ATE502319T1 - Ebener optischer scanner und seine halterung - Google Patents

Ebener optischer scanner und seine halterung

Info

Publication number
ATE502319T1
ATE502319T1 AT00905374T AT00905374T ATE502319T1 AT E502319 T1 ATE502319 T1 AT E502319T1 AT 00905374 T AT00905374 T AT 00905374T AT 00905374 T AT00905374 T AT 00905374T AT E502319 T1 ATE502319 T1 AT E502319T1
Authority
AT
Austria
Prior art keywords
optical scanning
scanning apparatus
mount
movable plate
conductive patterns
Prior art date
Application number
AT00905374T
Other languages
English (en)
Inventor
Norihiro Asada
Original Assignee
Nippon Signal Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Signal Co Ltd filed Critical Nippon Signal Co Ltd
Application granted granted Critical
Publication of ATE502319T1 publication Critical patent/ATE502319T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Theoretical Computer Science (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Facsimile Scanning Arrangements (AREA)
  • Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
AT00905374T 1999-02-26 2000-02-25 Ebener optischer scanner und seine halterung ATE502319T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP05180599A JP4111619B2 (ja) 1999-02-26 1999-02-26 プレーナ型光走査装置の実装構造
PCT/JP2000/001132 WO2000050950A1 (fr) 1999-02-26 2000-02-25 Dispositif de balayage optique de type planar et sa structure de montage

Publications (1)

Publication Number Publication Date
ATE502319T1 true ATE502319T1 (de) 2011-04-15

Family

ID=12897147

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00905374T ATE502319T1 (de) 1999-02-26 2000-02-25 Ebener optischer scanner und seine halterung

Country Status (7)

Country Link
US (1) US6456413B1 (de)
EP (1) EP1087248B8 (de)
JP (1) JP4111619B2 (de)
KR (1) KR100712297B1 (de)
AT (1) ATE502319T1 (de)
DE (1) DE60045730D1 (de)
WO (1) WO2000050950A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4674017B2 (ja) * 2000-11-20 2011-04-20 オリンパス株式会社 光偏向器
JP4544734B2 (ja) * 2000-12-21 2010-09-15 シチズンファインテックミヨタ株式会社 プレーナー型ガルバノミラー
JP4641378B2 (ja) * 2004-02-16 2011-03-02 キヤノン株式会社 光走査装置及びそれを有する画像表示装置
JP2005292381A (ja) 2004-03-31 2005-10-20 Canon Inc 光偏向器
JP4969136B2 (ja) * 2006-04-13 2012-07-04 日本信号株式会社 アクチュエータ製造方法
US7420449B2 (en) 2006-08-18 2008-09-02 Oc Oerlikon Balzers Ag Mirror actuating device for projection systems
DE102006038787A1 (de) * 2006-08-18 2008-02-21 Oc Oerlikon Balzers Ag Spiegelantrieb für Projektionssysteme
JP2009014762A (ja) * 2007-06-29 2009-01-22 Olympus Corp マイクロミラーデバイス
JP5252872B2 (ja) * 2007-09-28 2013-07-31 日本信号株式会社 プレーナ型電磁アクチュエータ
JP2009154264A (ja) * 2007-12-27 2009-07-16 Stanley Electric Co Ltd Ｍｅｍｓモジュール
JPWO2015092907A1 (ja) * 2013-12-19 2017-03-16 パイオニア株式会社 駆動装置
JP2016006445A (ja) * 2014-06-20 2016-01-14 船井電機株式会社 振動ミラーパッケージおよびプロジェクタ
JP6524722B2 (ja) * 2015-03-06 2019-06-05 株式会社リコー 光走査装置、光走査装置における基板の固定方法、画像表示装置、車両
JP7015653B2 (ja) * 2017-08-10 2022-02-03 浜松ホトニクス株式会社 光モジュール、及び、光モジュールの製造方法
US11394284B2 (en) * 2017-12-01 2022-07-19 Hamamatsu Photonics K.K. Actuator device

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4421381A (en) 1980-04-04 1983-12-20 Yokogawa Hokushin Electric Corp. Mechanical vibrating element
JPS60107017A (ja) 1983-11-16 1985-06-12 Hitachi Ltd 光偏向素子
JP2924200B2 (ja) 1990-01-18 1999-07-26 富士電機株式会社 ねじり振動子およびその応用素子
JPH04100358A (ja) * 1990-08-17 1992-04-02 Matsushita Electric Ind Co Ltd セル転送回路
DE4100358A1 (de) * 1991-01-05 1992-07-09 Robotron Bueromasch Ag Schwingspiegelanordnung
US5629790A (en) * 1993-10-18 1997-05-13 Neukermans; Armand P. Micromachined torsional scanner
JP2722314B2 (ja) 1993-12-20 1998-03-04 日本信号株式会社 プレーナー型ガルバノミラー及びその製造方法
JP2657769B2 (ja) 1994-01-31 1997-09-24 正喜 江刺 変位検出機能を備えたプレーナー型ガルバノミラー及びその製造方法
KR100343219B1 (ko) 1995-02-25 2002-11-23 삼성전기주식회사 거울구동장치
JP2987750B2 (ja) * 1995-05-26 1999-12-06 日本信号株式会社 プレーナ型電磁アクチュエータ
JP4414498B2 (ja) 1997-12-09 2010-02-10 オリンパス株式会社 光偏向器
DE29801643U1 (de) * 1998-01-31 1998-06-04 CMS Mikrosysteme GmbH Chemnitz, 09125 Chemnitz Mikromechanische und elektromagnetisch betriebene Spiegelanordnungen

Also Published As

Publication number Publication date
JP4111619B2 (ja) 2008-07-02
EP1087248A4 (de) 2006-06-21
KR100712297B1 (ko) 2007-05-02
EP1087248B1 (de) 2011-03-16
US6456413B1 (en) 2002-09-24
EP1087248A1 (de) 2001-03-28
KR20010034830A (ko) 2001-04-25
EP1087248B8 (de) 2011-10-05
JP2000249964A (ja) 2000-09-14
WO2000050950A1 (fr) 2000-08-31
DE60045730D1 (de) 2011-04-28

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Legal Events

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RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties