ATE502783T1 - Herstellungsverfahren für einen einspritzkopf und einspritzkopf - Google Patents

Herstellungsverfahren für einen einspritzkopf und einspritzkopf

Info

Publication number
ATE502783T1
ATE502783T1 AT07254005T AT07254005T ATE502783T1 AT E502783 T1 ATE502783 T1 AT E502783T1 AT 07254005 T AT07254005 T AT 07254005T AT 07254005 T AT07254005 T AT 07254005T AT E502783 T1 ATE502783 T1 AT E502783T1
Authority
AT
Austria
Prior art keywords
injection head
channels
mask layer
organic film
production method
Prior art date
Application number
AT07254005T
Other languages
English (en)
Inventor
Hideo Watanabe
Original Assignee
Konica Minolta Ij Technologies
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Konica Minolta Ij Technologies filed Critical Konica Minolta Ij Technologies
Application granted granted Critical
Publication of ATE502783T1 publication Critical patent/ATE502783T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14209—Structure of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1609—Production of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/07—Embodiments of or processes related to ink-jet heads dealing with air bubbles

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Fuel-Injection Apparatus (AREA)
  • Injection Moulding Of Plastics Or The Like (AREA)
AT07254005T 2006-10-13 2007-10-09 Herstellungsverfahren für einen einspritzkopf und einspritzkopf ATE502783T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006280646A JP4905046B2 (ja) 2006-10-13 2006-10-13 インクジェットヘッドの製造方法及びインクジェットヘッド

Publications (1)

Publication Number Publication Date
ATE502783T1 true ATE502783T1 (de) 2011-04-15

Family

ID=38740523

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07254005T ATE502783T1 (de) 2006-10-13 2007-10-09 Herstellungsverfahren für einen einspritzkopf und einspritzkopf

Country Status (5)

Country Link
US (1) US8118411B2 (de)
EP (1) EP1911592B1 (de)
JP (1) JP4905046B2 (de)
AT (1) ATE502783T1 (de)
DE (1) DE602007013337D1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4983582B2 (ja) * 2007-12-11 2012-07-25 コニカミノルタＩｊ株式会社 インクジェットヘッド及びインクジェットヘッドの製造方法
JP4940448B2 (ja) * 2008-03-27 2012-05-30 コニカミノルタＩｊ株式会社 インクジェットヘッド
JP5679010B2 (ja) * 2013-05-07 2015-03-04 Tdk株式会社 圧電素子およびその製造方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3697829B2 (ja) * 1997-04-09 2005-09-21 ブラザー工業株式会社 インクジェットヘッドの製造方法
JP2001088309A (ja) * 1999-09-24 2001-04-03 Brother Ind Ltd インクジェットヘッドの製造方法
JP3743883B2 (ja) * 2000-11-28 2006-02-08 カシオ計算機株式会社 インクジェットプリンタヘッドの形成方法
TW589253B (en) 2002-02-01 2004-06-01 Nanodynamics Inc Method for producing nozzle plate of ink-jet print head by photolithography
JP2003326710A (ja) * 2002-05-14 2003-11-19 Sharp Corp 保護膜形成方法およびこれを用いたインクジェットヘッド
JP4207504B2 (ja) 2002-08-30 2009-01-14 コニカミノルタホールディングス株式会社 インクジェットヘッド
JP2004268315A (ja) * 2003-03-06 2004-09-30 Konica Minolta Holdings Inc インクジェットヘッド
JP4622359B2 (ja) 2004-07-22 2011-02-02 コニカミノルタホールディングス株式会社 インクジェットヘッドの製造方法

Also Published As

Publication number Publication date
US20080088679A1 (en) 2008-04-17
JP4905046B2 (ja) 2012-03-28
EP1911592A1 (de) 2008-04-16
DE602007013337D1 (de) 2011-05-05
JP2008094037A (ja) 2008-04-24
EP1911592B1 (de) 2011-03-23
US8118411B2 (en) 2012-02-21

Similar Documents

Publication Publication Date Title
ATE430033T1 (de) Herstellungsverfahren für einen einspritzkopf und einspritzkopf
WO2008155986A1 (ja) 液体吐出ヘッド用ノズルプレートの製造方法、液体吐出ヘッド用ノズルプレート及び液体吐出ヘッド
ATE407096T1 (de) Verfahren zur herstellung eines mikrofluidischen bauteiles
ATE528139T1 (de) VERFAHREN ZUR HERSTELLUNG EINES SUBSTRATS FÜR EINEN FLÜSSIGKEITSAUSSTOßKOPF
GB2467711A (en) Organic thin film transistors, active matrix organic optical devices and methods of making the same
ATE529901T1 (de) Piezoelektrischer dünnfilm, verfahren zur herstellung eines piezoelektrischen dünnfilms, piezoelektrisches element und inkjet- aufzeichnungskopf
DE602005023063D1 (de) Tintenstrahldruckkopfherstellungsverfahren
ATE429335T1 (de) Verfahren und vorrichtung zur erzeugung von tintentropfen mit variablen tropfenvolumen
ATE531507T1 (de) Optische formungsvorrichtung und optisches formungsverfahren
WO2008139949A1 (ja) インクジェットヘッドおよびその製造方法
ATE502783T1 (de) Herstellungsverfahren für einen einspritzkopf und einspritzkopf
JP2008114589A5 (de)
EP1818995A3 (de) Herstellungsverfahren für einen piezoelektrischen Aktuator eines Tintenstrahlkopfes
DE60316486D1 (de) Verfahren zur Herstellung eines Tintenstrahldruckkopfs
DE602007004770D1 (de) Verfahren zur Herstellung einer Siliciumdüsenplatte und Verfahren zur Herstellung eines Tintenstrahlkopfs
JP2009166410A5 (de)
JP2005210083A5 (de)
WO2008015576A3 (en) Enhancement of inkjet-printed elements using photolithographic techniques
TW200618872A (en) Inkjet alignment layer printing apparatus and printing method
JP2007001270A5 (de)
ATE517750T1 (de) Tintenstrahlaufzeichnungsvorrichtung
FR2937463B1 (fr) Procede de fabrication de composants empiles et auto-alignes sur un substrat
EP1887631A4 (de) Halbleiterbauelement und verfahren zu seiner herstellung
DE602006017947D1 (de) Verfahren zur Herstellung einer Düsenplatte und Verfahren zur Herstellung eines Flüssigkeitstropfenstrahlgeräts
JP5183758B2 (ja) インクジェットプリンタヘッド製造方法

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties