ATE50602T1 - Verfahren zum regenerieren eines permanganataetzbades. - Google Patents
Verfahren zum regenerieren eines permanganataetzbades.Info
- Publication number
- ATE50602T1 ATE50602T1 AT86302335T AT86302335T ATE50602T1 AT E50602 T1 ATE50602 T1 AT E50602T1 AT 86302335 T AT86302335 T AT 86302335T AT 86302335 T AT86302335 T AT 86302335T AT E50602 T1 ATE50602 T1 AT E50602T1
- Authority
- AT
- Austria
- Prior art keywords
- regenerating
- permanganate
- permanganate bath
- bath
- composition
- Prior art date
Links
- 230000001172 regenerating effect Effects 0.000 title abstract 2
- 239000000203 mixture Substances 0.000 abstract 3
- XTEGARKTQYYJKE-UHFFFAOYSA-M Chlorate Chemical compound [O-]Cl(=O)=O XTEGARKTQYYJKE-UHFFFAOYSA-M 0.000 abstract 2
- WQYVRQLZKVEZGA-UHFFFAOYSA-N hypochlorite Chemical compound Cl[O-] WQYVRQLZKVEZGA-UHFFFAOYSA-N 0.000 abstract 2
- SXDBWCPKPHAZSM-UHFFFAOYSA-M bromate Inorganic materials [O-]Br(=O)=O SXDBWCPKPHAZSM-UHFFFAOYSA-M 0.000 abstract 1
- SXDBWCPKPHAZSM-UHFFFAOYSA-N bromic acid Chemical compound OBr(=O)=O SXDBWCPKPHAZSM-UHFFFAOYSA-N 0.000 abstract 1
- 229910001919 chlorite Inorganic materials 0.000 abstract 1
- 229910052619 chlorite group Inorganic materials 0.000 abstract 1
- QBWCMBCROVPCKQ-UHFFFAOYSA-N chlorous acid Chemical compound OCl=O QBWCMBCROVPCKQ-UHFFFAOYSA-N 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 abstract 1
- 239000007800 oxidant agent Substances 0.000 abstract 1
- JRKICGRDRMAZLK-UHFFFAOYSA-L peroxydisulfate Chemical compound [O-]S(=O)(=O)OOS([O-])(=O)=O JRKICGRDRMAZLK-UHFFFAOYSA-L 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K13/00—Etching, surface-brightening or pickling compositions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1617—Purification and regeneration of coating baths
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
- C23C18/22—Roughening, e.g. by etching
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/46—Regeneration of etching compositions
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0055—After-treatment, e.g. cleaning or desmearing of holes
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- ing And Chemical Polishing (AREA)
- Weting (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Processing Of Solid Wastes (AREA)
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
- Catalysts (AREA)
- Treatment Of Water By Oxidation Or Reduction (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Saccharide Compounds (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US74012985A | 1985-05-31 | 1985-05-31 | |
| EP86302335A EP0204399B1 (de) | 1985-05-31 | 1986-03-27 | Verfahren zum Regenerieren eines Permanganatätzbades |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE50602T1 true ATE50602T1 (de) | 1990-03-15 |
Family
ID=24975163
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT86302335T ATE50602T1 (de) | 1985-05-31 | 1986-03-27 | Verfahren zum regenerieren eines permanganataetzbades. |
Country Status (14)
| Country | Link |
|---|---|
| EP (1) | EP0204399B1 (de) |
| JP (1) | JPS61279688A (de) |
| KR (1) | KR900001826B1 (de) |
| AT (1) | ATE50602T1 (de) |
| AU (1) | AU576072B2 (de) |
| BR (1) | BR8602232A (de) |
| CA (1) | CA1245137A (de) |
| DE (2) | DE204399T1 (de) |
| DK (1) | DK255486A (de) |
| ES (1) | ES8707312A1 (de) |
| IL (1) | IL78266A (de) |
| NO (1) | NO861300L (de) |
| NZ (1) | NZ215546A (de) |
| ZA (1) | ZA862435B (de) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3716013C2 (de) * | 1987-05-11 | 1993-11-18 | Schering Ag | Verfahren zur Regenerierung von Permanganat-Ätzlösungen |
| US4853095A (en) * | 1988-03-09 | 1989-08-01 | Macdermid, Incorporated | Conversion of manganese dioxide to permanganate |
| JPH01273231A (ja) * | 1988-04-25 | 1989-11-01 | Canon Inc | 情報記録再生用駆動装置 |
| DE10025551C2 (de) | 2000-05-19 | 2002-04-18 | Atotech Deutschland Gmbh | Kathode für die elektrochemische Regenerierung von Permanganat-Ätzlösungen, Verfahren zu deren Herstellung sowie elektrochemische Regeneriervorrichtung |
| KR100777441B1 (ko) * | 2006-12-27 | 2007-11-28 | 이강복 | 과망간산 재생기 |
| KR101266291B1 (ko) | 2008-12-30 | 2013-05-22 | 제일모직주식회사 | 레지스트 하층막용 조성물 및 이를 이용한 반도체 집적회로디바이스의 제조방법 |
| DE102011111294B4 (de) * | 2011-08-26 | 2018-12-20 | Atotech Deutschland Gmbh | Verfahren zur Behandlung von Kunststoffsubstraten und Vorrichtung zur Regeneration einer Behandlungslösung |
| CN110438506A (zh) * | 2019-07-08 | 2019-11-12 | 深圳市裕展精密科技有限公司 | 退镀液的再生制备方法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4592852A (en) * | 1984-06-07 | 1986-06-03 | Enthone, Incorporated | Composition and process for treating plastics with alkaline permanganate solutions |
| US4629636A (en) * | 1984-06-07 | 1986-12-16 | Enthone, Incorporated | Process for treating plastics with alkaline permanganate solutions |
-
1986
- 1986-03-20 NZ NZ215546A patent/NZ215546A/xx unknown
- 1986-03-21 CA CA000504750A patent/CA1245137A/en not_active Expired
- 1986-03-25 IL IL78266A patent/IL78266A/xx unknown
- 1986-03-26 AU AU55271/86A patent/AU576072B2/en not_active Ceased
- 1986-03-27 AT AT86302335T patent/ATE50602T1/de not_active IP Right Cessation
- 1986-03-27 DE DE198686302335T patent/DE204399T1/de active Pending
- 1986-03-27 DE DE8686302335T patent/DE3669179D1/de not_active Expired - Lifetime
- 1986-03-27 EP EP86302335A patent/EP0204399B1/de not_active Expired - Lifetime
- 1986-04-02 NO NO861300A patent/NO861300L/no unknown
- 1986-04-02 ZA ZA862435A patent/ZA862435B/xx unknown
- 1986-05-16 BR BR8602232A patent/BR8602232A/pt unknown
- 1986-05-20 JP JP61113846A patent/JPS61279688A/ja active Granted
- 1986-05-30 DK DK255486A patent/DK255486A/da not_active Application Discontinuation
- 1986-05-30 KR KR1019860004263A patent/KR900001826B1/ko not_active Expired
- 1986-05-30 ES ES555512A patent/ES8707312A1/es not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| EP0204399B1 (de) | 1990-02-28 |
| JPS6352116B2 (de) | 1988-10-18 |
| CA1245137A (en) | 1988-11-22 |
| EP0204399A1 (de) | 1986-12-10 |
| BR8602232A (pt) | 1987-01-13 |
| AU576072B2 (en) | 1988-08-11 |
| ZA862435B (en) | 1986-11-26 |
| AU5527186A (en) | 1987-01-15 |
| NO861300L (no) | 1986-12-01 |
| JPS61279688A (ja) | 1986-12-10 |
| IL78266A (en) | 1989-02-28 |
| DK255486A (da) | 1986-12-01 |
| ES8707312A1 (es) | 1987-07-01 |
| DE204399T1 (de) | 1988-04-07 |
| IL78266A0 (en) | 1986-07-31 |
| NZ215546A (en) | 1988-10-28 |
| DE3669179D1 (de) | 1990-04-05 |
| ES555512A0 (es) | 1987-07-01 |
| KR860009099A (ko) | 1986-12-20 |
| DK255486D0 (da) | 1986-05-30 |
| KR900001826B1 (ko) | 1990-03-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| UEP | Publication of translation of european patent specification | ||
| EEIH | Change in the person of patent owner | ||
| REN | Ceased due to non-payment of the annual fee |