ATE490480T1 - Verfahren und vorrichtung zur korrektur der von einem räumlichen lichtmodulator modulierten lichtmenge, bildaufzeichnungsvorrichtung und bildaufzeichnungsverfahren - Google Patents

Verfahren und vorrichtung zur korrektur der von einem räumlichen lichtmodulator modulierten lichtmenge, bildaufzeichnungsvorrichtung und bildaufzeichnungsverfahren

Info

Publication number
ATE490480T1
ATE490480T1 AT07115879T AT07115879T ATE490480T1 AT E490480 T1 ATE490480 T1 AT E490480T1 AT 07115879 T AT07115879 T AT 07115879T AT 07115879 T AT07115879 T AT 07115879T AT E490480 T1 ATE490480 T1 AT E490480T1
Authority
AT
Austria
Prior art keywords
amount
light
image recording
voltage
maximum
Prior art date
Application number
AT07115879T
Other languages
English (en)
Inventor
Osamu Morizono
Yoshimi Hashimoto
Original Assignee
Dainippon Screen Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Mfg filed Critical Dainippon Screen Mfg
Application granted granted Critical
Publication of ATE490480T1 publication Critical patent/ATE490480T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/435—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material
    • B41J2/465—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material using masks, e.g. light-switching masks
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1828—Diffraction gratings having means for producing variable diffraction
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70283—Mask effects on the imaging process
    • G03F7/70291—Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
    • G03F7/70516—Calibration of components of the microlithographic apparatus, e.g. light sources, addressable masks or detectors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
    • G03F7/70558—Dose control, i.e. achievement of a desired dose
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K15/00—Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers
    • G06K15/02—Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers using printers
    • G06K15/027—Test patterns and calibration
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K15/00—Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers
    • G06K15/02—Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers using printers
    • G06K15/12—Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers using printers by photographic printing, e.g. by laser printers
    • G06K15/1238—Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers using printers by photographic printing, e.g. by laser printers simultaneously exposing more than one point
    • G06K15/1242—Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers using printers by photographic printing, e.g. by laser printers simultaneously exposing more than one point on one main scanning line
    • G06K15/1252—Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers using printers by photographic printing, e.g. by laser printers simultaneously exposing more than one point on one main scanning line using an array of light modulators, e.g. a linear array

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Printers Or Recording Devices Using Electromagnetic And Radiation Means (AREA)
  • Facsimile Scanning Arrangements (AREA)
  • Liquid Crystal (AREA)
AT07115879T 2006-09-07 2007-09-07 Verfahren und vorrichtung zur korrektur der von einem räumlichen lichtmodulator modulierten lichtmenge, bildaufzeichnungsvorrichtung und bildaufzeichnungsverfahren ATE490480T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006242334 2006-09-07
JP2007090831A JP5004279B2 (ja) 2006-09-07 2007-03-30 空間光変調器における出力光量の補正方法、補正装置、画像記録装置および画像記録方法

Publications (1)

Publication Number Publication Date
ATE490480T1 true ATE490480T1 (de) 2010-12-15

Family

ID=38688432

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07115879T ATE490480T1 (de) 2006-09-07 2007-09-07 Verfahren und vorrichtung zur korrektur der von einem räumlichen lichtmodulator modulierten lichtmenge, bildaufzeichnungsvorrichtung und bildaufzeichnungsverfahren

Country Status (5)

Country Link
US (1) US7710628B2 (de)
EP (1) EP1898237B1 (de)
JP (1) JP5004279B2 (de)
AT (1) ATE490480T1 (de)
DE (1) DE602007010874D1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5438448B2 (ja) * 2009-09-24 2014-03-12 大日本スクリーン製造株式会社 空間変調光生成装置および画像記録装置
JP2014066954A (ja) * 2012-09-27 2014-04-17 Dainippon Screen Mfg Co Ltd 描画装置、および、描画方法
JP6457845B2 (ja) * 2015-03-10 2019-01-23 株式会社Ｓｃｒｅｅｎホールディングス 検査方法及び検査装置
US9910276B2 (en) 2015-06-30 2018-03-06 Microsoft Technology Licensing, Llc Diffractive optical elements with graded edges
US10670862B2 (en) 2015-07-02 2020-06-02 Microsoft Technology Licensing, Llc Diffractive optical elements with asymmetric profiles
US9864208B2 (en) 2015-07-30 2018-01-09 Microsoft Technology Licensing, Llc Diffractive optical elements with varying direction for depth modulation
US10038840B2 (en) 2015-07-30 2018-07-31 Microsoft Technology Licensing, Llc Diffractive optical element using crossed grating for pupil expansion
US10073278B2 (en) 2015-08-27 2018-09-11 Microsoft Technology Licensing, Llc Diffractive optical element using polarization rotation grating for in-coupling
US10429645B2 (en) 2015-10-07 2019-10-01 Microsoft Technology Licensing, Llc Diffractive optical element with integrated in-coupling, exit pupil expansion, and out-coupling
US10241332B2 (en) 2015-10-08 2019-03-26 Microsoft Technology Licensing, Llc Reducing stray light transmission in near eye display using resonant grating filter
US10234686B2 (en) 2015-11-16 2019-03-19 Microsoft Technology Licensing, Llc Rainbow removal in near-eye display using polarization-sensitive grating
CN107402026B (zh) * 2016-05-19 2019-11-19 长春荣德光学有限公司 一种提高正交编码器输出脉冲的方法
US10108014B2 (en) * 2017-01-10 2018-10-23 Microsoft Technology Licensing, Llc Waveguide display with multiple focal depths
CN116301131B (zh) * 2023-02-02 2026-01-30 农业农村部规划设计研究院 植物的光温调控方法、装置、设备及存储介质
JP2025028709A (ja) * 2023-08-18 2025-03-03 株式会社Ｓｃｒｅｅｎホールディングス 計測方法、使用方法、判定方法、計測装置、空間光変調器、およびプログラム

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5311360A (en) 1992-04-28 1994-05-10 The Board Of Trustees Of The Leland Stanford, Junior University Method and apparatus for modulating a light beam
WO1993022694A1 (en) 1992-04-28 1993-11-11 Leland Stanford Junior University Modulating a light beam
US6025859A (en) 1995-12-27 2000-02-15 Sharp Kabushiki Kaisha Electrostatic printer having an array of optical modulating grating valves
JP3583750B2 (ja) 2001-11-08 2004-11-04 大日本スクリーン製造株式会社 画像記録装置および出力光量補正方法
WO2004038436A1 (ja) * 2002-10-24 2004-05-06 Advantest Corporation 目標値の探索回路、目標値の探索方法及びこれを用いた半導体試験装置
US7348111B2 (en) 2003-05-14 2008-03-25 Agfa Corporation Reduction of imaging artifacts in a platesetter having a diffractive modulator
JP4553313B2 (ja) 2005-10-31 2010-09-29 大日本スクリーン製造株式会社 画像記録装置

Also Published As

Publication number Publication date
US7710628B2 (en) 2010-05-04
US20090116092A1 (en) 2009-05-07
EP1898237B1 (de) 2010-12-01
DE602007010874D1 (de) 2011-01-13
EP1898237A1 (de) 2008-03-12
JP5004279B2 (ja) 2012-08-22
JP2008090264A (ja) 2008-04-17

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