ATE484736T1 - Elektronische erfassungsvorrichtung und diese vorrichtung umfassender sensor - Google Patents

Elektronische erfassungsvorrichtung und diese vorrichtung umfassender sensor

Info

Publication number
ATE484736T1
ATE484736T1 AT07301316T AT07301316T ATE484736T1 AT E484736 T1 ATE484736 T1 AT E484736T1 AT 07301316 T AT07301316 T AT 07301316T AT 07301316 T AT07301316 T AT 07301316T AT E484736 T1 ATE484736 T1 AT E484736T1
Authority
AT
Austria
Prior art keywords
microstructure
elements
sensor
electronic detection
electrically connected
Prior art date
Application number
AT07301316T
Other languages
English (en)
Inventor
Michel Vilain
Original Assignee
Ulis
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulis filed Critical Ulis
Application granted granted Critical
Publication of ATE484736T1 publication Critical patent/ATE484736T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
    • G01J5/023—Particular leg structure or construction or shape; Nanotubes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
    • G01J5/024—Special manufacturing steps or sacrificial layers or layer structures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices

Landscapes

  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Nanotechnology (AREA)
  • Chemical & Material Sciences (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Micromachines (AREA)
  • Burglar Alarm Systems (AREA)
  • Geophysics And Detection Of Objects (AREA)
  • Push-Button Switches (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Electrophonic Musical Instruments (AREA)
AT07301316T 2006-09-18 2007-08-22 Elektronische erfassungsvorrichtung und diese vorrichtung umfassender sensor ATE484736T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0653798A FR2906029B1 (fr) 2006-09-18 2006-09-18 Dispositif electronique de detection et detecteur comprenant un tel dispositif

Publications (1)

Publication Number Publication Date
ATE484736T1 true ATE484736T1 (de) 2010-10-15

Family

ID=37877069

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07301316T ATE484736T1 (de) 2006-09-18 2007-08-22 Elektronische erfassungsvorrichtung und diese vorrichtung umfassender sensor

Country Status (9)

Country Link
US (1) US7423270B2 (de)
EP (1) EP1901047B1 (de)
JP (1) JP2008111825A (de)
CN (1) CN101148242B (de)
AT (1) ATE484736T1 (de)
CA (1) CA2598596C (de)
DE (1) DE602007009770D1 (de)
FR (1) FR2906029B1 (de)
RU (1) RU2007132535A (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009222489A (ja) * 2008-03-14 2009-10-01 Oki Semiconductor Co Ltd 赤外線検出素子およびその製造方法
FR2936868B1 (fr) * 2008-10-07 2011-02-18 Ulis Detecteur thermique a micro-encapsulation.
CN101927976B (zh) * 2009-09-30 2013-09-25 浙江大立科技股份有限公司 微桥结构红外探测器以及制造方法
JP5644121B2 (ja) * 2010-01-26 2014-12-24 セイコーエプソン株式会社 熱型光検出器、熱型光検出装置、電子機器および熱型光検出器の製造方法
KR101892581B1 (ko) * 2011-10-19 2018-08-29 삼성전자주식회사 온도 감지 장치 및 방법
US9297700B2 (en) * 2012-12-03 2016-03-29 Analog Devices, Inc. Photonic sensor and a method of manufacturing such a sensor
WO2015141496A1 (ja) * 2014-03-19 2015-09-24 住友精密工業株式会社 赤外線センサ及びその製造方法
FR3048125B1 (fr) * 2016-02-24 2020-06-05 Commissariat A L'energie Atomique Et Aux Energies Alternatives Dispositif de detection de rayonnement electromagnetique a plot de connexion electrique sureleve
CN112577612B (zh) * 2020-12-09 2022-04-08 中国电子科技集团公司第四十四研究所 黑硅等离激元辅助吸收的热电堆芯片及其制作方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5288649A (en) * 1991-09-30 1994-02-22 Texas Instruments Incorporated Method for forming uncooled infrared detector
US5399897A (en) 1993-11-29 1995-03-21 Raytheon Company Microstructure and method of making such structure
FR2736654B1 (fr) 1995-07-13 1997-08-22 Commissariat Energie Atomique Procede de fabrication d'elements de microstructures flottants rigides et dispositif equipe de tels elements
US6198098B1 (en) * 1998-05-26 2001-03-06 Philips Laou Microstructure for infrared detector and method of making same
FR2861172B1 (fr) * 2003-10-15 2006-06-02 Ulis Detecteur bolometrique, dispositif de detection infrarouge mettant en oeuvre un tel detecteur bolometrique et procede de fabrication de ce detecteur
FR2883417B1 (fr) * 2005-03-16 2007-05-11 Ulis Soc Par Actions Simplifie Detecteur bolometrique, dispositif de detection infrarouge mettant en oeuvre un tel detecteur et procede de fabrication de ce detecteur

Also Published As

Publication number Publication date
DE602007009770D1 (de) 2010-11-25
FR2906029B1 (fr) 2010-09-24
CA2598596C (fr) 2015-06-23
JP2008111825A (ja) 2008-05-15
US20080067389A1 (en) 2008-03-20
US7423270B2 (en) 2008-09-09
CN101148242A (zh) 2008-03-26
EP1901047B1 (de) 2010-10-13
CA2598596A1 (fr) 2008-03-18
FR2906029A1 (fr) 2008-03-21
RU2007132535A (ru) 2009-03-10
CN101148242B (zh) 2011-08-17
EP1901047A1 (de) 2008-03-19

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Legal Events

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