

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GB2481425A (en) 2010-06-23 2011-12-28 Iti Scotland Ltd Method and device for assembling polynucleic acid sequences
JP5654827B2 (ja) * 2010-10-06 2015-01-14 学校法人慶應義塾 ポンプ装置及びそれを用いた内視鏡装置
EP2888479B1 (de) * 2012-07-05 2021-03-03 3M Innovative Properties Company Systeme und verfahren zur zuführung von reduziertem druck unter verwendung einer scheibenpumpe mit elektrostatischer betätigung
WO2015114635A1 (en) * 2014-02-01 2015-08-06 Ezmems Ltd. Chip device for monitoring and regulating fluid flow, and methods of manufacture thereof
US11033898B2 (en) 2014-02-01 2021-06-15 Ezmems Ltd. Fluidic microelectromechanical sensors/devices and fabrication methods thereof
US10344753B2 (en) 2014-02-28 2019-07-09 Encite Llc Micro pump systems
US10330095B2 (en) 2014-10-31 2019-06-25 Encite Llc Microelectromechanical systems fabricated with roll to roll processing
CN107532134B (zh) * 2015-04-29 2021-11-09 米兰综合工科大学 用于三维细胞和/或组织构建体的产生和/或培养和/或成熟的微流体设备和相关方法
WO2017046802A1 (en) * 2015-09-16 2017-03-23 Technion Research & Development Foundation Limited Dynamic microfluidic devices and use thereof
US11020524B1 (en) * 2016-02-19 2021-06-01 University Of South Florida Peristaltic micropumps and fluid delivery devices that incorporate them
US20170285858A1 (en) * 2016-03-30 2017-10-05 Intel Corporation Intelligent pressure sensitive display
WO2018027108A1 (en) 2016-08-05 2018-02-08 Marsh Stephen Alan Micro pressure sensor
CA3055775A1 (en) 2017-03-13 2018-09-20 Stephen Alan MARSH Micro pump systems and processing techniques
WO2018183744A1 (en) 2017-03-29 2018-10-04 The Research Foundation For The State University Of New York Microfluidic device and methods
US10739170B2 (en) 2017-08-04 2020-08-11 Encite Llc Micro flow measurement devices and devices with movable features
US11046575B2 (en) 2017-10-31 2021-06-29 Encite Llc Broad range micro pressure sensor
WO2019158997A1 (en) 2018-02-16 2019-08-22 Cequr Sa Devices and methods for flow restriction in a microfluidic circuit for drug delivery
US11331618B2 (en) 2018-03-07 2022-05-17 Encite Llc R2R microelectromechanical gas concentrator
US11296619B2 (en) 2018-06-07 2022-04-05 Encite Llc Micro electrostatic motor and micro mechanical force transfer devices
US10746206B1 (en) 2019-02-07 2020-08-18 Toyota Motor Engineering & Manufacturing North America, Inc. Soft-bodied fluidic actuator
US12465548B2 (en) * 2021-07-01 2025-11-11 Toyota Motor Engineering & Manufacturing North America, Inc. Artificial muscle light weight seat massager and haptic response chair
KR20230099085A (ko) * 2021-12-27 2023-07-04 현대자동차주식회사 음압 발생을 적용한 슬롯 다이 코팅 장치 및 이의 사용방법
CN116408154A (zh) * 2021-12-29 2023-07-11 群创光电股份有限公司 电子装置
US11773878B1 (en) * 2022-05-18 2023-10-03 Toyota Motor Engineering & Manufacturing North America, Inc. Artificial muscle assemblies comprising a reinforced housing
US20240206116A1 (en) * 2022-12-19 2024-06-20 Microsoft Technology Licensing, Llc Systems and methods for microfluidic thermal management
US20240198330A1 (en) * 2022-12-19 2024-06-20 Microsoft Technology Licensing, Llc Systems and methods for microfluidic thermal management

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EP0424087A1 (de) * 1989-10-17 1991-04-24 Seiko Epson Corporation Mikropumpe oder Mikrodurchflussmenge
KR910012538A (ko) * 1989-12-27 1991-08-08 야마무라 가쯔미 마이크로 펌프 및 그 제조 방법
JP3328300B2 (ja) * 1991-07-18 2002-09-24 アイシン精機株式会社 流体制御装置
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US6074178A (en) * 1997-04-15 2000-06-13 Face International Corp. Piezoelectrically actuated peristaltic pump
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US7648619B2 (en) * 2002-06-04 2010-01-19 Industrial Technology Research Hydrogel-driven micropump
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US6749407B2 (en) * 2002-08-22 2004-06-15 Motorola, Inc. Method of installing valves in a micro-pump
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DE102006017482A1 (de) 2006-04-13 2007-10-18 Technische Universität Chemnitz Mikrofluidischer Aktor, Aktorverfahren und Verfahren zum Herstellen eines Mikroaktors

Also Published As

Publication number Publication date
US8353682B2 (en) 2013-01-15
EP2071189A1 (de) 2009-06-17
US20090129952A1 (en) 2009-05-21
EP2071189B1 (de) 2010-06-16
DE602008001547D1 (de) 2010-07-29

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