ATE472749T1 - Flexibler nano-druckstempel - Google Patents

Flexibler nano-druckstempel

Info

Publication number
ATE472749T1
ATE472749T1 AT05777919T AT05777919T ATE472749T1 AT E472749 T1 ATE472749 T1 AT E472749T1 AT 05777919 T AT05777919 T AT 05777919T AT 05777919 T AT05777919 T AT 05777919T AT E472749 T1 ATE472749 T1 AT E472749T1
Authority
AT
Austria
Prior art keywords
imprinting
stamp
sections
imperfections
printing stamp
Prior art date
Application number
AT05777919T
Other languages
English (en)
Inventor
Theodor Nielsen
Anders Kristensen
Ole Hansen
Original Assignee
Nil Technology Aps
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nil Technology Aps filed Critical Nil Technology Aps
Priority claimed from PCT/DK2005/000570 external-priority patent/WO2006026993A1/en
Application granted granted Critical
Publication of ATE472749T1 publication Critical patent/ATE472749T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/00444—Surface micromachining, i.e. structuring layers on the substrate
    • B81C1/0046—Surface micromachining, i.e. structuring layers on the substrate using stamping, e.g. imprinting
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/887—Nanoimprint lithography, i.e. nanostamp

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Printing Plates And Materials Therefor (AREA)
  • Electroluminescent Light Sources (AREA)
  • Printing Methods (AREA)
AT05777919T 2004-09-08 2005-09-07 Flexibler nano-druckstempel ATE472749T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DKPA200401354 2004-09-08
US61252004P 2004-09-24 2004-09-24
PCT/DK2005/000570 WO2006026993A1 (en) 2004-09-08 2005-09-07 A flexible nano-imprint stamp

Publications (1)

Publication Number Publication Date
ATE472749T1 true ATE472749T1 (de) 2010-07-15

Family

ID=39062428

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05777919T ATE472749T1 (de) 2004-09-08 2005-09-07 Flexibler nano-druckstempel

Country Status (6)

Country Link
KR (1) KR20070106683A (de)
AT (1) ATE472749T1 (de)
BR (1) BRPI0515058A (de)
DE (1) DE602005022084D1 (de)
IL (1) IL181718A (de)
RU (1) RU2365960C2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2476917C1 (ru) * 2011-08-12 2013-02-27 Открытое акционерное общество "НИИ молекулярной электроники и завод "Микрон" Способ изготовления штампа для наноимпринт литографии
TWI665078B (zh) * 2013-07-22 2019-07-11 皇家飛利浦有限公司 製造圖案化印模以圖案化輪廓表面之方法、供在壓印微影製程中使用之圖案化印模、壓印微影方法、包括圖案化輪廓表面之物件及圖案化印模用於壓印微影之用法
KR101581437B1 (ko) * 2013-12-23 2015-12-30 (재)한국나노기술원 비대칭형 금속 또는 금속산화물 나노구조체의 형성방법
CN107077065B (zh) * 2014-09-22 2020-10-30 皇家飞利浦有限公司 传递方法和装置以及计算机程序产品
KR101663629B1 (ko) * 2015-11-20 2016-10-10 (재)한국나노기술원 가변형 임프린트용 스탬프를 이용한 비대칭형 금속 또는 금속산화물 나노구조체
JP6545401B2 (ja) * 2016-04-06 2019-07-17 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． インプリントリソグラフィースタンプの作製方法及び使用方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE523309E (sv) * 2001-06-15 2010-03-02 Replisaurus Technologies Ab Metod, elektrod och apparat för att skapa mikro- och nanostrukturer i ledande material genom mönstring med masterelektrod och elektrolyt

Also Published As

Publication number Publication date
DE602005022084D1 (de) 2010-08-12
RU2007112511A (ru) 2008-10-20
IL181718A (en) 2011-09-27
RU2365960C2 (ru) 2009-08-27
IL181718A0 (en) 2007-07-04
KR20070106683A (ko) 2007-11-05
BRPI0515058A (pt) 2008-07-01

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