ATE499710T1 - Elektrode für einen piezoelektrischen aktor - Google Patents

Elektrode für einen piezoelektrischen aktor

Info

Publication number
ATE499710T1
ATE499710T1 AT07252923T AT07252923T ATE499710T1 AT E499710 T1 ATE499710 T1 AT E499710T1 AT 07252923 T AT07252923 T AT 07252923T AT 07252923 T AT07252923 T AT 07252923T AT E499710 T1 ATE499710 T1 AT E499710T1
Authority
AT
Austria
Prior art keywords
electrode
piezoelectric actuator
upper layer
lower layer
layer
Prior art date
Application number
AT07252923T
Other languages
English (en)
Inventor
Charles D Oakley
Rick D Kerr
Russel H Bosch
Original Assignee
Delphi Technologies Holding
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Delphi Technologies Holding filed Critical Delphi Technologies Holding
Application granted granted Critical
Publication of ATE499710T1 publication Critical patent/ATE499710T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
    • H10N30/063—Forming interconnections, e.g. connection electrodes of multilayered piezoelectric or electrostrictive parts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/872—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Fuel-Injection Apparatus (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
AT07252923T 2006-07-31 2007-07-24 Elektrode für einen piezoelektrischen aktor ATE499710T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/496,189 US7679273B2 (en) 2006-07-31 2006-07-31 Strain tolerant metal electrode design

Publications (1)

Publication Number Publication Date
ATE499710T1 true ATE499710T1 (de) 2011-03-15

Family

ID=38616362

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07252923T ATE499710T1 (de) 2006-07-31 2007-07-24 Elektrode für einen piezoelektrischen aktor

Country Status (5)

Country Link
US (1) US7679273B2 (de)
EP (1) EP1885005B1 (de)
JP (1) JP2008034855A (de)
AT (1) ATE499710T1 (de)
DE (1) DE602007012622D1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4775372B2 (ja) * 2005-02-15 2011-09-21 株式会社村田製作所 積層型圧電素子
WO2009125553A1 (ja) * 2008-04-11 2009-10-15 株式会社村田製作所 積層型圧電アクチュエータ
DE102008062021A1 (de) * 2008-08-18 2010-03-04 Epcos Ag Piezoaktor in Vielschichtbauweise

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04340778A (ja) * 1991-01-30 1992-11-27 Nec Corp 積層圧電アクチュエータ素子
JP3087369B2 (ja) * 1991-09-09 2000-09-11 トヨタ自動車株式会社 圧電積層体
DE19648545B4 (de) 1996-11-25 2009-05-07 Ceramtec Ag Monolithischer Vielschichtaktor mit Außenelektroden
DE19930585B4 (de) 1998-08-06 2017-11-09 Epcos Ag Piezoaktor mit verbesserter elektrischer Kontaktierung und Verwendung eines derartigen Piezoaktors
DE19856185A1 (de) 1998-12-05 2000-06-15 Bosch Gmbh Robert Piezoelektrischer Antrieb
EP1061591A4 (de) 1998-12-18 2007-05-02 Denso Corp Piezoelektrischer vielschichtkörper
DE19909482A1 (de) * 1999-03-04 2000-09-07 Bosch Gmbh Robert Piezoelektrischer Aktor
DE19917728A1 (de) * 1999-04-20 2000-10-26 Bosch Gmbh Robert Piezoelektrischer Aktor
DE19928190A1 (de) * 1999-06-19 2001-01-11 Bosch Gmbh Robert Piezoaktor
DE19928189A1 (de) * 1999-06-19 2001-04-19 Bosch Gmbh Robert Piezoaktor
GB9925410D0 (en) * 1999-10-28 1999-12-29 Lucus Ind Plc Actuator arrangement
JP2002203999A (ja) 2000-11-06 2002-07-19 Denso Corp 積層型圧電体素子とその製造方法
JP4248777B2 (ja) * 2000-12-28 2009-04-02 株式会社デンソー インジェクタ用圧電体素子及びその製造方法，並びにインジェクタ
JP3964184B2 (ja) * 2000-12-28 2007-08-22 株式会社デンソー 積層型圧電アクチュエータ
US6700306B2 (en) 2001-02-27 2004-03-02 Kyocera Corporation Laminated piezo-electric device
DE10234787C1 (de) * 2002-06-07 2003-10-30 Pi Ceramic Gmbh Keramische Tec Verfahren zur Herstellung eines monolithischen Vielschichtaktors, monolithischer Vielschichtaktor aus einem piezokeramischen oder elektrostriktiven Material
DE10327902A1 (de) * 2002-07-19 2004-06-24 Ceramtec Ag Innovative Ceramic Engineering Außenelektrode an einem piezokeramischen Vielschichtaktor
DE102004002484A1 (de) * 2004-01-17 2005-08-11 Robert Bosch Gmbh Piezoaktor mit einer elektrisch leitfähigen Kontaktfahne
DE102004004737A1 (de) * 2004-01-30 2005-08-18 Robert Bosch Gmbh Piezoaktor und ein Verfahren zu dessen Herstellung
US7385337B2 (en) * 2004-06-18 2008-06-10 Tdk Corporation Multilayer piezoelectric element
JP2006303044A (ja) * 2005-04-18 2006-11-02 Denso Corp 積層型圧電体素子
JP4929875B2 (ja) * 2006-06-30 2012-05-09 株式会社デンソー 積層型圧電素子

Also Published As

Publication number Publication date
JP2008034855A (ja) 2008-02-14
EP1885005A2 (de) 2008-02-06
EP1885005B1 (de) 2011-02-23
US20080024043A1 (en) 2008-01-31
DE602007012622D1 (de) 2011-04-07
US7679273B2 (en) 2010-03-16
EP1885005A3 (de) 2009-05-20

Similar Documents

Publication Publication Date Title
TW200711221A (en) Artificial impedance structure
TW200710936A (en) MEMS devices having support structures and methods of fabricating the same
GB2453492A (en) Organic el device and manufacturing method thereof
ATE517752T1 (de) Piezoelektrischer aktuator und herstellungsverfahren dafür
DE602007003553D1 (de) Herstellungsverfahren für einen piezoelektrischen Aktor
TW200625529A (en) Contact hole structures and contact structures and fabrication methods thereof
ATE525493T1 (de) Element
DE502006005359D1 (de) Verfahren zum herstellen eines monolithischen piezoaktors mit teilstapeln, monolithischer piezoaktor mit teilstapeln und verwendung des piezoaktors
TW200744204A (en) Light emitting device and method for fabricating the same
WO2008129480A3 (en) An electronic component, and a method of manufacturing an electronic component
ATE538502T1 (de) Mehrschichtiges piezoelektrisches bauelement
TW200736619A (en) A probe array structure and a method of making a probe array structure
DE602006009517D1 (de) Vorrichtung auf organischer basis und herstellungsverfahren dafür
WO2009033728A3 (en) Sensor matrix with semiconductor components
TW200612586A (en) Organic light emitting diode display and manufacturing method thereof
WO2010018463A3 (en) Probe head controlling mechanism for probe card assemblies
WO2013068169A3 (de) Träger für eine elektrische schaltung mit einem integrierten energiespeicher
WO2010034431A3 (de) Organisches opto-elektrisches bauelement und ein verfahren zur herstellung eines organischen opto-elektrischen bauelements
DE602007012622D1 (de) Elektrode für einen piezoelektrischen Aktor
TW200636980A (en) Pixel structure, active matrix substrate, method of manufacturing active matrix substrate, electro-optical device, and electronic apparatus
TW200733219A (en) An apparatus and a method for electrochemical mechanical processing with fluid flow assist elements
TW200605405A (en) Light-emitting element and method of manufacturing the same, and light-emitting device using the light-emitting element
TW200703655A (en) Display substrate, method of manufacturing the same and display apparatus having the same
TW200723422A (en) Relay board provided in semiconductor device, semiconductor device, and manufacturing method of semiconductor device
TW200729252A (en) Chip type electric device and method, and display device including the same

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties