ATE494629T1 - Halbleitergehäuse und dessen herstellungsverfahren - Google Patents

Halbleitergehäuse und dessen herstellungsverfahren

Info

Publication number
ATE494629T1
ATE494629T1 AT02717346T AT02717346T ATE494629T1 AT E494629 T1 ATE494629 T1 AT E494629T1 AT 02717346 T AT02717346 T AT 02717346T AT 02717346 T AT02717346 T AT 02717346T AT E494629 T1 ATE494629 T1 AT E494629T1
Authority
AT
Austria
Prior art keywords
manufacturing process
semiconductor housing
silicone layer
wafer
integrated circuit
Prior art date
Application number
AT02717346T
Other languages
English (en)
Inventor
Gregory Becker
Geoffrey Gardner
Brian Harkness
Louise Malenfant
Satyendra Sarmah
Original Assignee
Dow Corning
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dow Corning filed Critical Dow Corning
Application granted granted Critical
Publication of ATE494629T1 publication Critical patent/ATE494629T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/42—Stripping or agents therefor
    • G03F7/422—Stripping or agents therefor using liquids only
    • G03F7/425—Stripping or agents therefor using liquids only containing mineral alkaline compounds; containing organic basic compounds, e.g. quaternary ammonium compounds; containing heterocyclic basic compounds containing nitrogen
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0012—Processes making use of the tackiness of the photolithographic materials, e.g. for mounting; Packaging for photolithographic material; Packages obtained by processing photolithographic materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G03F7/0757—Macromolecular compounds containing Si-O, Si-C or Si-N bonds
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/111—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/131—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being only partially enclosed
    • H10W74/137—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being only partially enclosed the encapsulations being directly on the semiconductor body

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Paints Or Removers (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
AT02717346T 2001-02-20 2002-01-17 Halbleitergehäuse und dessen herstellungsverfahren ATE494629T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/789,083 US6617674B2 (en) 2001-02-20 2001-02-20 Semiconductor package and method of preparing same
PCT/US2002/001263 WO2002067292A2 (en) 2001-02-20 2002-01-17 Semiconductor package and method of preparing same

Publications (1)

Publication Number Publication Date
ATE494629T1 true ATE494629T1 (de) 2011-01-15

Family

ID=25146536

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02717346T ATE494629T1 (de) 2001-02-20 2002-01-17 Halbleitergehäuse und dessen herstellungsverfahren

Country Status (11)

Country Link
US (1) US6617674B2 (de)
EP (1) EP1362364B1 (de)
JP (1) JP4226905B2 (de)
KR (1) KR100813821B1 (de)
CN (3) CN101581880B (de)
AT (1) ATE494629T1 (de)
AU (1) AU2002248357A1 (de)
CA (1) CA2438126A1 (de)
DE (1) DE60238823D1 (de)
TW (1) TW563210B (de)
WO (2) WO2002067292A2 (de)

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Also Published As

Publication number Publication date
WO2002067292A2 (en) 2002-08-29
US20020158317A1 (en) 2002-10-31
WO2002067292A3 (en) 2002-12-19
US6617674B2 (en) 2003-09-09
JP4226905B2 (ja) 2009-02-18
KR20030080012A (ko) 2003-10-10
CN101581880B (zh) 2011-12-14
KR100813821B1 (ko) 2008-03-17
TW563210B (en) 2003-11-21
JP2004530288A (ja) 2004-09-30
DE60238823D1 (de) 2011-02-17
CA2438126A1 (en) 2002-08-29
CN101581880A (zh) 2009-11-18
AU2002248357A1 (en) 2002-09-04
EP1362364B1 (de) 2011-01-05
CN1514954A (zh) 2004-07-21
WO2005017627A1 (en) 2005-02-24
CN1820230A (zh) 2006-08-16
EP1362364A2 (de) 2003-11-19

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