ATE518115T1 - Cross-quad- und vertikal gekoppelte trägheitssensoren - Google Patents
Cross-quad- und vertikal gekoppelte trägheitssensorenInfo
- Publication number
- ATE518115T1 ATE518115T1 AT06749476T AT06749476T ATE518115T1 AT E518115 T1 ATE518115 T1 AT E518115T1 AT 06749476 T AT06749476 T AT 06749476T AT 06749476 T AT06749476 T AT 06749476T AT E518115 T1 ATE518115 T1 AT E518115T1
- Authority
- AT
- Austria
- Prior art keywords
- sensor elements
- cross
- vertically coupled
- quad
- inertial sensors
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
- Micromachines (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/106,053 US7421897B2 (en) | 2005-04-14 | 2005-04-14 | Cross-quad and vertically coupled inertial sensors |
| PCT/US2006/012963 WO2006113162A1 (en) | 2005-04-14 | 2006-04-06 | Cross-quad and vertically coupled inertial sensors |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE518115T1 true ATE518115T1 (de) | 2011-08-15 |
Family
ID=36720678
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT06749476T ATE518115T1 (de) | 2005-04-14 | 2006-04-06 | Cross-quad- und vertikal gekoppelte trägheitssensoren |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US7421897B2 (de) |
| EP (1) | EP1889005B1 (de) |
| JP (2) | JP5554921B2 (de) |
| KR (1) | KR100988440B1 (de) |
| CN (1) | CN101160506B (de) |
| AT (1) | ATE518115T1 (de) |
| TW (1) | TWI292818B (de) |
| WO (1) | WO2006113162A1 (de) |
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| US20050066728A1 (en) * | 2003-09-25 | 2005-03-31 | Kionix, Inc. | Z-axis angular rate micro electro-mechanical systems (MEMS) sensor |
| WO2005103620A1 (en) | 2004-04-14 | 2005-11-03 | Analog Devices, Inc. | Inertial sensor with a linear array of sensor elements |
-
2005
- 2005-04-14 US US11/106,053 patent/US7421897B2/en not_active Expired - Lifetime
-
2006
- 2006-04-06 WO PCT/US2006/012963 patent/WO2006113162A1/en not_active Ceased
- 2006-04-06 AT AT06749476T patent/ATE518115T1/de not_active IP Right Cessation
- 2006-04-06 KR KR1020077026513A patent/KR100988440B1/ko not_active Expired - Lifetime
- 2006-04-06 EP EP06749476A patent/EP1889005B1/de not_active Expired - Lifetime
- 2006-04-06 CN CN2006800124224A patent/CN101160506B/zh not_active Expired - Fee Related
- 2006-04-06 JP JP2008506534A patent/JP5554921B2/ja not_active Expired - Lifetime
- 2006-04-13 TW TW095113088A patent/TWI292818B/zh not_active IP Right Cessation
-
2012
- 2012-12-25 JP JP2012281176A patent/JP2013083662A/ja not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| TWI292818B (en) | 2008-01-21 |
| KR100988440B1 (ko) | 2010-10-18 |
| JP2008537114A (ja) | 2008-09-11 |
| JP2013083662A (ja) | 2013-05-09 |
| CN101160506B (zh) | 2013-02-06 |
| EP1889005A1 (de) | 2008-02-20 |
| US7421897B2 (en) | 2008-09-09 |
| KR20070120197A (ko) | 2007-12-21 |
| EP1889005B1 (de) | 2011-07-27 |
| CN101160506A (zh) | 2008-04-09 |
| US20060230830A1 (en) | 2006-10-19 |
| WO2006113162A1 (en) | 2006-10-26 |
| TW200704916A (en) | 2007-02-01 |
| JP5554921B2 (ja) | 2014-07-23 |
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| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |