ATE509890T1 - Verfahren zur herstellung von stickstofftrifluorid - Google Patents

Verfahren zur herstellung von stickstofftrifluorid

Info

Publication number: ATE509890T1
Authority: AT; Austria
Prior art keywords: nitrogen trifluoride; producing nitrogen; reaction mixture; fluorine reactant; dispersed
Prior art date: 2002-11-19

Application number

AT03026257T

Other languages

English (en)

Inventor

Robert George Syvret

Beth Ann Campion

Gregory Alan Cooper

Joan Marie Schork

Original Assignee

Air Prod & Chem

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2002-11-19

Filing date

2003-11-14

Publication date

2011-06-15

2003-11-14 Application filed by Air Prod & Chem filed Critical Air Prod & Chem

2011-06-15 Application granted granted Critical

2011-06-15 Publication of ATE509890T1 publication Critical patent/ATE509890T1/de

Links

QKCGXXHCELUCKW-UHFFFAOYSA-N n-[4-[4-(dinaphthalen-2-ylamino)phenyl]phenyl]-n-naphthalen-2-ylnaphthalen-2-amine Chemical compound C1=CC=CC2=CC(N(C=3C=CC(=CC=3)C=3C=CC(=CC=3)N(C=3C=C4C=CC=CC4=CC=3)C=3C=C4C=CC=CC4=CC=3)C3=CC4=CC=CC=C4C=C3)=CC=C21 QKCGXXHCELUCKW-UHFFFAOYSA-N 0.000 title abstract 3
238000004519 manufacturing process Methods 0.000 title abstract 2
YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 abstract 2
229910052731 fluorine Inorganic materials 0.000 abstract 2
239000011737 fluorine Substances 0.000 abstract 2
239000000376 reactant Substances 0.000 abstract 2
239000011541 reaction mixture Substances 0.000 abstract 2
QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 abstract 1
239000012530 fluid Substances 0.000 abstract 1
239000007791 liquid phase Substances 0.000 abstract 1
238000000034 method Methods 0.000 abstract 1
TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 abstract 1

Classifications

- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
- C01B21/083—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms
- C01B21/0832—Binary compounds of nitrogen with halogens
- C01B21/0835—Nitrogen trifluoride
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B7/00—Halogens; Halogen acids
- C01B7/19—Fluorine; Hydrogen fluoride
- C01B7/191—Hydrogen fluoride

Landscapes

Chemical & Material Sciences (AREA)
Organic Chemistry (AREA)
Inorganic Chemistry (AREA)
Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)

AT03026257T 2002-11-19 2003-11-14 Verfahren zur herstellung von stickstofftrifluorid ATE509890T1 (de)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US10/299,482 US20040096386A1 (en)	2002-11-19	2002-11-19	Method for nitrogen trifluoride production
US10/687,073 US6984366B2 (en)	2002-11-19	2003-10-16	Method for nitrogen trifluoride production

Publications (1)

Publication Number	Publication Date
ATE509890T1 true ATE509890T1 (de)	2011-06-15

Family

ID=32297706

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AT03026257T ATE509890T1 (de)	2002-11-19	2003-11-14	Verfahren zur herstellung von stickstofftrifluorid

Country Status (3)

Country	Link
US (2)	US20040096386A1 (de)
AT (1)	ATE509890T1 (de)
ZA (1)	ZA200308992B (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US7128885B2 (en) *	2002-12-23	2006-10-31	The Boc Group, Inc.	NF3 production reactor
US7045107B2 (en) *	2004-09-20	2006-05-16	Air Products And Chemicals, Inc.	Process for the production of nitrogen trifluoride
JP5034322B2 (ja) *	2005-07-06	2012-09-26	セントラル硝子株式会社	ハロゲン化窒素の合成方法
CN1328159C (zh) *	2005-07-27	2007-07-25	中国船舶重工集团公司第七一八研究所	用氨和氟化氢为原料制备三氟化氮的设备及工艺方法
US7413722B2 (en) *	2005-08-04	2008-08-19	Foosung Co., Ltd.	Method and apparatus for manufacturing nitrogen trifluoride
KR100975490B1 (ko) *	2005-08-26	2010-08-11	쇼와 덴코 가부시키가이샤	삼불화질소의 제조 방법 및 제조 장치
US7642150B2 (en) *	2006-11-08	2010-01-05	Varian Semiconductor Equipment Associates, Inc.	Techniques for forming shallow junctions
US8163262B1 (en)	2011-01-04	2012-04-24	Omotowa Bamidele A	Method for production of nitrogen trifluoride from trimethylsilylamines
US9528191B2 (en)	2014-02-26	2016-12-27	Air Products And Chemicals, Inc.	Electrolytic apparatus, system and method for the efficient production of nitrogen trifluoride
CN110639233B (zh) *	2019-08-20	2021-12-07	中船重工（邯郸）派瑞特种气体有限公司	一种去除三氟化氮中二氟二氮、四氟二氮的方法
CN116497373B (zh) *	2023-05-08	2025-11-04	中船(邯郸)派瑞特种气体股份有限公司	一种三氟化氮电解槽中废电解质的回收方法及装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4091081A (en) *	1977-04-19	1978-05-23	Air Products And Chemicals, Inc.	Preparation of nitrogen trifluoride
JPS6071503A (ja) *	1983-09-27	1985-04-23	Central Glass Co Ltd	Νｆ↓３の製造法
JPH01307243A (ja)	1988-06-06	1989-12-12	Fujitsu Ltd	半導体集積回路装置
JP2863574B2 (ja)	1989-11-27	1999-03-03	関東電化工業株式会社	三フッ化窒素の製造方法
US5637285A (en) *	1996-01-30	1997-06-10	Air Products And Chemicals, Inc.	Process for nitrogen trifluoride synthesis
JP3727797B2 (ja) *	1998-05-22	2005-12-14	セントラル硝子株式会社	三フッ化窒素の製造方法
CN1213943C (zh)	2000-05-12	2005-08-10	昭和电工株式会社	生产三氟化氮的方法及其应用
US6908601B2 (en) *	2002-02-08	2005-06-21	The Boc Group, Inc.	Method for the production of nitrogen trifluoride

2002
- 2002-11-19 US US10/299,482 patent/US20040096386A1/en not_active Abandoned
2003
- 2003-10-16 US US10/687,073 patent/US6984366B2/en not_active Expired - Fee Related
- 2003-11-14 AT AT03026257T patent/ATE509890T1/de not_active IP Right Cessation
- 2003-11-19 ZA ZA2003/08992A patent/ZA200308992B/en unknown

Also Published As

Publication number	Publication date
US20040096387A1 (en)	2004-05-20
ZA200308992B (en)	2005-07-27
US20040096386A1 (en)	2004-05-20
US6984366B2 (en)	2006-01-10

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Legal Events

Date	Code	Title	Description
2011-11-15	RER	Ceased as to paragraph 5 lit. 3 law introducing patent treaties