ATE496729T1 - Schleifagglomeratpolierverfahren - Google Patents

Schleifagglomeratpolierverfahren

Info

Publication number
ATE496729T1
ATE496729T1 AT06787879T AT06787879T ATE496729T1 AT E496729 T1 ATE496729 T1 AT E496729T1 AT 06787879 T AT06787879 T AT 06787879T AT 06787879 T AT06787879 T AT 06787879T AT E496729 T1 ATE496729 T1 AT E496729T1
Authority
AT
Austria
Prior art keywords
abrasive
workpiece
particles
providing
agglomera
Prior art date
Application number
AT06787879T
Other languages
English (en)
Inventor
Timothy D Fletcher
Paul S Lugg
Vincent D Romero
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Application granted granted Critical
Publication of ATE496729T1 publication Critical patent/ATE496729T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/013—Application of loose grinding agent as auxiliary tool during truing operation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B24B37/245—Pads with fixed abrasives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/007—Cleaning of grinding wheels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • B24D7/06—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor with inserted abrasive blocks, e.g. segmental
    • B24D7/063—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor with inserted abrasive blocks, e.g. segmental with segments embedded in a matrix which is rubbed away during the grinding process

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Cosmetics (AREA)
  • Saccharide Compounds (AREA)
  • Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
AT06787879T 2005-07-28 2006-07-19 Schleifagglomeratpolierverfahren ATE496729T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/191,711 US7494519B2 (en) 2005-07-28 2005-07-28 Abrasive agglomerate polishing method
PCT/US2006/028061 WO2007015909A1 (en) 2005-07-28 2006-07-19 Abrasive agglomerate polishing method

Publications (1)

Publication Number Publication Date
ATE496729T1 true ATE496729T1 (de) 2011-02-15

Family

ID=37401245

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06787879T ATE496729T1 (de) 2005-07-28 2006-07-19 Schleifagglomeratpolierverfahren

Country Status (9)

Country Link
US (1) US7494519B2 (de)
EP (1) EP1910025B1 (de)
JP (1) JP5620639B2 (de)
KR (1) KR101299272B1 (de)
CN (1) CN101232969B (de)
AT (1) ATE496729T1 (de)
DE (1) DE602006019876D1 (de)
TW (1) TWI402136B (de)
WO (1) WO2007015909A1 (de)

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EP2087533A2 (de) * 2006-11-17 2009-08-12 3M Innovative Properties Company Planarisierte led mit optischem extraktor
JP4561732B2 (ja) * 2006-11-20 2010-10-13 トヨタ自動車株式会社 移動体位置測位装置
WO2008063884A1 (en) * 2006-11-20 2008-05-29 3M Innovative Properties Company Optical bonding composition for led light source
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US20100227531A1 (en) * 2008-11-17 2010-09-09 Jony Wijaya Acrylate color-stabilized phenolic bound abrasive products and methods for making same
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US20130126334A1 (en) * 2010-08-31 2013-05-23 Yoshihiro Tawara Method for producing glass substrate for magnetic disks, and method for producing magnetic disk
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WO2013181582A1 (en) * 2012-05-31 2013-12-05 Ryan Webster Diamond impregnated polishing pad with diamond pucks
JP5373171B1 (ja) * 2012-10-20 2013-12-18 株式会社ナノテム 砥石およびそれを用いた研削・研磨装置
KR102289629B1 (ko) 2013-09-25 2021-08-17 쓰리엠 이노베이티브 프로퍼티즈 컴파니 세라믹 연마 복합재 폴리싱 용액
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US10315289B2 (en) 2013-12-09 2019-06-11 3M Innovative Properties Company Conglomerate abrasive particles, abrasive articles including the same, and methods of making the same
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US9149904B1 (en) 2014-06-13 2015-10-06 Seagate Technology Llc Platen for wafer polishing having diamond-ceramic composites
RU2017103686A (ru) * 2014-08-01 2018-09-04 3М Инновейтив Пропертиз Компани Растворы для полировки и способы их применения
US10086500B2 (en) * 2014-12-18 2018-10-02 Applied Materials, Inc. Method of manufacturing a UV curable CMP polishing pad
CN105140155B (zh) * 2015-07-15 2018-06-05 桂林电子科技大学 一种用于GaAs MMIC减薄工艺的粘片方法
EP3192844B1 (de) * 2016-01-12 2021-02-24 Eoswiss Engineering Sarl Verfahren und vorrichtung zum chemisch-mechanischen polieren
CN108495906B (zh) 2016-01-25 2020-11-10 嘉柏微电子材料股份公司 含阳离子型聚合物添加剂的抛光组合物
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GB201616955D0 (en) * 2016-10-06 2016-11-23 University Of Newcastle Upon Tyne Micro-milling
EP3864104A1 (de) * 2018-10-11 2021-08-18 3M Innovative Properties Company Geträgerte schleifpartikel, schleifartikel und verfahren zur herstellung davon
JP7435436B2 (ja) * 2020-12-24 2024-02-21 株式会社Sumco キャリアプレートの研磨方法
CN113549424B (zh) * 2021-08-04 2022-05-13 白鸽磨料磨具有限公司 一种抛光用氧化铈团簇粉及其制备方法
US20250282021A1 (en) * 2024-03-07 2025-09-11 Wolfspeed, Inc. Disc Grinding for Semiconductor Wafers on Polishing System

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Also Published As

Publication number Publication date
KR101299272B1 (ko) 2013-08-23
KR20080030057A (ko) 2008-04-03
TWI402136B (zh) 2013-07-21
DE602006019876D1 (de) 2011-03-10
EP1910025B1 (de) 2011-01-26
EP1910025A1 (de) 2008-04-16
JP5620639B2 (ja) 2014-11-05
US7494519B2 (en) 2009-02-24
US20070026770A1 (en) 2007-02-01
CN101232969A (zh) 2008-07-30
CN101232969B (zh) 2011-05-11
JP2009502532A (ja) 2009-01-29
TW200720020A (en) 2007-06-01
WO2007015909A1 (en) 2007-02-08

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