ATE510334T1 - Halbleiterlaser mit integriertem fototransistor - Google Patents
Halbleiterlaser mit integriertem fototransistorInfo
- Publication number
- ATE510334T1 ATE510334T1 AT08860121T AT08860121T ATE510334T1 AT E510334 T1 ATE510334 T1 AT E510334T1 AT 08860121 T AT08860121 T AT 08860121T AT 08860121 T AT08860121 T AT 08860121T AT E510334 T1 ATE510334 T1 AT E510334T1
- Authority
- AT
- Austria
- Prior art keywords
- layer
- semiconductor laser
- laser
- optical module
- photodetector
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/185—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only horizontal cavities, e.g. horizontal cavity surface-emitting lasers [HCSEL]
- H01S5/187—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only horizontal cavities, e.g. horizontal cavity surface-emitting lasers [HCSEL] using Bragg reflection
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/0304—Detection arrangements using opto-electronic means
- G06F3/0317—Detection arrangements using opto-electronic means in co-operation with a patterned surface, e.g. absolute position or relative movement detection for an optical mouse or pen positioned with respect to a coded surface
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
- H01S5/0262—Photo-diodes, e.g. transceiver devices, bidirectional devices
- H01S5/0264—Photo-diodes, e.g. transceiver devices, bidirectional devices for monitoring the laser-output
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
- H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
- H10F30/21—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
- H10F30/24—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only two potential barriers, e.g. bipolar phototransistors
- H10F30/245—Bipolar phototransistors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F55/00—Radiation-sensitive semiconductor devices covered by groups H10F10/00, H10F19/00 or H10F30/00 being structurally associated with electric light sources and electrically or optically coupled thereto
- H10F55/20—Radiation-sensitive semiconductor devices covered by groups H10F10/00, H10F19/00 or H10F30/00 being structurally associated with electric light sources and electrically or optically coupled thereto wherein the electric light source controls the radiation-sensitive semiconductor devices, e.g. optocouplers
- H10F55/25—Radiation-sensitive semiconductor devices covered by groups H10F10/00, H10F19/00 or H10F30/00 being structurally associated with electric light sources and electrically or optically coupled thereto wherein the electric light source controls the radiation-sensitive semiconductor devices, e.g. optocouplers wherein the radiation-sensitive devices and the electric light source are all semiconductor devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/127—The active layers comprising only Group III-V materials, e.g. GaAs or InP
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/0225—Out-coupling of light
- H01S5/02257—Out-coupling of light using windows, e.g. specially adapted for back-reflecting light to a detector inside the housing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18386—Details of the emission surface for influencing the near- or far-field, e.g. a grating on the surface
- H01S5/18388—Lenses
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- General Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Human Computer Interaction (AREA)
- Semiconductor Lasers (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP07122813 | 2007-12-11 | ||
| PCT/IB2008/055159 WO2009074951A2 (en) | 2007-12-11 | 2008-12-09 | Semiconductor laser with integrated phototransistor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE510334T1 true ATE510334T1 (de) | 2011-06-15 |
Family
ID=40755947
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT08860121T ATE510334T1 (de) | 2007-12-11 | 2008-12-09 | Halbleiterlaser mit integriertem fototransistor |
Country Status (7)
| Country | Link |
|---|---|
| US (3) | US20100254423A1 (de) |
| EP (1) | EP2218152B1 (de) |
| JP (1) | JP5451632B2 (de) |
| KR (1) | KR101542729B1 (de) |
| CN (1) | CN101897089B (de) |
| AT (1) | ATE510334T1 (de) |
| WO (1) | WO2009074951A2 (de) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009074951A2 (en) * | 2007-12-11 | 2009-06-18 | Koninklijke Philips Electronics N. V. | Semiconductor laser with integrated phototransistor |
| WO2011018734A1 (en) * | 2009-08-10 | 2011-02-17 | Koninklijke Philips Electronics N.V. | Vertical cavity surface emitting laser with active carrier confinement |
| JP2012128393A (ja) * | 2010-11-26 | 2012-07-05 | Ricoh Co Ltd | 光学センサ及び画像形成装置 |
| RU2645805C1 (ru) * | 2014-09-25 | 2018-02-28 | Конинклейке Филипс Н.В. | Лазер с вертикальным резонатором и поверхностным излучением |
| DE102015207289B4 (de) * | 2015-04-22 | 2025-12-24 | Robert Bosch Gmbh | Partikelsensorvorrichtung |
| EP3493339B1 (de) * | 2017-12-04 | 2022-11-09 | ams AG | Halbleiterbauelement und verfahren für flugzeit- und proximitätsmessungen |
| WO2019219825A1 (en) | 2018-05-18 | 2019-11-21 | Novo Nordisk A/S | Drug delivery assembly with information capture |
| US10824275B2 (en) * | 2018-09-25 | 2020-11-03 | Apple Inc. | Waveguide-based interferometric multi-point/distributed force and touch sensors |
| US11456577B2 (en) * | 2020-07-28 | 2022-09-27 | Raytheon Company | Monolithic quantum cascade laser (QCL)/avalanche photodiode (APD) infrared transceiver |
Family Cites Families (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6179268A (ja) * | 1984-09-26 | 1986-04-22 | Nec Corp | フオトトランジスタ |
| US5283447A (en) | 1992-01-21 | 1994-02-01 | Bandgap Technology Corporation | Integration of transistors with vertical cavity surface emitting lasers |
| US5266794A (en) * | 1992-01-21 | 1993-11-30 | Bandgap Technology Corporation | Vertical-cavity surface emitting laser optical interconnect technology |
| US5216686A (en) * | 1992-02-03 | 1993-06-01 | Motorola, Inc. | Integrated HBT and VCSEL structure and method of fabrication |
| JPH05267790A (ja) * | 1992-03-19 | 1993-10-15 | Matsushita Electric Ind Co Ltd | 光半導体装置およびその製造方法 |
| US5331658A (en) * | 1992-08-26 | 1994-07-19 | Motorola, Inc. | Vertical cavity surface emitting laser and sensor |
| US5606572A (en) * | 1994-03-24 | 1997-02-25 | Vixel Corporation | Integration of laser with photodiode for feedback control |
| JP4054388B2 (ja) * | 1995-07-26 | 2008-02-27 | オリンパス株式会社 | 光学式変位センサ |
| US5828088A (en) * | 1996-09-05 | 1998-10-27 | Astropower, Inc. | Semiconductor device structures incorporating "buried" mirrors and/or "buried" metal electrodes |
| US5892786A (en) * | 1997-03-26 | 1999-04-06 | The United States Of America As Represented By The Secretary Of The Air Force | Output control of vertical microcavity light emitting device |
| DE19839305B4 (de) * | 1998-08-28 | 2009-01-15 | Siemens Ag | Reflexlichtschranke |
| US6222202B1 (en) * | 1998-10-06 | 2001-04-24 | Agilent Technologies, Inc. | System and method for the monolithic integration of a light emitting device and a photodetector for low bias voltage operation |
| DE10004398A1 (de) * | 2000-02-02 | 2001-08-16 | Infineon Technologies Ag | VCSEL mit monolithisch integriertem Photodetektor |
| ATE463004T1 (de) | 2000-11-06 | 2010-04-15 | Koninkl Philips Electronics Nv | Verfahren zur messung der bewegung eines eingabegeräts |
| JP3853163B2 (ja) | 2001-02-20 | 2006-12-06 | 松下電器産業株式会社 | 強誘電体メモリ装置及びその製造方法 |
| US20030034491A1 (en) * | 2001-08-14 | 2003-02-20 | Motorola, Inc. | Structure and method for fabricating semiconductor structures and devices for detecting an object |
| AU2003253166A1 (en) * | 2002-08-29 | 2004-03-19 | Koninklijke Philips Electronics N.V. | Apparatus equipped with an optical keyboard and optical input device |
| US7339963B2 (en) * | 2002-11-27 | 2008-03-04 | International Business Machines Corporation | High speed data channel including a CMOS VCSEL driver and a high performance photodetector and CMOS photoreceiver |
| US6707207B1 (en) * | 2002-12-19 | 2004-03-16 | Hitachi Global Storage Technologies Netherlands B.V. | High bandwidth track following actuator for hard disk drives |
| KR20050019484A (ko) * | 2003-08-19 | 2005-03-03 | 삼성전자주식회사 | 광검출소자가 일체적으로 성장된 장파장 수직 면발광 레이저 |
| US7801199B2 (en) * | 2004-06-25 | 2010-09-21 | Finisar Corporation | Vertical cavity surface emitting laser with photodiode having reduced spontaneous emissions |
| US7359419B2 (en) | 2004-06-25 | 2008-04-15 | Finisar Corporation | Vertical cavity surface emitting laser optimized for thermal sensitivity |
| US7366217B2 (en) * | 2004-06-25 | 2008-04-29 | Finisar Corporation | Optimizing mirror reflectivity for reducing spontaneous emissions in photodiodes |
| US7294868B2 (en) * | 2004-06-25 | 2007-11-13 | Finisar Corporation | Super lattice tunnel junctions |
| US7403553B2 (en) | 2004-06-25 | 2008-07-22 | Finisar Corporation | Absorbing layers for reduced spontaneous emission effects in an integrated photodiode |
| DE102005016852A1 (de) * | 2004-06-30 | 2006-02-09 | Siemens Ag | Zeitmanagementsystem für medizinische Anwendungen, insbesondere im klinischen Umfeld |
| US7126586B2 (en) * | 2004-09-17 | 2006-10-24 | Microsoft Corporation | Data input devices and methods for detecting movement of a tracking surface by detecting laser doppler self-mixing effects of a frequency modulated laser light beam |
| US7652244B2 (en) | 2004-10-05 | 2010-01-26 | Finisar Corporation | Combined laser transmitter and photodetector receiver package |
| US7283214B2 (en) * | 2005-10-14 | 2007-10-16 | Microsoft Corporation | Self-mixing laser range sensor |
| TWI401460B (zh) * | 2005-12-20 | 2013-07-11 | Koninkl Philips Electronics Nv | 用以測量相對移動之裝置及方法 |
| WO2009074951A2 (en) * | 2007-12-11 | 2009-06-18 | Koninklijke Philips Electronics N. V. | Semiconductor laser with integrated phototransistor |
| US8467428B2 (en) * | 2008-05-09 | 2013-06-18 | Koninklijke Philips Electronics N.V. | Vertical cavity surface emitting laser device with monolithically integrated photodiode |
-
2008
- 2008-12-09 WO PCT/IB2008/055159 patent/WO2009074951A2/en not_active Ceased
- 2008-12-09 US US12/746,770 patent/US20100254423A1/en not_active Abandoned
- 2008-12-09 KR KR1020107015244A patent/KR101542729B1/ko active Active
- 2008-12-09 EP EP08860121A patent/EP2218152B1/de active Active
- 2008-12-09 JP JP2010537573A patent/JP5451632B2/ja active Active
- 2008-12-09 AT AT08860121T patent/ATE510334T1/de not_active IP Right Cessation
- 2008-12-09 CN CN2008801203928A patent/CN101897089B/zh active Active
-
2016
- 2016-01-19 US US15/000,494 patent/US9735546B2/en active Active
-
2017
- 2017-08-01 US US15/665,471 patent/US10164407B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2011507257A (ja) | 2011-03-03 |
| US20170331252A1 (en) | 2017-11-16 |
| US9735546B2 (en) | 2017-08-15 |
| EP2218152A2 (de) | 2010-08-18 |
| CN101897089B (zh) | 2013-02-06 |
| JP5451632B2 (ja) | 2014-03-26 |
| CN101897089A (zh) | 2010-11-24 |
| WO2009074951A2 (en) | 2009-06-18 |
| EP2218152B1 (de) | 2011-05-18 |
| WO2009074951A3 (en) | 2010-02-25 |
| US20160134084A1 (en) | 2016-05-12 |
| US20100254423A1 (en) | 2010-10-07 |
| KR101542729B1 (ko) | 2015-08-07 |
| KR20100094566A (ko) | 2010-08-26 |
| US10164407B2 (en) | 2018-12-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |