ATE473551T1 - Siliziumresonator des stimmgabeltyps - Google Patents

Siliziumresonator des stimmgabeltyps

Info

Publication number
ATE473551T1
ATE473551T1 AT07821014T AT07821014T ATE473551T1 AT E473551 T1 ATE473551 T1 AT E473551T1 AT 07821014 T AT07821014 T AT 07821014T AT 07821014 T AT07821014 T AT 07821014T AT E473551 T1 ATE473551 T1 AT E473551T1
Authority
AT
Austria
Prior art keywords
fork type
resonator
silicon
type silicon
tuning fork
Prior art date
Application number
AT07821014T
Other languages
English (en)
Inventor
Jacek Baborowski
Claude Bourgeois
Marc-Alexandre Dubois
David Ruffieux
Original Assignee
Suisse Electronique Microtech
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suisse Electronique Microtech filed Critical Suisse Electronique Microtech
Application granted granted Critical
Publication of ATE473551T1 publication Critical patent/ATE473551T1/de

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H2003/026—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks the resonators or networks being of the tuning fork type

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
AT07821014T 2006-10-09 2007-10-08 Siliziumresonator des stimmgabeltyps ATE473551T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH01606/06A CH700716B1 (fr) 2006-10-09 2006-10-09 Résonateur en silicium de type diapason.
PCT/EP2007/060641 WO2008043727A1 (fr) 2006-10-09 2007-10-08 Resonateur en silicium de type diapason

Publications (1)

Publication Number Publication Date
ATE473551T1 true ATE473551T1 (de) 2010-07-15

Family

ID=38791982

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07821014T ATE473551T1 (de) 2006-10-09 2007-10-08 Siliziumresonator des stimmgabeltyps

Country Status (6)

Country Link
US (1) US8098002B2 (de)
EP (1) EP2074695B8 (de)
AT (1) ATE473551T1 (de)
CH (1) CH700716B1 (de)
DE (1) DE602007007643D1 (de)
WO (1) WO2008043727A1 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010252303A (ja) 2009-03-25 2010-11-04 Seiko Epson Corp 屈曲振動片およびそれを用いた発振器
JP2010252302A (ja) 2009-03-25 2010-11-04 Seiko Epson Corp 屈曲振動片およびそれを用いた発振器
US20110001394A1 (en) * 2009-07-02 2011-01-06 Eta Sa Piezoelectric thin-film tuning fork resonator
EP2284629A1 (de) * 2009-08-13 2011-02-16 ETA SA Manufacture Horlogère Suisse Thermokompensierter mechanischer Resonator
FI20095988A0 (fi) * 2009-09-28 2009-09-28 Valtion Teknillinen Mikromekaaninen resonaattori ja menetelmä sen valmistamiseksi
EP2337221A1 (de) * 2009-12-15 2011-06-22 The Swatch Group Research and Development Ltd. Thermokompensierter Resonator mindestens ersten und zweiten Grades
US8804081B2 (en) 2009-12-18 2014-08-12 Samsung Display Co., Ltd. Liquid crystal display device with electrode having opening over thin film transistor
JP5581887B2 (ja) * 2009-12-29 2014-09-03 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器、および周波数調整方法
JP2011155629A (ja) * 2009-12-29 2011-08-11 Seiko Epson Corp 振動片、振動子、発振器、電子機器、および周波数調整方法
EP2395661A1 (de) 2010-06-10 2011-12-14 The Swatch Group Research and Development Ltd. Temperaturkompensierter Resonator mit reduzierten Temperaturkoeffizienten erster und zweiter Ordnung
JP2012060355A (ja) * 2010-09-08 2012-03-22 Seiko Epson Corp 振動片、振動子、振動デバイスおよび電子機器
US8674775B2 (en) * 2011-06-30 2014-03-18 Silicon Laboratories Inc. Out-of-plane resonator
EP2590325A1 (de) 2011-11-04 2013-05-08 The Swatch Group Research and Development Ltd. Thermokompensierter Resonator aus Keramik
WO2014042020A2 (ja) * 2012-09-13 2014-03-20 株式会社村田製作所 振動装置及びその製造方法
CH707554A2 (fr) 2013-02-07 2014-08-15 Swatch Group Res & Dev Ltd Résonateur thermocompensé par un métal à mémoire de forme.
JP2014165573A (ja) * 2013-02-22 2014-09-08 Seiko Epson Corp 振動片、振動子、電子デバイス、電子機器、および移動体
CN105210294B (zh) 2013-05-13 2017-09-29 株式会社村田制作所 振动装置
WO2014185282A1 (ja) 2013-05-13 2014-11-20 株式会社村田製作所 振動装置
SG11201508861WA (en) 2013-05-13 2015-11-27 Murata Manufacturing Co Vibrating device
CN105556840B (zh) 2013-09-20 2019-01-04 株式会社村田制作所 振动装置及其制造方法
JP6168161B2 (ja) * 2013-12-27 2017-07-26 株式会社村田製作所 圧電振動子及び圧電振動子の周波数調整方法
JP6168486B2 (ja) 2014-01-24 2017-07-26 株式会社村田製作所 圧電振動子及び圧電振動装置
WO2016051023A1 (en) * 2014-10-03 2016-04-07 Teknologian Tutkimuskeskus Vtt Oy Temperature compensated compound resonator
WO2016051022A1 (en) * 2014-10-03 2016-04-07 Teknologian Tutkimuskeskus Vtt Oy Temperature compensated beam resonator
KR102434704B1 (ko) 2017-08-04 2022-08-22 삼성전자주식회사 전방향 음향 센서

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57183116A (en) * 1981-05-07 1982-11-11 Citizen Watch Co Ltd Piezoelectric oscillator
JPS583411A (ja) * 1981-06-30 1983-01-10 Citizen Watch Co Ltd 圧電振動子
JPS59171303A (ja) * 1983-03-18 1984-09-27 Citizen Watch Co Ltd 水晶発振器
US5438231A (en) * 1993-08-23 1995-08-01 Rockwell International Corporation Thin film micromechanical resonator gyro
US6557419B1 (en) 1996-12-31 2003-05-06 Honeywell International Inc. Zero TCF thin film resonator
JPH10197254A (ja) * 1997-01-07 1998-07-31 Alps Electric Co Ltd 振動子の支持装置
EP1083404B1 (de) 1999-09-08 2008-01-30 Alps Electric Co., Ltd. Kreiselgerät und Eingabegerät dafür
JP2002022445A (ja) * 2000-07-03 2002-01-23 Yoshiro Tomikawa 運動センサ
JP3778809B2 (ja) 2001-04-13 2006-05-24 富士通メディアデバイス株式会社 音叉型振動ジャイロ及びその電極トリミング方法
JP3972790B2 (ja) * 2001-11-27 2007-09-05 松下電器産業株式会社 薄膜微小機械式共振子および薄膜微小機械式共振子ジャイロ
US6865945B2 (en) 2002-06-10 2005-03-15 Matsushita Electric Industrial Co., Ltd. Angular velocity sensor
US7164179B2 (en) * 2002-08-07 2007-01-16 Matsushita Electric Industrial Co., Ltd. Angular-velocity sensor
US6987432B2 (en) 2003-04-16 2006-01-17 Robert Bosch Gmbh Temperature compensation for silicon MEMS resonator
JP2005249646A (ja) * 2004-03-05 2005-09-15 Matsushita Electric Ind Co Ltd 角速度センサ用音叉型振動子、この振動子を用いた角速度センサ及びこの角速度センサを用いた自動車
JP4440682B2 (ja) * 2004-03-25 2010-03-24 シチズンホールディングス株式会社 振動ジャイロ
JP2006038717A (ja) * 2004-07-29 2006-02-09 Citizen Watch Co Ltd 圧電ジャイロとその製造方法
JP2008172713A (ja) * 2007-01-15 2008-07-24 Hitachi Media Electoronics Co Ltd 圧電薄膜共振器および圧電薄膜共振器フィルタおよびその製造方法
JP5067033B2 (ja) * 2007-06-20 2012-11-07 セイコーエプソン株式会社 音叉型振動子、発振器
ES2306630B1 (es) * 2008-07-17 2009-06-03 Encarnacion Mira Rodriguez Dispositivo antiflacidez y antiarrugas.

Also Published As

Publication number Publication date
EP2074695B1 (de) 2010-07-07
US8098002B2 (en) 2012-01-17
US20100013360A1 (en) 2010-01-21
EP2074695A1 (de) 2009-07-01
WO2008043727A1 (fr) 2008-04-17
EP2074695B8 (de) 2010-08-11
DE602007007643D1 (de) 2010-08-19
CH700716B1 (fr) 2010-10-15

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