ATE481365T1 - Verfahren zur herstellung einer vorform für optische fasern mittels dampfabscheidungsverfahren - Google Patents
Verfahren zur herstellung einer vorform für optische fasern mittels dampfabscheidungsverfahrenInfo
- Publication number
- ATE481365T1 ATE481365T1 AT08011104T AT08011104T ATE481365T1 AT E481365 T1 ATE481365 T1 AT E481365T1 AT 08011104 T AT08011104 T AT 08011104T AT 08011104 T AT08011104 T AT 08011104T AT E481365 T1 ATE481365 T1 AT E481365T1
- Authority
- AT
- Austria
- Prior art keywords
- producing
- optical fiber
- fiber preform
- steam deposition
- deposition method
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 238000000151 deposition Methods 0.000 title 1
- 239000013307 optical fiber Substances 0.000 title 1
- 238000004326 stimulated echo acquisition mode for imaging Methods 0.000 title 1
- 230000008021 deposition Effects 0.000 abstract 2
- 238000005137 deposition process Methods 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
- C03B37/01815—Reactant deposition burners or deposition heating means
- C03B37/01823—Plasma deposition burners or heating means
- C03B37/0183—Plasma deposition burners or heating means for plasma within a tube substrate
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
- C03B37/01815—Reactant deposition burners or deposition heating means
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/08—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant
- C03B2201/12—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant doped with fluorine
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
- C03B2201/31—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with germanium
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
- Surface Treatment Of Glass (AREA)
- Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
- Surface Treatment Of Glass Fibres Or Filaments (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL1034059A NL1034059C2 (nl) | 2007-06-29 | 2007-06-29 | Werkwijze voor het vervaardigen van een voorvorm voor optische vezels onder toepassing van een dampdepositieproces. |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE481365T1 true ATE481365T1 (de) | 2010-10-15 |
Family
ID=38987987
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT08011104T ATE481365T1 (de) | 2007-06-29 | 2008-06-19 | Verfahren zur herstellung einer vorform für optische fasern mittels dampfabscheidungsverfahren |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US8168267B2 (de) |
| EP (1) | EP2008978B1 (de) |
| JP (1) | JP5490379B2 (de) |
| CN (1) | CN101333067B (de) |
| AT (1) | ATE481365T1 (de) |
| BR (1) | BRPI0802237B1 (de) |
| DE (1) | DE602008002481D1 (de) |
| NL (1) | NL1034059C2 (de) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8741394B2 (en) * | 2010-03-25 | 2014-06-03 | Novellus Systems, Inc. | In-situ deposition of film stacks |
| NL2004546C2 (nl) * | 2010-04-13 | 2011-10-17 | Draka Comteq Bv | Inwendig dampdepositieproces. |
| NL2004544C2 (nl) | 2010-04-13 | 2011-10-17 | Draka Comteq Bv | Inwendig dampdepositieproces. |
| NL2006962C2 (nl) | 2011-06-17 | 2012-12-18 | Draka Comteq Bv | Inrichting en werkwijze voor het vervaardigen van een optische voorvorm. |
| NL2007831C2 (en) * | 2011-11-21 | 2013-05-23 | Draka Comteq Bv | Apparatus and method for carrying out a pcvd deposition process. |
| NL2009962C2 (en) * | 2012-12-11 | 2014-06-12 | Draka Comteq Bv | Method for activating an inner surface of a hollow glass substrate tube for the manufacturing of an optical fiber preform. |
| US9002162B2 (en) * | 2013-03-15 | 2015-04-07 | Ofs Fitel, Llc | Large core multimode optical fibers |
| NL2010724C2 (en) * | 2013-04-26 | 2014-10-29 | Draka Comteq Bv | A pcvd method for manufacturing a primary preform for optical fibers. |
| NL2011077C2 (en) | 2013-07-01 | 2015-01-05 | Draka Comteq Bv | A method for manufacturing a precursor for a primary preform for optical fibres by means of an internal plasma chemical vapour deposition (pcvd) process. |
| NL2012857B1 (en) * | 2014-05-22 | 2016-03-07 | Draka Comteq Bv | Apparatus and method for carrying out a plasma deposition process. |
| NL2015161B1 (en) * | 2015-07-13 | 2017-02-01 | Draka Comteq Bv | A method for preparing a primary preform by etching and collapsing a deposited tube. |
| NL2015162B1 (en) * | 2015-07-13 | 2017-02-01 | Draka Comteq Bv | Method for activating an inner surface of a substrate tube for the manufacturing of an optical fiber preform. |
| NL1041529B1 (en) * | 2015-10-16 | 2017-05-02 | Draka Comteq Bv | A method for etching a primary preform and the etched primary preform thus obtained. |
| DE102018132338B3 (de) * | 2018-12-14 | 2019-11-21 | Leibniz-Institut für Photonische Technologien e. V. | Partikelfreies verfahren zur signifikanten reduzierung der oberflächenrauhigkeit von rohren, kapillaren und hohlfasern aus kieselglas oder hoch kieselhaltigen gläsern und optischen gläsern sowie zur reinigung von kavitätenoberflächen von rohren, kapillaren und hohlfasen aus kieselglas oder hoch kieselglashaltigen optischen gläsern |
Family Cites Families (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL8201453A (nl) * | 1982-04-06 | 1983-11-01 | Philips Nv | Werkwijze voor de vervaardiging van optische vezels. |
| US4630890A (en) * | 1983-06-22 | 1986-12-23 | At&T Bell Laboratories | Exposed core optical fibers, and method of making same |
| FI78891C (fi) * | 1987-09-11 | 1989-10-10 | Nokia Oy Ab | Anordning foer avlaegsnande av pulverformigt material som samlas i den roerformiga bakdelen vid tillverkning av en optisk fibers aemne. |
| FI83944C (fi) | 1989-05-19 | 1991-09-25 | Rautaruukki Oy | Stoedben till en paohaengsvagn. |
| CN2284105Y (zh) * | 1996-11-08 | 1998-06-17 | 蒙里声 | 环状尖端脉冲等离子体除尘器 |
| US6105396A (en) * | 1998-07-14 | 2000-08-22 | Lucent Technologies Inc. | Method of making a large MCVD single mode fiber preform by varying internal pressure to control preform straightness |
| DE19852704A1 (de) * | 1998-11-16 | 2000-05-18 | Heraeus Quarzglas | Verfahren zur Herstellung einer Vorform für eine optische Faser und für die Durchführung des Verfahrens geeignetes Substratrohr |
| US6718800B2 (en) * | 1999-03-08 | 2004-04-13 | Fitel Usa Corp. | Method of collapsing a tube for an optical fiber preform |
| CN1277888A (zh) * | 2000-06-02 | 2000-12-27 | 黄立维 | 一种有机废气的净化方法 |
| CA2355819A1 (en) * | 2000-08-28 | 2002-02-28 | Sumitomo Electric Industries, Ltd. | Optical fiber, method of making optical fiber preform, and method of making optical fiber |
| JP3775234B2 (ja) * | 2001-03-29 | 2006-05-17 | 住友電気工業株式会社 | 光ファイバ母材の製造方法 |
| JP2003012338A (ja) * | 2001-06-29 | 2003-01-15 | Sumitomo Electric Ind Ltd | Mcvd法を用いた光ファイバ母材の製造方法 |
| WO2003052173A1 (en) * | 2001-12-14 | 2003-06-26 | Corning Incorporated | Two step etching process for an optical fiber preform |
| US7169440B2 (en) * | 2002-04-16 | 2007-01-30 | Tokyo Electron Limited | Method for removing photoresist and etch residues |
| US6988380B2 (en) * | 2002-08-15 | 2006-01-24 | Ceramoptec Industries, Inc. | Method of silica optical fiber preform production |
| AU2003228119A1 (en) * | 2002-09-03 | 2004-03-29 | Lg Cable Ltd. | Method for making optical fiber preform having ultimately low pmd through improvement of ovality |
| WO2004041737A1 (en) * | 2002-11-07 | 2004-05-21 | Ls Cable Ltd. | Method for manufacturing an optical fiber preform by mcvd |
| US20040107734A1 (en) * | 2002-12-04 | 2004-06-10 | Paresh Kenkare | Systems and methods for fabricating optical fiber preforms |
| NL1023438C2 (nl) | 2003-05-15 | 2004-11-22 | Draka Fibre Technology Bv | Werkwijze ter vervaardiging van een optische vezel, voorvorm en een optische vezel. |
| NL1025155C2 (nl) * | 2003-12-30 | 2005-07-04 | Draka Fibre Technology Bv | Inrichting voor het uitvoeren van PCVD, alsmede werkwijze voor het vervaardigen van een voorvorm. |
| JP4552599B2 (ja) * | 2004-10-29 | 2010-09-29 | 住友電気工業株式会社 | 光ファイバ母材の製造方法 |
| KR100774952B1 (ko) | 2005-04-14 | 2007-11-09 | 엘지전자 주식회사 | 플라즈마 디스플레이 장치, 플라즈마 디스플레이 패널 및그의 제조방법 |
| JP2006248824A (ja) * | 2005-03-09 | 2006-09-21 | Sumitomo Electric Ind Ltd | ガラスの製造方法及びガラスの製造装置 |
| JP2007084362A (ja) * | 2005-09-20 | 2007-04-05 | Sumitomo Electric Ind Ltd | 光ファイバー母材の製造方法 |
| ES2370869T3 (es) * | 2005-10-27 | 2011-12-23 | Sterlite Technologies Limited | Método de producción de una preforma de fibras ópticas. |
| NL1030749C2 (nl) * | 2005-12-22 | 2007-06-25 | Draka Comteq Bv | Inrichting en werkwijze voor het vervaardigen van een optische voorvorm. |
| US8020410B2 (en) * | 2007-11-15 | 2011-09-20 | Corning Incorporated | Methods for making optical fiber preforms and microstructured optical fibers |
-
2007
- 2007-06-29 NL NL1034059A patent/NL1034059C2/nl not_active IP Right Cessation
-
2008
- 2008-06-19 EP EP08011104A patent/EP2008978B1/de not_active Not-in-force
- 2008-06-19 AT AT08011104T patent/ATE481365T1/de not_active IP Right Cessation
- 2008-06-19 DE DE602008002481T patent/DE602008002481D1/de active Active
- 2008-06-25 JP JP2008165433A patent/JP5490379B2/ja not_active Expired - Fee Related
- 2008-06-27 CN CN2008101273547A patent/CN101333067B/zh active Active
- 2008-06-27 BR BRPI0802237-2A patent/BRPI0802237B1/pt not_active IP Right Cessation
- 2008-06-27 US US12/147,535 patent/US8168267B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| DE602008002481D1 (de) | 2010-10-28 |
| US8168267B2 (en) | 2012-05-01 |
| EP2008978A1 (de) | 2008-12-31 |
| EP2008978B1 (de) | 2010-09-15 |
| CN101333067A (zh) | 2008-12-31 |
| BRPI0802237A2 (pt) | 2009-02-25 |
| JP5490379B2 (ja) | 2014-05-14 |
| US20090004404A1 (en) | 2009-01-01 |
| BRPI0802237B1 (pt) | 2018-06-26 |
| JP2009013053A (ja) | 2009-01-22 |
| CN101333067B (zh) | 2013-10-23 |
| NL1034059C2 (nl) | 2008-12-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |