ATE475078T1 - Verfahren zur bestimmung der lösungsmitteldurchlässigkeit von filmen - Google Patents

Verfahren zur bestimmung der lösungsmitteldurchlässigkeit von filmen

Info

Publication number
ATE475078T1
ATE475078T1 AT06447068T AT06447068T ATE475078T1 AT E475078 T1 ATE475078 T1 AT E475078T1 AT 06447068 T AT06447068 T AT 06447068T AT 06447068 T AT06447068 T AT 06447068T AT E475078 T1 ATE475078 T1 AT E475078T1
Authority
AT
Austria
Prior art keywords
film
coating
permeability
solvent
water
Prior art date
Application number
AT06447068T
Other languages
English (en)
Inventor
Mikhail Baklanov
Philippe Foubert
Original Assignee
Imec
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Imec filed Critical Imec
Application granted granted Critical
Publication of ATE475078T1 publication Critical patent/ATE475078T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/08—Investigating permeability, pore-volume, or surface area of porous materials
    • G01N15/082—Investigating permeability by forcing a fluid through a sample
    • G01N15/0826—Investigating permeability by forcing a fluid through a sample and measuring fluid flow rate, i.e. permeation rate or pressure change
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/08—Investigating permeability, pore-volume, or surface area of porous materials
    • G01N15/082—Investigating permeability by forcing a fluid through a sample
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/08—Investigating permeability, pore-volume, or surface area of porous materials
    • G01N2015/0866—Sorption
    • G01N2015/0873—Dynamic sorption, e.g. with flow control means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Fluid Mechanics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
AT06447068T 2005-12-22 2006-05-23 Verfahren zur bestimmung der lösungsmitteldurchlässigkeit von filmen ATE475078T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US75344905P 2005-12-22 2005-12-22

Publications (1)

Publication Number Publication Date
ATE475078T1 true ATE475078T1 (de) 2010-08-15

Family

ID=37575961

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06447068T ATE475078T1 (de) 2005-12-22 2006-05-23 Verfahren zur bestimmung der lösungsmitteldurchlässigkeit von filmen

Country Status (5)

Country Link
US (1) US7458251B2 (de)
EP (1) EP1801559B1 (de)
JP (1) JP4892333B2 (de)
AT (1) ATE475078T1 (de)
DE (1) DE602006015595D1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2886015B1 (fr) * 2005-05-18 2007-07-13 Commissariat Energie Atomique Procede de mesure de la porosite par ellipsometrie et dispositif mettant en oeuvre un tel procede
US7907264B1 (en) * 2007-09-07 2011-03-15 Kla-Tencor Corporation Measurement of thin film porosity
GB2456295A (en) * 2007-12-04 2009-07-15 Montfort Services Sdn Bhd Method and apparatus for measuring the absorption of a volatile compound
US8711356B2 (en) * 2010-02-25 2014-04-29 Stichting Imec Nederland Gas sensor with a porous layer that detectably affects a surface lattice resonant condition of a nanoparticle array
JP5849370B2 (ja) * 2011-08-22 2016-01-27 住友化学株式会社 ガスバリア性積層フィルムの検査方法、ガスバリア性積層フィルムの製造方法、ガスバリア性積層フィルムを使用した電子デバイスの検査方法およびガスバリア性積層フィルムを使用した電子デバイスの製造方法
US10078044B2 (en) * 2013-10-08 2018-09-18 Nanyang Technological University Method and arrangement for determining at least one pore-related parameter of a porous material
FR3026846B1 (fr) * 2014-10-03 2016-12-23 Commissariat Energie Atomique Dispositif de mesure du gonflement et de l'impregnation d'un enrobe bitumineux en contact avec une solution de lixiviation, et procede associe
US9546943B1 (en) * 2015-03-21 2017-01-17 J.A. Woollam Co., Inc System and method for investigating change in optical properties of a porous effective substrate surface as a function of a sequence of solvent partial pressures at atmospheric pressure
CN108007843B (zh) * 2017-12-19 2024-01-30 中国石油天然气集团公司 一种用于评价高温高压下溶解氧在防腐涂层中渗透性的装置及方法
CN109238155B (zh) * 2018-11-01 2020-01-17 上海市计量测试技术研究院 采用等效物理结构模型测量SiO2薄膜厚度的方法
CN113289845B (zh) * 2021-04-07 2023-09-29 浙江普汇电子科技有限公司 一种局部排气和分格检测法加速氨纶底襟生产装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000012999A1 (en) * 1998-08-28 2000-03-09 Interuniversitaire Microelektronica Centrum Vzw Apparatus and method for determining porosity
DE20000779U1 (de) * 2000-01-18 2000-08-03 Illing, Gerhard, 26721 Emden Differenzdruckmeßsystem zur Bestimmung der Permeabilität, der Sorption und des Diffusionskoeffizienten stoffdurchlässiger Materialien
EP1172847A3 (de) * 2000-07-10 2004-07-28 Interuniversitair Micro-Elektronica Centrum Vzw Methode, eine poröse Siliziumoxidschicht herzustellen
US6766682B2 (en) * 2001-10-19 2004-07-27 Desert Cryogenics Llc Precise measurement system for barrier materials
JP3958235B2 (ja) * 2002-04-05 2007-08-15 住友ベークライト株式会社 水蒸気バリア性評価用セルおよび水蒸気バリア性評価方法
US6981403B2 (en) * 2003-10-31 2006-01-03 Mocon, Inc. Method and apparatus for measuring gas transmission rates of deformable or brittle materials
JP2007040712A (ja) * 2005-07-29 2007-02-15 Takenaka Komuten Co Ltd 塗材の透気性試験方法及びコンクリートの中性化率算出方法

Also Published As

Publication number Publication date
DE602006015595D1 (de) 2010-09-02
JP2007171204A (ja) 2007-07-05
EP1801559B1 (de) 2010-07-21
JP4892333B2 (ja) 2012-03-07
US7458251B2 (en) 2008-12-02
EP1801559A3 (de) 2007-11-21
US20070148327A1 (en) 2007-06-28
EP1801559A2 (de) 2007-06-27

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