ATE510334T1 - Halbleiterlaser mit integriertem fototransistor - Google Patents

Halbleiterlaser mit integriertem fototransistor

Info

Publication number
ATE510334T1
ATE510334T1 AT08860121T AT08860121T ATE510334T1 AT E510334 T1 ATE510334 T1 AT E510334T1 AT 08860121 T AT08860121 T AT 08860121T AT 08860121 T AT08860121 T AT 08860121T AT E510334 T1 ATE510334 T1 AT E510334T1
Authority
AT
Austria
Prior art keywords
layer
semiconductor laser
laser
optical module
photodetector
Prior art date
Application number
AT08860121T
Other languages
English (en)
Inventor
Marcel Schemmann
Original Assignee
Koninkl Philips Electronics Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Electronics Nv filed Critical Koninkl Philips Electronics Nv
Application granted granted Critical
Publication of ATE510334T1 publication Critical patent/ATE510334T1/de

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/10Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/185Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only horizontal cavities, e.g. horizontal cavity surface-emitting lasers [HCSEL]
    • H01S5/187Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only horizontal cavities, e.g. horizontal cavity surface-emitting lasers [HCSEL] using Bragg reflection
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/0304Detection arrangements using opto-electronic means
    • G06F3/0317Detection arrangements using opto-electronic means in co-operation with a patterned surface, e.g. absolute position or relative movement detection for an optical mouse or pen positioned with respect to a coded surface
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/02Structural details or components not essential to laser action
    • H01S5/026Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
    • H01S5/0262Photo-diodes, e.g. transceiver devices, bidirectional devices
    • H01S5/0264Photo-diodes, e.g. transceiver devices, bidirectional devices for monitoring the laser-output
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/10Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/20Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
    • H10F30/21Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
    • H10F30/24Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only two potential barriers, e.g. bipolar phototransistors
    • H10F30/245Bipolar phototransistors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F55/00Radiation-sensitive semiconductor devices covered by groups H10F10/00, H10F19/00 or H10F30/00 being structurally associated with electric light sources and electrically or optically coupled thereto
    • H10F55/20Radiation-sensitive semiconductor devices covered by groups H10F10/00, H10F19/00 or H10F30/00 being structurally associated with electric light sources and electrically or optically coupled thereto wherein the electric light source controls the radiation-sensitive semiconductor devices, e.g. optocouplers
    • H10F55/25Radiation-sensitive semiconductor devices covered by groups H10F10/00, H10F19/00 or H10F30/00 being structurally associated with electric light sources and electrically or optically coupled thereto wherein the electric light source controls the radiation-sensitive semiconductor devices, e.g. optocouplers wherein the radiation-sensitive devices and the electric light source are all semiconductor devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • H10F71/127The active layers comprising only Group III-V materials, e.g. GaAs or InP
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/02Structural details or components not essential to laser action
    • H01S5/022Mountings; Housings
    • H01S5/0225Out-coupling of light
    • H01S5/02257Out-coupling of light using windows, e.g. specially adapted for back-reflecting light to a detector inside the housing
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/10Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
    • H01S5/18386Details of the emission surface for influencing the near- or far-field, e.g. a grating on the surface
    • H01S5/18388Lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Semiconductor Lasers (AREA)
AT08860121T 2007-12-11 2008-12-09 Halbleiterlaser mit integriertem fototransistor ATE510334T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP07122813 2007-12-11
PCT/IB2008/055159 WO2009074951A2 (en) 2007-12-11 2008-12-09 Semiconductor laser with integrated phototransistor

Publications (1)

Publication Number Publication Date
ATE510334T1 true ATE510334T1 (de) 2011-06-15

Family

ID=40755947

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08860121T ATE510334T1 (de) 2007-12-11 2008-12-09 Halbleiterlaser mit integriertem fototransistor

Country Status (7)

Country Link
US (3) US20100254423A1 (de)
EP (1) EP2218152B1 (de)
JP (1) JP5451632B2 (de)
KR (1) KR101542729B1 (de)
CN (1) CN101897089B (de)
AT (1) ATE510334T1 (de)
WO (1) WO2009074951A2 (de)

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* Cited by examiner, † Cited by third party
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WO2009074951A2 (en) * 2007-12-11 2009-06-18 Koninklijke Philips Electronics N. V. Semiconductor laser with integrated phototransistor
WO2011018734A1 (en) * 2009-08-10 2011-02-17 Koninklijke Philips Electronics N.V. Vertical cavity surface emitting laser with active carrier confinement
JP2012128393A (ja) * 2010-11-26 2012-07-05 Ricoh Co Ltd 光学センサ及び画像形成装置
RU2645805C1 (ru) * 2014-09-25 2018-02-28 Конинклейке Филипс Н.В. Лазер с вертикальным резонатором и поверхностным излучением
DE102015207289B4 (de) * 2015-04-22 2025-12-24 Robert Bosch Gmbh Partikelsensorvorrichtung
EP3493339B1 (de) * 2017-12-04 2022-11-09 ams AG Halbleiterbauelement und verfahren für flugzeit- und proximitätsmessungen
WO2019219825A1 (en) 2018-05-18 2019-11-21 Novo Nordisk A/S Drug delivery assembly with information capture
US10824275B2 (en) * 2018-09-25 2020-11-03 Apple Inc. Waveguide-based interferometric multi-point/distributed force and touch sensors
US11456577B2 (en) * 2020-07-28 2022-09-27 Raytheon Company Monolithic quantum cascade laser (QCL)/avalanche photodiode (APD) infrared transceiver

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US5283447A (en) 1992-01-21 1994-02-01 Bandgap Technology Corporation Integration of transistors with vertical cavity surface emitting lasers
US5266794A (en) * 1992-01-21 1993-11-30 Bandgap Technology Corporation Vertical-cavity surface emitting laser optical interconnect technology
US5216686A (en) * 1992-02-03 1993-06-01 Motorola, Inc. Integrated HBT and VCSEL structure and method of fabrication
JPH05267790A (ja) * 1992-03-19 1993-10-15 Matsushita Electric Ind Co Ltd 光半導体装置およびその製造方法
US5331658A (en) * 1992-08-26 1994-07-19 Motorola, Inc. Vertical cavity surface emitting laser and sensor
US5606572A (en) * 1994-03-24 1997-02-25 Vixel Corporation Integration of laser with photodiode for feedback control
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DE19839305B4 (de) * 1998-08-28 2009-01-15 Siemens Ag Reflexlichtschranke
US6222202B1 (en) * 1998-10-06 2001-04-24 Agilent Technologies, Inc. System and method for the monolithic integration of a light emitting device and a photodetector for low bias voltage operation
DE10004398A1 (de) * 2000-02-02 2001-08-16 Infineon Technologies Ag VCSEL mit monolithisch integriertem Photodetektor
ATE463004T1 (de) 2000-11-06 2010-04-15 Koninkl Philips Electronics Nv Verfahren zur messung der bewegung eines eingabegeräts
JP3853163B2 (ja) 2001-02-20 2006-12-06 松下電器産業株式会社 強誘電体メモリ装置及びその製造方法
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Also Published As

Publication number Publication date
JP2011507257A (ja) 2011-03-03
US20170331252A1 (en) 2017-11-16
US9735546B2 (en) 2017-08-15
EP2218152A2 (de) 2010-08-18
CN101897089B (zh) 2013-02-06
JP5451632B2 (ja) 2014-03-26
CN101897089A (zh) 2010-11-24
WO2009074951A2 (en) 2009-06-18
EP2218152B1 (de) 2011-05-18
WO2009074951A3 (en) 2010-02-25
US20160134084A1 (en) 2016-05-12
US20100254423A1 (en) 2010-10-07
KR101542729B1 (ko) 2015-08-07
KR20100094566A (ko) 2010-08-26
US10164407B2 (en) 2018-12-25

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