ATE515108T1 - Abstimmbarer dünnschicht-volumenwellen-resonator, herstellungsmethode dafür, filter, mehrschichtiges zusammengesetztes elektronisches bauelement und kommunikationsvorrichtung - Google Patents

Abstimmbarer dünnschicht-volumenwellen-resonator, herstellungsmethode dafür, filter, mehrschichtiges zusammengesetztes elektronisches bauelement und kommunikationsvorrichtung

Info

Publication number
ATE515108T1
ATE515108T1 AT04021345T AT04021345T ATE515108T1 AT E515108 T1 ATE515108 T1 AT E515108T1 AT 04021345 T AT04021345 T AT 04021345T AT 04021345 T AT04021345 T AT 04021345T AT E515108 T1 ATE515108 T1 AT E515108T1
Authority
AT
Austria
Prior art keywords
thin film
filter
communication device
electronic component
production method
Prior art date
Application number
AT04021345T
Other languages
English (en)
Inventor
Keiji Onishi
Hiroyuki Nakamura
Hiroshi Nakatsuka
Takehiko Yamakawa
Original Assignee
Panasonic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp filed Critical Panasonic Corp
Application granted granted Critical
Publication of ATE515108T1 publication Critical patent/ATE515108T1/de

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/564—Monolithic crystal filters implemented with thin-film techniques
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/02118—Means for compensation or elimination of undesirable effects of lateral leakage between adjacent resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/566—Electric coupling means therefor
    • H03H9/568—Electric coupling means therefor consisting of a ladder configuration

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
AT04021345T 2003-09-12 2004-09-08 Abstimmbarer dünnschicht-volumenwellen-resonator, herstellungsmethode dafür, filter, mehrschichtiges zusammengesetztes elektronisches bauelement und kommunikationsvorrichtung ATE515108T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003321324 2003-09-12

Publications (1)

Publication Number Publication Date
ATE515108T1 true ATE515108T1 (de) 2011-07-15

Family

ID=34191269

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04021345T ATE515108T1 (de) 2003-09-12 2004-09-08 Abstimmbarer dünnschicht-volumenwellen-resonator, herstellungsmethode dafür, filter, mehrschichtiges zusammengesetztes elektronisches bauelement und kommunikationsvorrichtung

Country Status (4)

Country Link
US (1) US7230511B2 (de)
EP (1) EP1517443B1 (de)
CN (3) CN100508385C (de)
AT (1) ATE515108T1 (de)

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JP6771635B2 (ja) * 2019-11-21 2020-10-21 信越化学工業株式会社 複合ウェーハの製造方法
CN111245393B (zh) * 2019-12-04 2021-08-10 诺思(天津)微系统有限责任公司 体声波谐振器及其制造方法、滤波器及电子设备
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Also Published As

Publication number Publication date
US20050057324A1 (en) 2005-03-17
CN101340180B (zh) 2012-09-05
EP1517443A2 (de) 2005-03-23
CN1595799A (zh) 2005-03-16
EP1517443B1 (de) 2011-06-29
CN100508385C (zh) 2009-07-01
US7230511B2 (en) 2007-06-12
CN101340181A (zh) 2009-01-07
EP1517443A3 (de) 2009-10-21
CN101340180A (zh) 2009-01-07

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