ATE397320T1 - Verfahren zur abstimmung von akustischen volumenwellen -resonatoren - Google Patents

Verfahren zur abstimmung von akustischen volumenwellen -resonatoren

Info

Publication number
ATE397320T1
ATE397320T1 AT02008095T AT02008095T ATE397320T1 AT E397320 T1 ATE397320 T1 AT E397320T1 AT 02008095 T AT02008095 T AT 02008095T AT 02008095 T AT02008095 T AT 02008095T AT E397320 T1 ATE397320 T1 AT E397320T1
Authority
AT
Austria
Prior art keywords
tuning
top electrode
frame
tuning layer
center zone
Prior art date
Application number
AT02008095T
Other languages
English (en)
Inventor
Tuomas Pensala
Original Assignee
Nokia Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nokia Corp filed Critical Nokia Corp
Application granted granted Critical
Publication of ATE397320T1 publication Critical patent/ATE397320T1/de

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/013—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for obtaining desired frequency or temperature coefficient

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
AT02008095T 2001-04-27 2002-04-11 Verfahren zur abstimmung von akustischen volumenwellen -resonatoren ATE397320T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/845,089 US6476536B1 (en) 2001-04-27 2001-04-27 Method of tuning BAW resonators

Publications (1)

Publication Number Publication Date
ATE397320T1 true ATE397320T1 (de) 2008-06-15

Family

ID=25294358

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02008095T ATE397320T1 (de) 2001-04-27 2002-04-11 Verfahren zur abstimmung von akustischen volumenwellen -resonatoren

Country Status (4)

Country Link
US (1) US6476536B1 (de)
EP (1) EP1258989B1 (de)
AT (1) ATE397320T1 (de)
DE (1) DE60226805D1 (de)

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US7425787B2 (en) 2005-10-18 2008-09-16 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic galvanic isolator incorporating single insulated decoupled stacked bulk acoustic resonator with acoustically-resonant electrical insulator
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US9673778B2 (en) 2009-06-24 2017-06-06 Avago Technologies General Ip (Singapore) Pte. Ltd. Solid mount bulk acoustic wave resonator structure comprising a bridge
US9520856B2 (en) 2009-06-24 2016-12-13 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator structure having an electrode with a cantilevered portion
US20120326807A1 (en) * 2009-06-24 2012-12-27 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic resonator structure having an electrode with a cantilevered portion
US8248185B2 (en) 2009-06-24 2012-08-21 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic resonator structure comprising a bridge
US9219464B2 (en) 2009-11-25 2015-12-22 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic wave (BAW) resonator structure having an electrode with a cantilevered portion and a piezoelectric layer with multiple dopants
US9450561B2 (en) 2009-11-25 2016-09-20 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic wave (BAW) resonator structure having an electrode with a cantilevered portion and a piezoelectric layer with varying amounts of dopant
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US8384497B2 (en) * 2009-12-18 2013-02-26 Hao Zhang Piezoelectric resonator structure having an interference structure
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US8796904B2 (en) 2011-10-31 2014-08-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic resonator comprising piezoelectric layer and inverse piezoelectric layer
US8791776B2 (en) * 2011-01-19 2014-07-29 Wei Pang Acoustic wave resonator having a gasket
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US9099983B2 (en) 2011-02-28 2015-08-04 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic wave resonator device comprising a bridge in an acoustic reflector
US9136818B2 (en) * 2011-02-28 2015-09-15 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked acoustic resonator comprising a bridge
US9203374B2 (en) 2011-02-28 2015-12-01 Avago Technologies General Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator comprising a bridge
US9444426B2 (en) 2012-10-25 2016-09-13 Avago Technologies General Ip (Singapore) Pte. Ltd. Accoustic resonator having integrated lateral feature and temperature compensation feature
US9490771B2 (en) * 2012-10-29 2016-11-08 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator comprising collar and frame
US9590165B2 (en) 2011-03-29 2017-03-07 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator comprising aluminum scandium nitride and temperature compensation feature
US9490418B2 (en) 2011-03-29 2016-11-08 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator comprising collar and acoustic reflector with temperature compensating layer
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Also Published As

Publication number Publication date
EP1258989A2 (de) 2002-11-20
US6476536B1 (en) 2002-11-05
US20020158716A1 (en) 2002-10-31
EP1258989B1 (de) 2008-05-28
EP1258989A3 (de) 2004-01-28
DE60226805D1 (de) 2008-07-10

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