ATE494260T1 - Verfahren zur herstellung von mikrofluidischen vorrichtungen und auf diese weise hergestellte vorrichtungen - Google Patents

Verfahren zur herstellung von mikrofluidischen vorrichtungen und auf diese weise hergestellte vorrichtungen

Info

Publication number
ATE494260T1
ATE494260T1 AT06301197T AT06301197T ATE494260T1 AT E494260 T1 ATE494260 T1 AT E494260T1 AT 06301197 T AT06301197 T AT 06301197T AT 06301197 T AT06301197 T AT 06301197T AT E494260 T1 ATE494260 T1 AT E494260T1
Authority
AT
Austria
Prior art keywords
frit
devices
consolidated
substrates
hole
Prior art date
Application number
AT06301197T
Other languages
English (en)
Inventor
Tanguy Ronan
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Application granted granted Critical
Publication of ATE494260T1 publication Critical patent/ATE494260T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C3/00—Assembling of devices or systems from individually processed components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00206—Processes for functionalising a surface, e.g. provide the surface with specific mechanical, chemical or biological properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00783—Laminate assemblies, i.e. the reactor comprising a stack of plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00819—Materials of construction
    • B01J2219/00824—Ceramic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00819—Materials of construction
    • B01J2219/00831—Glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/05—Microfluidics
    • B81B2201/058—Microfluidics not provided for in B81B2201/051 - B81B2201/054
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0353—Holes

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Micromachines (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
AT06301197T 2006-11-30 2006-11-30 Verfahren zur herstellung von mikrofluidischen vorrichtungen und auf diese weise hergestellte vorrichtungen ATE494260T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP06301197A EP1927576B1 (de) 2006-11-30 2006-11-30 Verfahren zur Herstellung von mikrofluidischen Vorrichtungen und auf diese Weise hergestellte Vorrichtungen

Publications (1)

Publication Number Publication Date
ATE494260T1 true ATE494260T1 (de) 2011-01-15

Family

ID=38169684

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06301197T ATE494260T1 (de) 2006-11-30 2006-11-30 Verfahren zur herstellung von mikrofluidischen vorrichtungen und auf diese weise hergestellte vorrichtungen

Country Status (10)

Country Link
US (1) US20100068107A1 (de)
EP (2) EP1927576B1 (de)
JP (1) JP5144675B2 (de)
KR (1) KR20090096491A (de)
CN (1) CN101636345B (de)
AT (1) ATE494260T1 (de)
DE (1) DE602006019452D1 (de)
ES (1) ES2359427T3 (de)
TW (1) TW200846277A (de)
WO (1) WO2008066796A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE494260T1 (de) * 2006-11-30 2011-01-15 Corning Inc Verfahren zur herstellung von mikrofluidischen vorrichtungen und auf diese weise hergestellte vorrichtungen
EP2377607B1 (de) 2010-04-19 2018-05-30 Corning Incorporated Flüssigkeitsverbinder für mikroreaktormodule
EP2422874A1 (de) * 2010-08-31 2012-02-29 Corning Incorporated Fluidische Module mit verbesserten thermischen Eigenschaften
WO2013082347A1 (en) * 2011-11-30 2013-06-06 Corning Incorporated Fluidic module permanent stack assemblies and methods
WO2019075334A1 (en) * 2017-10-13 2019-04-18 Corning Incorporated METHODS AND APPARATUS FOR FORMING PROFILE ARTICLES, PROFILE ARTICLES, METHODS OF MAKING LIQUID LENSES, AND LIQUID LENSES
WO2019075340A1 (en) * 2017-10-13 2019-04-18 Corning Incorporated METHODS AND APPARATUS FOR FORMING PROFILE ARTICLES, PROFILE ARTICLES, METHOD FOR MANUFACTURING LIQUID LENSES, AND LIQUID LENSES
US11752500B2 (en) 2018-04-27 2023-09-12 Corning Incorporated Microfluidic devices and methods for manufacturing microfluidic devices
CN112566875A (zh) * 2018-08-06 2021-03-26 康宁股份有限公司 微流体装置和制造微流体装置的方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE470347B (sv) * 1990-05-10 1994-01-31 Pharmacia Lkb Biotech Mikrostruktur för vätskeflödessystem och förfarande för tillverkning av ett sådant system
JPH05152743A (ja) * 1991-11-28 1993-06-18 Taiyo Yuden Co Ltd スルーホール形成方法
JPH05217419A (ja) * 1992-02-06 1993-08-27 Mitsubishi Materials Corp 厚膜回路基板用銅・ガラスフリット組成物
JPH0866911A (ja) * 1994-08-29 1996-03-12 Taiyo Yuden Co Ltd セラミック積層型電子部品の製造方法
US6572830B1 (en) * 1998-10-09 2003-06-03 Motorola, Inc. Integrated multilayered microfludic devices and methods for making the same
FR2830206B1 (fr) * 2001-09-28 2004-07-23 Corning Inc Dispositif microfluidique et sa fabrication
EP1415706B1 (de) * 2002-10-29 2017-07-12 Corning Incorporated Beschichtete Mikrostruktur und deren Herstellungsverfahren
US7943393B2 (en) * 2003-07-14 2011-05-17 Phynexus, Inc. Method and device for extracting an analyte
US7204737B2 (en) * 2004-09-23 2007-04-17 Temic Automotive Of North America, Inc. Hermetically sealed microdevice with getter shield
ATE494260T1 (de) * 2006-11-30 2011-01-15 Corning Inc Verfahren zur herstellung von mikrofluidischen vorrichtungen und auf diese weise hergestellte vorrichtungen

Also Published As

Publication number Publication date
EP1927576A1 (de) 2008-06-04
KR20090096491A (ko) 2009-09-10
JP2010522641A (ja) 2010-07-08
WO2008066796A1 (en) 2008-06-05
CN101636345B (zh) 2012-01-04
TW200846277A (en) 2008-12-01
US20100068107A1 (en) 2010-03-18
EP2099708A1 (de) 2009-09-16
CN101636345A (zh) 2010-01-27
DE602006019452D1 (de) 2011-02-17
EP1927576B1 (de) 2011-01-05
JP5144675B2 (ja) 2013-02-13
ES2359427T3 (es) 2011-05-23

Similar Documents

Publication Publication Date Title
DE602008005556D1 (de) Verfahren zur Herstellung beschichteter Paneele und beschichtetes Paneel
DE602009000259D1 (de) Verfahren zur Herstellung einer Funktionsschicht
ATE548688T1 (de) Berührungsbildschirmtafel und verfahren zur herstellung davon
ATE490037T1 (de) Verfahren zur herstellung einer mikronadel oder eines mikroimplantats
ATE547812T1 (de) Verfahren zur herstellung einer emitterstruktur und daraus resultierende emitterstrukturen
ATE510795T1 (de) Verfahren zur herstellung eines elektromechanischen mems-bauteils in einem einkristallinen material
WO2009062516A3 (en) Photocatalytic boards or panels and a method of manufacturing thereof
TW200604609A (en) Method for manufacturing a master, master, method for manufacturing optical elements and optical element
DE60325555D1 (de) Optisches bauteil mit submikrometer-hohlräumen
ATE524284T1 (de) Verfahren zur herstellung eines lichtdurchlässigen mehrschicht-verbund- bauelementes für fassaden und so hergestelltes bauelement
WO2010049771A3 (de) Verbundmaterial, verfahren zum herstellen eines verbundmaterials sowie kleber oder bondmaterial
ATE541320T1 (de) Beleuchter und verfahren zur herstellung eines derartigen beleuchters
ATE537008T1 (de) Verfahren zur herstellung einer pressplatte und verfahren zur prägung einer bodenplatte
SG169394A1 (en) Method for producing partial soi structures comprising zones connecting a superficial layer and a substrate
WO2008113014A3 (en) Overhead console
WO2008110883A3 (en) Methods for manufacturing laminate, device applied herewith, laminate obtained herewith, method for encasing substrates and encased substrate obtained herewith
WO2006077136A3 (de) Elssktro-optisches element mit gesteuerter, insbesondere uniformer funktionali tätsverssilung
ATE494260T1 (de) Verfahren zur herstellung von mikrofluidischen vorrichtungen und auf diese weise hergestellte vorrichtungen
DE602005025375D1 (de) Strukturen für mikroelektronik und mikrosystem sowie herstellungsverfahren
WO2007003826A3 (fr) Procede de realisation de nanostructures
TW200632564A (en) Surface patterning and via manufacturing employing controlled precipitative growth
WO2007147811A3 (de) Verfahren zur herstellung dünner schichten eines silikons und dünnes silikon
TW200615135A (en) Carrier film for ceramic green sheet, ceramic green sheet processing method using it and manufacturing method of electronic part
WO2008043418A3 (en) Method for producing a data carrier and data carrier produced therefrom
ATE243112T1 (de) Verfahren zur herstellung von verbundglas

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties