ATE483329T1 - Akustisches sensorelement - Google Patents

Akustisches sensorelement

Info

Publication number
ATE483329T1
ATE483329T1 AT08760771T AT08760771T ATE483329T1 AT E483329 T1 ATE483329 T1 AT E483329T1 AT 08760771 T AT08760771 T AT 08760771T AT 08760771 T AT08760771 T AT 08760771T AT E483329 T1 ATE483329 T1 AT E483329T1
Authority
AT
Austria
Prior art keywords
diaphragm
acoustic sensor
counter
sensor element
substrate
Prior art date
Application number
AT08760771T
Other languages
English (en)
Inventor
Frank Fischer
Arnim Hoechst
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Application granted granted Critical
Publication of ATE483329T1 publication Critical patent/ATE483329T1/de

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Electrophonic Musical Instruments (AREA)
AT08760771T 2007-06-28 2008-06-10 Akustisches sensorelement ATE483329T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007029911A DE102007029911A1 (de) 2007-06-28 2007-06-28 Akustisches Sensorelement
PCT/EP2008/057211 WO2009000641A1 (de) 2007-06-28 2008-06-10 Akustisches sensorelement

Publications (1)

Publication Number Publication Date
ATE483329T1 true ATE483329T1 (de) 2010-10-15

Family

ID=39684411

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08760771T ATE483329T1 (de) 2007-06-28 2008-06-10 Akustisches sensorelement

Country Status (6)

Country Link
US (1) US8089828B2 (de)
EP (1) EP2163121B1 (de)
JP (1) JP2010531592A (de)
AT (1) ATE483329T1 (de)
DE (2) DE102007029911A1 (de)
WO (1) WO2009000641A1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007029911A1 (de) * 2007-06-28 2009-01-02 Robert Bosch Gmbh Akustisches Sensorelement
DE102009026682A1 (de) 2009-06-03 2010-12-09 Robert Bosch Gmbh Bauelement mit einer mikromechanischen Mikrofonstruktur und Verfahren zu dessen Herstellung
JP4947220B2 (ja) * 2010-05-13 2012-06-06 オムロン株式会社 音響センサ及びマイクロフォン
KR20130039504A (ko) 2011-10-12 2013-04-22 한국전자통신연구원 멤스 마이크로폰 및 그 제조 방법
ITTO20130225A1 (it) 2013-03-21 2014-09-22 St Microelectronics Srl Struttura sensibile microelettromeccanica per un trasduttore acustico capacitivo includente un elemento di limitazione delle oscillazioni di una membrana, e relativo processo di fabbricazione
ITTO20130441A1 (it) * 2013-05-30 2014-12-01 St Microelectronics Srl Struttura di rilevamento per un trasduttore acustico mems con migliorata resistenza alle deformazioni
ITTO20130540A1 (it) 2013-06-28 2014-12-29 St Microelectronics Srl Dispositivo mems dotato di membrana sospesa e relativo procedimento di fabbricazione
JP6149628B2 (ja) * 2013-09-13 2017-06-21 オムロン株式会社 音響トランスデューサ及びマイクロフォン
DE102014214525B4 (de) * 2014-07-24 2019-11-14 Robert Bosch Gmbh Mikro-elektromechanisches Bauteil und Herstellungsverfahren für mikro-elektromechanische Bauteile
DE102014221037A1 (de) * 2014-10-16 2016-04-21 Robert Bosch Gmbh MEMS-Mikrofonbauelement
US9534492B2 (en) * 2014-11-11 2017-01-03 Baker Hughes Incorporated Pressure compensated capacitive micromachined ultrasound transducer for downhole applications
EP4657890A1 (de) * 2024-05-27 2025-12-03 Commissariat à l'Energie Atomique et aux Energies Alternatives Elektromechanisches system mit einem beweglichen element mit einer öffnung

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0619271Y2 (ja) * 1984-07-30 1994-05-18 株式会社オ−デイオテクニカ コンデンサマイクロホンユニツト
JP3293729B2 (ja) * 1995-10-11 2002-06-17 ホシデン株式会社 振動ピックアップ装置およびその製造方法
JP3462645B2 (ja) * 1995-10-27 2003-11-05 株式会社オーディオテクニカ コンデンサマイクロホンの成極電源回路
US6535460B2 (en) 2000-08-11 2003-03-18 Knowles Electronics, Llc Miniature broadband acoustic transducer
DE102004010295A1 (de) * 2004-03-03 2005-09-22 Robert Bosch Gmbh Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren
JP4036866B2 (ja) * 2004-07-30 2008-01-23 三洋電機株式会社 音響センサ
US7346178B2 (en) 2004-10-29 2008-03-18 Silicon Matrix Pte. Ltd. Backplateless silicon microphone
US8477983B2 (en) * 2005-08-23 2013-07-02 Analog Devices, Inc. Multi-microphone system
TW200715896A (en) * 2005-09-09 2007-04-16 Yamaha Corp Capacitor microphone
DE102007029911A1 (de) * 2007-06-28 2009-01-02 Robert Bosch Gmbh Akustisches Sensorelement

Also Published As

Publication number Publication date
WO2009000641A1 (de) 2008-12-31
US20100135123A1 (en) 2010-06-03
DE502008001455D1 (de) 2010-11-11
JP2010531592A (ja) 2010-09-24
EP2163121B1 (de) 2010-09-29
US8089828B2 (en) 2012-01-03
DE102007029911A1 (de) 2009-01-02
EP2163121A1 (de) 2010-03-17

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