ATE282466T1 - Zersetzung von fluorhaltigen verbindungen - Google Patents

Zersetzung von fluorhaltigen verbindungen

Info

Publication number
ATE282466T1
ATE282466T1 AT02716143T AT02716143T ATE282466T1 AT E282466 T1 ATE282466 T1 AT E282466T1 AT 02716143 T AT02716143 T AT 02716143T AT 02716143 T AT02716143 T AT 02716143T AT E282466 T1 ATE282466 T1 AT E282466T1
Authority
AT
Austria
Prior art keywords
containing compounds
gaseous mixture
fluorine containing
decomposition
hydrogen fluoride
Prior art date
Application number
AT02716143T
Other languages
English (en)
Inventor
Lee Colin Draper
John David Scott
Original Assignee
Ineos Fluor Holdings Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ineos Fluor Holdings Ltd filed Critical Ineos Fluor Holdings Ltd
Application granted granted Critical
Publication of ATE282466T1 publication Critical patent/ATE282466T1/de

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34Chemical or biological purification of waste gases
    • B01D53/74General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86Catalytic processes
    • B01D53/8659Removing halogens or halogen compounds
    • B01D53/8662Organic halogen compounds
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34Chemical or biological purification of waste gases
    • B01D53/46Removing components of defined structure
    • B01D53/68Halogens or halogen compounds
    • B01D53/685Halogens or halogen compounds by treating the gases with solids
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02CCAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00Capture or disposal of greenhouse gases
    • Y02C20/30Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Biomedical Technology (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Treating Waste Gases (AREA)
  • Catalysts (AREA)
  • Exhaust Gas Treatment By Means Of Catalyst (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
AT02716143T 2001-01-24 2002-01-24 Zersetzung von fluorhaltigen verbindungen ATE282466T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0101769.8A GB0101769D0 (en) 2001-01-24 2001-01-24 Decomposition of fluorine compounds
PCT/GB2002/000264 WO2002058824A1 (en) 2001-01-24 2002-01-24 Decomposition of fluorine containing compounds

Publications (1)

Publication Number Publication Date
ATE282466T1 true ATE282466T1 (de) 2004-12-15

Family

ID=9907368

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02716143T ATE282466T1 (de) 2001-01-24 2002-01-24 Zersetzung von fluorhaltigen verbindungen

Country Status (11)

Country Link
US (1) US6921519B2 (de)
EP (1) EP1353742B1 (de)
JP (1) JP4080336B2 (de)
AT (1) ATE282466T1 (de)
AU (1) AU2002226536B2 (de)
BR (1) BR0206518A (de)
CA (1) CA2433146A1 (de)
DE (1) DE60201973T2 (de)
ES (1) ES2236498T3 (de)
GB (1) GB0101769D0 (de)
WO (1) WO2002058824A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0101769D0 (en) 2001-01-24 2001-03-07 Ineos Fluor Ltd Decomposition of fluorine compounds
US7488460B2 (en) 2004-01-05 2009-02-10 Innovative Engineering Solutions, Inc. Combined chemical agent and dynamic oxidation treatment of hazardous gas
US7534399B2 (en) 2004-03-10 2009-05-19 Innovative Engineering Solutions, Inc. Hazardous gas abatement system using electrical heater and water scrubber
JP5048208B2 (ja) * 2004-03-19 2012-10-17 株式会社荏原製作所 フッ素含有化合物を含むガスの処理方法及び装置
DE102005037576A1 (de) * 2005-08-09 2007-02-15 Linde Ag Verfahren und Vorrichtung zur Gewinnung von Krypton und/oder Xenon
CN100584435C (zh) * 2006-05-09 2010-01-27 财团法人工业技术研究院 分解硫氟化合物的装置及其方法
US8192693B2 (en) 2008-02-12 2012-06-05 Innovative Engineering Solutions, Inc. Apparatus for dynamic oxidation of process gas
US20090266745A1 (en) * 2008-04-23 2009-10-29 Kanazirev Vladislav I Method for removing hydrofluoric acid and organic fluorides from a fluid stream
US20100286463A1 (en) * 2009-05-07 2010-11-11 Ideal Fluids, Inc. Process and Apparatus for the Pyrolytic Conversion of Organic Halides to Hydrogen Halides
FR2958183B1 (fr) * 2010-04-06 2014-09-05 Inst Francais Du Petrole Procede permettant l'elimination d'halogenures d'hydrogene en phase gazeuse
US8128902B2 (en) * 2011-04-12 2012-03-06 Midwest Refrigerants, Llc Method for the synthesis of anhydrous hydrogen halide and anhydrous carbon dioxide
US8043574B1 (en) 2011-04-12 2011-10-25 Midwest Refrigerants, Llc Apparatus for the synthesis of anhydrous hydrogen halide and anhydrous carbon dioxide
US8834830B2 (en) 2012-09-07 2014-09-16 Midwest Inorganics LLC Method for the preparation of anhydrous hydrogen halides, inorganic substances and/or inorganic hydrides by using as reactants inorganic halides and reducing agents
CN108355608B (zh) * 2018-01-29 2021-01-01 浙江工业大学 一种活性氧化铝除氟剂的再生方法
CN110813366B (zh) * 2019-11-05 2020-11-10 中南大学 一种氧化铈/hzsm-5分子筛复合催化材料及其制备方法和在分解四氟化碳中的应用

Family Cites Families (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NO131825C (de) * 1972-03-22 1975-08-13 Elkem Spigerverket As
US3790143A (en) * 1972-07-31 1974-02-05 Fuller Co Removal of fluorides from gases
JPS61204025A (ja) 1985-03-06 1986-09-10 Central Glass Co Ltd Nf↓3の除害方法
JPS63200820A (ja) 1987-02-17 1988-08-19 Kikuchi:Kk 半導体製造中の排ガス処理方法
JPH067920B2 (ja) 1987-03-31 1994-02-02 株式会社リケン 排ガス浄化材及び排ガス浄化方法
US5417934A (en) 1988-06-04 1995-05-23 Boc Limited Dry exhaust gas conditioning
JPH0649086B2 (ja) * 1989-08-05 1994-06-29 三井・デュポンフロロケミカル株式会社 塩弗化アルカンの接触分解法
EP0528982B1 (de) * 1990-05-14 1996-08-28 The University of Akron Verfahren zum abbau halogenierter organischer substanzen
US5378444A (en) * 1991-12-11 1995-01-03 Japan Pionics Co., Ltd. Process for cleaning harmful gas
JP2571176B2 (ja) 1992-06-09 1997-01-16 株式会社荏原製作所 Cvd法排ガスの除害方法
US5283041A (en) * 1992-08-13 1994-02-01 Engelhard Corporation Catalytic incineration of organic compounds
US5417948A (en) 1992-11-09 1995-05-23 Japan Pionics Co., Ltd. Process for cleaning harmful gas
JP2823486B2 (ja) 1993-07-28 1998-11-11 セントラル硝子株式会社 Nf▲3▼の処理方法
JP3263264B2 (ja) 1994-02-03 2002-03-04 三井化学株式会社 排ガス処理剤およびそれを用いる排ガス処理方法
GB2295101B (en) * 1994-11-09 1998-03-25 Cjb Developments Ltd Process for the removal of halogenated organic compounds from air streams
US5759504A (en) 1994-12-28 1998-06-02 Hitachi, Ltd. Method for treating organohalogen compounds with catalyst
US5817284A (en) 1995-10-30 1998-10-06 Central Glass Company, Limited Method for decomposing halide-containing gas
US5649985A (en) * 1995-11-29 1997-07-22 Kanken Techno Co., Ltd. Apparatus for removing harmful substances of exhaust gas discharged from semiconductor manufacturing process
US6069291A (en) * 1996-06-12 2000-05-30 Guild Associates, Inc. Catalytic process for the decomposition of perfluoroalkanes
WO1997049479A1 (de) * 1996-06-26 1997-12-31 Cs-Gmbh Halbleiter- Und Solartechnologie Verfahren zur entfernung ozonabbauender und/oder klimawirksamer fluorierter verbindungen aus einem gasstrom sowie anwendung des verfahrens
JP3986597B2 (ja) 1996-10-15 2007-10-03 関東電化工業株式会社 三フッ化窒素含有ガスの処理方法及びそのための処理剤
US20010001652A1 (en) * 1997-01-14 2001-05-24 Shuichi Kanno Process for treating flourine compound-containing gas
JP3977887B2 (ja) 1997-01-14 2007-09-19 株式会社日立製作所 フッ素化合物含有ガスの処理方法
JPH10216479A (ja) 1997-01-31 1998-08-18 Mitsui Chem Inc 三弗化窒素ガスの除害方法
JPH10249188A (ja) 1997-03-11 1998-09-22 Mitsui Chem Inc 三弗化窒素ガスの除害方法及びその装置
JP3356965B2 (ja) 1997-06-20 2002-12-16 株式会社日立製作所 Sf6ガス回収・精製処理装置及び方法
DE69820926T2 (de) * 1997-06-20 2004-09-02 Hitachi, Ltd. Verfahren, Vorrichtung und Verwendung eines Katalysators zur Zersetzung fluorierter Verbindungen
JPH1147555A (ja) 1997-08-01 1999-02-23 Mitsui Chem Inc 三弗化窒素の除害方法および除害用触媒
US6106790A (en) 1997-08-18 2000-08-22 Air Products And Chemicals, Inc. Abatement of NF3 using small particle fluidized bed
JPH1190180A (ja) 1997-09-24 1999-04-06 Mitsui Chem Inc 三弗化窒素の除害方法
JPH1190179A (ja) 1997-09-24 1999-04-06 Mitsui Chem Inc 三弗化窒素の除害方法および除害装置
TW550112B (en) 1997-11-14 2003-09-01 Hitachi Ltd Method for processing perfluorocarbon, and apparatus therefor
JP3866404B2 (ja) 1998-02-06 2007-01-10 カンケンテクノ株式会社 半導体排ガスの除害装置
KR100637884B1 (ko) * 1998-08-17 2006-10-23 가부시키가이샤 에바라 세이사꾸쇼 플루오르 함유 화합물을 함유하는 배기가스의 처리방법 및장치
US6673326B1 (en) * 2000-08-07 2004-01-06 Guild Associates, Inc. Catalytic processes for the reduction of perfluorinated compounds and hydrofluorocarbons
GB0101769D0 (en) 2001-01-24 2001-03-07 Ineos Fluor Ltd Decomposition of fluorine compounds

Also Published As

Publication number Publication date
AU2002226536B2 (en) 2006-04-13
US20040076569A1 (en) 2004-04-22
DE60201973T2 (de) 2006-03-02
DE60201973D1 (de) 2004-12-23
GB0101769D0 (en) 2001-03-07
EP1353742B1 (de) 2004-11-17
US6921519B2 (en) 2005-07-26
JP2004529868A (ja) 2004-09-30
BR0206518A (pt) 2004-02-17
CA2433146A1 (en) 2002-08-01
WO2002058824A1 (en) 2002-08-01
JP4080336B2 (ja) 2008-04-23
ES2236498T3 (es) 2005-07-16
EP1353742A1 (de) 2003-10-22

Similar Documents

Publication Publication Date Title
ATE282466T1 (de) Zersetzung von fluorhaltigen verbindungen
ATE551112T1 (de) Polyamin-/alkalisalzmischungen zur entfernung von kohlendioxid aus gasströmen
PT1053209E (pt) Processo de preparacao de uma solucao aquosa de peroxido de hidrogenio directamente a partir de hidrogenio e de oxigenio e dispositivo que permite a sua realizacao
ES2092319T3 (es) Desulfuracion de gases residuales.
DE69913495D1 (de) Verfahren zur hydrofluorierung von chlorierten kohlenwasserstoffen
ATE141184T1 (de) Umwandlung von kohlenstoff oder kohlenstoffhaltigen verbindungen im plasma
MY124698A (en) Fluorine abatement using steam injection in oxidation treatment of semiconductor manufacturing effluent gases
WO2003037497A3 (en) Method of etching high aspect ratio features
ATE527233T1 (de) Verfahren zur herstellung von alkandiol
TW457115B (en) The exhaust gas treatment installation and the method for treating an exhaust gas containing one or more fluorine compound gas
ATE102848T1 (de) Verfahren zur entstickung von abgasen unter gewinnung von hno3.
HUP0003120A2 (hu) Eljárás és berendezés oxidos nanokristályok előállítására
ES2174402T3 (es) Procedimento y recinto de regeneracion de un catalizador de produccionde aromaticos o de reformacion con oxicloracion mejorada.
BR0210136B1 (pt) processo para a produção de óxido de etileno.
ATE509890T1 (de) Verfahren zur herstellung von stickstofftrifluorid
BR9807945A (pt) Processos para separação e recuperação de fluoreto de hidrogênio, e para a produção de um composto orgânico que contém flúor.
TW200523995A (en) Chamber cleaning or etching gas regeneration and recycle method
IL145623A0 (en) Method for producing high-purity solutions using gaseous hydrogen fluoride
KR970065492A (ko) 테트라플루오로메탄의 제조방법
ES2132389T3 (es) Procedimiento para la recuperacion de fluoruro de hidrogeno.
RU2002104088A (ru) Способ газификации нелетучих соединений урана
KR960013435A (ko) 염화수은을 함유하는 생성물로부터 수은금속을 얻기위한 방법
AU2002210498A1 (en) Method for the pyrolysis of mercuric chloride for the subsequent analysis of themercury
AU3718300A (en) A method for removing polymer from an acid gas treating system
PL1742719T3 (pl) Sposób usuwania rtęci z gazów odlotowych

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties