ATE480755T1 - Umwandler auf basis des coriolis-effektes - Google Patents

Umwandler auf basis des coriolis-effektes

Info

Publication number
ATE480755T1
ATE480755T1 AT00968963T AT00968963T ATE480755T1 AT E480755 T1 ATE480755 T1 AT E480755T1 AT 00968963 T AT00968963 T AT 00968963T AT 00968963 T AT00968963 T AT 00968963T AT E480755 T1 ATE480755 T1 AT E480755T1
Authority
AT
Austria
Prior art keywords
ftest
sensitive
along
vibratory
axis
Prior art date
Application number
AT00968963T
Other languages
English (en)
Inventor
John Geen
Original Assignee
Analog Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Analog Devices Inc filed Critical Analog Devices Inc
Application granted granted Critical
Publication of ATE480755T1 publication Critical patent/ATE480755T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
    • G01F1/844—Coriolis or gyroscopic mass flowmeters constructional details microfluidic or miniaturised flowmeters
    • G01F1/8445—Coriolis or gyroscopic mass flowmeters constructional details microfluidic or miniaturised flowmeters micromachined flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
    • G01C25/005—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass initial alignment, calibration or starting-up of inertial devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Fluid Mechanics (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Gyroscopes (AREA)
  • Measuring Volume Flow (AREA)
  • Amplifiers (AREA)
  • Control Of Electric Motors In General (AREA)
AT00968963T 1999-07-22 2000-07-18 Umwandler auf basis des coriolis-effektes ATE480755T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/359,477 US6516651B1 (en) 1999-07-22 1999-07-22 Coriolis effect transducer
PCT/US2000/040416 WO2001007875A1 (en) 1999-07-22 2000-07-18 Coriolis effect transducer

Publications (1)

Publication Number Publication Date
ATE480755T1 true ATE480755T1 (de) 2010-09-15

Family

ID=23413961

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00968963T ATE480755T1 (de) 1999-07-22 2000-07-18 Umwandler auf basis des coriolis-effektes

Country Status (6)

Country Link
US (2) US6516651B1 (de)
EP (1) EP1238248B1 (de)
JP (1) JP3590023B2 (de)
AT (1) ATE480755T1 (de)
DE (1) DE60044944D1 (de)
WO (1) WO2001007875A1 (de)

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US6714070B1 (en) * 2002-02-07 2004-03-30 Bei Technologies, Inc. Differential charge amplifier with built-in testing for rotation rate sensor
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US7017411B2 (en) * 2004-03-04 2006-03-28 Analog Devices, Inc. Apparatus with selected fill gas
US20050268716A1 (en) * 2004-06-08 2005-12-08 Honeywell International Inc. Built in test for mems vibratory type inertial sensors
GB0423780D0 (en) * 2004-10-26 2004-12-01 Trade & Industry Sec Dep For Lateral calibration device
EP1677073B1 (de) * 2004-12-29 2013-06-19 STMicroelectronics Srl Mems-Kreisel mit elektrisch isolierten Bereiche
JP2007232460A (ja) * 2006-02-28 2007-09-13 Aisin Seiki Co Ltd 加速度センサの状態検出装置
EP1962054B1 (de) * 2007-02-13 2011-07-20 STMicroelectronics Srl Mikroelektromechanisches Gyroskop mit Detektionsvorrichtung mit offenem Regelkreis und Verfahren zur Steuerung eines mikroelektromechanischen Gyroskops
EP1959233A1 (de) 2007-02-13 2008-08-20 STMicroelectronics S.r.l. Microelectromechanical Gyroskop mit Selbsttestfunktion und Steuerungverfahren eines microelectromechanical Gyroskops
DE102007035806B4 (de) * 2007-07-31 2011-03-17 Sensordynamics Ag Mikromechanischer Drehratensensor
JP4831241B2 (ja) * 2010-05-26 2011-12-07 株式会社村田製作所 振動ジャイロ及びそれを用いた電子装置
CN103221331B (zh) 2010-09-18 2016-02-03 快捷半导体公司 用于微机电系统的密封封装
US9455354B2 (en) 2010-09-18 2016-09-27 Fairchild Semiconductor Corporation Micromachined 3-axis accelerometer with a single proof-mass
WO2012037501A2 (en) 2010-09-18 2012-03-22 Cenk Acar Flexure bearing to reduce quadrature for resonating micromachined devices
EP2616771B8 (de) 2010-09-18 2018-12-19 Fairchild Semiconductor Corporation Mikroverarbeiteter monolithischer inertialsensor mit sechs achsen
US9278845B2 (en) 2010-09-18 2016-03-08 Fairchild Semiconductor Corporation MEMS multi-axis gyroscope Z-axis electrode structure
WO2012040211A2 (en) 2010-09-20 2012-03-29 Fairchild Semiconductor Corporation Microelectromechanical pressure sensor including reference capacitor
KR101318810B1 (ko) * 2010-09-20 2013-10-17 페어차일드 세미컨덕터 코포레이션 관성 센서 모드 튜닝 회로
US8978475B2 (en) 2012-02-01 2015-03-17 Fairchild Semiconductor Corporation MEMS proof mass with split z-axis portions
US9488693B2 (en) 2012-04-04 2016-11-08 Fairchild Semiconductor Corporation Self test of MEMS accelerometer with ASICS integrated capacitors
KR102058489B1 (ko) 2012-04-05 2019-12-23 페어차일드 세미컨덕터 코포레이션 멤스 장치 프론트 엔드 전하 증폭기
US9069006B2 (en) * 2012-04-05 2015-06-30 Fairchild Semiconductor Corporation Self test of MEMS gyroscope with ASICs integrated capacitors
EP2647955B8 (de) 2012-04-05 2018-12-19 Fairchild Semiconductor Corporation MEMS-Vorrichtung mit Quadraturphasenverschiebungsauslöschung
EP2647952B1 (de) 2012-04-05 2017-11-15 Fairchild Semiconductor Corporation Automatische Verstärkungsregelungsschleife einer MEMS-Vorrichtung für mechanischen Amplitudenantrieb
US9625272B2 (en) 2012-04-12 2017-04-18 Fairchild Semiconductor Corporation MEMS quadrature cancellation and signal demodulation
DE102013014881B4 (de) 2012-09-12 2023-05-04 Fairchild Semiconductor Corporation Verbesserte Silizium-Durchkontaktierung mit einer Füllung aus mehreren Materialien
US9797921B2 (en) 2015-09-03 2017-10-24 Nxp Usa, Inc. Compensation and calibration of multiple mass MEMS sensor
CN105949146A (zh) * 2016-05-06 2016-09-21 武汉工程大学 截短侧耳素-替唑尼特杂合药物及其制备方法
WO2022082018A1 (en) * 2020-10-17 2022-04-21 The Regents Of The University Of California Precision gyroscope mode-matching insensitive to rate input

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US5426970A (en) * 1993-08-02 1995-06-27 New Sd, Inc. Rotation rate sensor with built in test circuit
US5602344A (en) * 1994-09-01 1997-02-11 Lew; Hyok S. Inertia force flowmeter
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US5756895A (en) * 1995-09-01 1998-05-26 Hughes Aircraft Company Tunneling-based rate gyros with simple drive and sense axis coupling
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US6122961A (en) * 1997-09-02 2000-09-26 Analog Devices, Inc. Micromachined gyros
US6293157B1 (en) * 1998-01-02 2001-09-25 Graco Minnesota Inc. Compensation of coriolis meter motion induced signal
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US6378354B1 (en) * 2000-07-21 2002-04-30 Micro Motion, Inc. System for calibrating a drive signal in a coriolis flowmeter to cause the driver to vibrate a conduit in a desired mode of vibration

Also Published As

Publication number Publication date
WO2001007875A1 (en) 2001-02-01
US6510745B2 (en) 2003-01-28
JP3590023B2 (ja) 2004-11-17
EP1238248A4 (de) 2006-08-16
US6516651B1 (en) 2003-02-11
EP1238248B1 (de) 2010-09-08
EP1238248A1 (de) 2002-09-11
WO2001007875A9 (en) 2002-05-10
US20020083757A1 (en) 2002-07-04
DE60044944D1 (de) 2010-10-21
JP2003505685A (ja) 2003-02-12

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