ATE499746T1 - Piezoelektrischer resonator in einer kleinen verpackung - Google Patents

Piezoelektrischer resonator in einer kleinen verpackung

Info

Publication number
ATE499746T1
ATE499746T1 AT07123177T AT07123177T ATE499746T1 AT E499746 T1 ATE499746 T1 AT E499746T1 AT 07123177 T AT07123177 T AT 07123177T AT 07123177 T AT07123177 T AT 07123177T AT E499746 T1 ATE499746 T1 AT E499746T1
Authority
AT
Austria
Prior art keywords
piezoelectric resonator
lid
case
thickness
resonator element
Prior art date
Application number
AT07123177T
Other languages
English (en)
Inventor
Piazza Silvio Dalla
Original Assignee
Eta Sa Mft Horlogere Suisse
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eta Sa Mft Horlogere Suisse filed Critical Eta Sa Mft Horlogere Suisse
Application granted granted Critical
Publication of ATE499746T1 publication Critical patent/ATE499746T1/de

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
AT07123177T 2007-12-13 2007-12-13 Piezoelektrischer resonator in einer kleinen verpackung ATE499746T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP07123177A EP2071721B1 (de) 2007-12-13 2007-12-13 Piezoelektrischer Resonator in einer kleinen Verpackung

Publications (1)

Publication Number Publication Date
ATE499746T1 true ATE499746T1 (de) 2011-03-15

Family

ID=39387276

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07123177T ATE499746T1 (de) 2007-12-13 2007-12-13 Piezoelektrischer resonator in einer kleinen verpackung

Country Status (6)

Country Link
EP (1) EP2071721B1 (de)
JP (2) JP5236445B2 (de)
CN (2) CN102723926B (de)
AT (1) ATE499746T1 (de)
DE (1) DE602007012732D1 (de)
TW (2) TWI395401B (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8558435B2 (en) * 2008-03-18 2013-10-15 Citizen Holdings Co., Ltd. Package structure of a piezoelectric device mounting and supporting a piezoelectric vibration element
JP5479931B2 (ja) * 2010-02-03 2014-04-23 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動子、発振器、電子機器および電波時計
US8283988B2 (en) * 2010-02-25 2012-10-09 Seiko Epson Corporation Resonator element, resonator, oscillator, and electronic device
US8933614B2 (en) * 2012-01-09 2015-01-13 Micro Crystal Ag Small-sized piezoelectric tuning-fork resonator
JP6155617B2 (ja) * 2012-12-13 2017-07-05 セイコーエプソン株式会社 電子デバイス、電子機器および移動体
JP6155897B2 (ja) 2013-06-24 2017-07-05 セイコーエプソン株式会社 振動片、振動子、電子デバイス、電子機器及び移動体
US9577060B2 (en) * 2013-06-29 2017-02-21 Intel Corporation Piezoresistive resonator with multi-gate transistor
JP6375622B2 (ja) 2013-12-27 2018-08-22 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器、センサーおよび移動体
US10812046B2 (en) * 2018-02-07 2020-10-20 Murata Manufacturing Co., Ltd. Micromechanical resonator having reduced size

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4998219A (de) * 1973-01-22 1974-09-17
JPS5085170U (de) * 1973-12-10 1975-07-21
JP3336921B2 (ja) * 1997-08-04 2002-10-21 株式会社村田製作所 圧電共振部品
JP4547788B2 (ja) * 2000-03-15 2010-09-22 セイコーエプソン株式会社 圧電振動子のパッケージ構造
JP2002141770A (ja) * 2000-11-01 2002-05-17 Citizen Watch Co Ltd 小型振動子
JP2002171150A (ja) * 2000-11-30 2002-06-14 Seiko Epson Corp 圧電デバイスのパッケージ構造
TW567664B (en) * 2001-10-09 2003-12-21 Ebauchesfabrik Eta Ag Piezoelectric resonator and assembly comprising the same enclosed in a case
JP3995918B2 (ja) * 2001-10-29 2007-10-24 セイコーインスツル株式会社 表面実装型圧電振動子
TW512551B (en) * 2001-11-23 2002-12-01 Ind Tech Res Inst A structure of tuning fork resonator and a driving method thereof
JP3951058B2 (ja) * 2003-08-19 2007-08-01 セイコーエプソン株式会社 音叉型圧電振動片
JP3797355B2 (ja) * 2003-10-22 2006-07-19 セイコーエプソン株式会社 圧電振動子の製造方法
EP1536559A1 (de) * 2003-11-25 2005-06-01 ETA SA Manufacture Horlogère Suisse Elektronisches Bauelement mit einem Resonatorelement in einem hermetisch geschlossenem Gehäuse
DE602004027033D1 (de) * 2004-09-03 2010-06-17 Eta Sa Mft Horlogere Suisse Quartzresonator mit sehr kleinen Abmessungen
DE602005012488D1 (de) * 2005-06-09 2009-03-12 Eta Sa Mft Horlogere Suisse Kompakter piezoelektrischer Resonator
US7084556B1 (en) 2005-06-09 2006-08-01 Eta Sa Manufacture Horlogere Suisse Small-sized piezoelectric resonator
ATE390758T1 (de) * 2005-06-09 2008-04-15 Eta Sa Mft Horlogere Suisse Piezoelektrischer resonator und anordnung mit dem in ein gehäuse eingeschlossenen resonator
JP2007258917A (ja) * 2006-03-22 2007-10-04 Epson Toyocom Corp 圧電デバイス

Also Published As

Publication number Publication date
TWI395401B (zh) 2013-05-01
TWI488434B (zh) 2015-06-11
JP5279924B2 (ja) 2013-09-04
EP2071721B1 (de) 2011-02-23
CN102723926B (zh) 2015-12-16
TW200947858A (en) 2009-11-16
CN101488734B (zh) 2014-07-02
TW201242243A (en) 2012-10-16
CN102723926A (zh) 2012-10-10
EP2071721A1 (de) 2009-06-17
JP2012135021A (ja) 2012-07-12
JP2009147935A (ja) 2009-07-02
JP5236445B2 (ja) 2013-07-17
DE602007012732D1 (de) 2011-04-07
CN101488734A (zh) 2009-07-22

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Legal Events

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