ATE472582T1 - Belegte metalloxidteilchen für cmp - Google Patents

Belegte metalloxidteilchen für cmp

Info

Publication number
ATE472582T1
ATE472582T1 AT04760040T AT04760040T ATE472582T1 AT E472582 T1 ATE472582 T1 AT E472582T1 AT 04760040 T AT04760040 T AT 04760040T AT 04760040 T AT04760040 T AT 04760040T AT E472582 T1 ATE472582 T1 AT E472582T1
Authority
AT
Austria
Prior art keywords
polishing composition
metal oxide
oxide particles
substrate
abrasive
Prior art date
Application number
AT04760040T
Other languages
English (en)
Inventor
Fred F Sun
Bin Lu
Ethan K Lightle
Shumin Wang
Original Assignee
Cabot Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cabot Microelectronics Corp filed Critical Cabot Microelectronics Corp
Application granted granted Critical
Publication of ATE472582T1 publication Critical patent/ATE472582T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463—Aqueous liquid suspensions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • H10P52/40—Chemomechanical polishing [CMP]
    • H10P52/403—Chemomechanical polishing [CMP] of conductive or resistive materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
AT04760040T 2003-04-21 2004-04-19 Belegte metalloxidteilchen für cmp ATE472582T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/419,580 US7044836B2 (en) 2003-04-21 2003-04-21 Coated metal oxide particles for CMP
PCT/US2004/012133 WO2004094547A2 (en) 2003-04-21 2004-04-19 Coated metal oxide particles for cmp

Publications (1)

Publication Number Publication Date
ATE472582T1 true ATE472582T1 (de) 2010-07-15

Family

ID=33159333

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04760040T ATE472582T1 (de) 2003-04-21 2004-04-19 Belegte metalloxidteilchen für cmp

Country Status (9)

Country Link
US (1) US7044836B2 (de)
EP (1) EP1620518B1 (de)
JP (1) JP4782673B2 (de)
KR (1) KR101195289B1 (de)
CN (2) CN102127370A (de)
AT (1) ATE472582T1 (de)
DE (1) DE602004027901D1 (de)
TW (1) TWI268954B (de)
WO (1) WO2004094547A2 (de)

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Also Published As

Publication number Publication date
TW200427826A (en) 2004-12-16
KR20060007028A (ko) 2006-01-23
WO2004094547A2 (en) 2004-11-04
KR101195289B1 (ko) 2012-10-26
CN1809620A (zh) 2006-07-26
TWI268954B (en) 2006-12-21
US7044836B2 (en) 2006-05-16
JP2006524918A (ja) 2006-11-02
DE602004027901D1 (de) 2010-08-12
JP4782673B2 (ja) 2011-09-28
US20040209555A1 (en) 2004-10-21
CN102127370A (zh) 2011-07-20
EP1620518B1 (de) 2010-06-30
WO2004094547A3 (en) 2004-12-16
EP1620518A2 (de) 2006-02-01

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