ATE522955T1 - Elektrisches kontaktelement und sein herstellungsverfahren - Google Patents

Elektrisches kontaktelement und sein herstellungsverfahren

Info

Publication number
ATE522955T1
ATE522955T1 AT08836386T AT08836386T ATE522955T1 AT E522955 T1 ATE522955 T1 AT E522955T1 AT 08836386 T AT08836386 T AT 08836386T AT 08836386 T AT08836386 T AT 08836386T AT E522955 T1 ATE522955 T1 AT E522955T1
Authority
AT
Austria
Prior art keywords
electrical contact
contact element
production
layer
diffusion barrier
Prior art date
Application number
AT08836386T
Other languages
English (en)
Inventor
Walter Mueller
Helge Schmidt
Hannes Wendling
Jochen Horn
Original Assignee
Tyco Electronics Amp Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tyco Electronics Amp Gmbh filed Critical Tyco Electronics Amp Gmbh
Application granted granted Critical
Publication of ATE522955T1 publication Critical patent/ATE522955T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/18—Electroplating using modulated, pulsed or reversing current
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/01—Layered products comprising a layer of metal all layers being exclusively metallic
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/02—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
    • C23C28/021—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material including at least one metal alloy layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/02—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
    • C23C28/023—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material only coatings of metal elements only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/02—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
    • C23C28/023—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material only coatings of metal elements only
    • C23C28/025—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material only coatings of metal elements only with at least one zinc-based layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/02—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
    • C23C28/028—Including graded layers in composition or in physical properties, e.g. density, porosity, grain size
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/10—Electroplating with more than one layer of the same or of different metals
    • C25D5/12—Electroplating with more than one layer of the same or of different metals at least one layer being of nickel or chromium
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/48—After-treatment of electroplated surfaces
    • C25D5/50—After-treatment of electroplated surfaces by heat-treatment
    • C25D5/505—After-treatment of electroplated surfaces by heat-treatment of electroplated tin coatings, e.g. by melting
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/60—Electroplating characterised by the structure or texture of the layers
    • C25D5/615—Microstructure of the layers, e.g. mixed structure
    • C25D5/617—Crystalline layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/02—Contact members
    • H01R13/03—Contact members characterised by the material, e.g. plating, or coating materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R43/00—Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors
    • H01R43/16—Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors for manufacturing contact members, e.g. by punching and by bending

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Electrochemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Contacts (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Coupling Device And Connection With Printed Circuit (AREA)
AT08836386T 2007-10-01 2008-09-25 Elektrisches kontaktelement und sein herstellungsverfahren ATE522955T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007047007A DE102007047007A1 (de) 2007-10-01 2007-10-01 Elektrisches Kontaktelement und ein Verfahren zum Herstellen desselben
PCT/EP2008/008161 WO2009043536A1 (en) 2007-10-01 2008-09-25 Electrical contact element and a method of producing the same

Publications (1)

Publication Number Publication Date
ATE522955T1 true ATE522955T1 (de) 2011-09-15

Family

ID=40243917

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08836386T ATE522955T1 (de) 2007-10-01 2008-09-25 Elektrisches kontaktelement und sein herstellungsverfahren

Country Status (11)

Country Link
US (2) US20100311288A1 (de)
EP (1) EP2195885B1 (de)
JP (1) JP2010541139A (de)
CN (2) CN105226481A (de)
AT (1) ATE522955T1 (de)
DE (1) DE102007047007A1 (de)
ES (1) ES2370184T3 (de)
MX (1) MX2010003459A (de)
PL (1) PL2195885T3 (de)
PT (1) PT2195885E (de)
WO (1) WO2009043536A1 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080308300A1 (en) * 2007-06-18 2008-12-18 Conti Mark A Method of manufacturing electrically conductive strips
DE102010042526A1 (de) 2010-10-15 2012-04-19 Continental Automotive Gmbh Kontaktelement
US8574722B2 (en) 2011-05-09 2013-11-05 Tyco Electronics Corporation Corrosion resistant electrical conductor
JP2012237033A (ja) * 2011-05-11 2012-12-06 Murata Mfg Co Ltd 電子部品
DE102012208681A1 (de) * 2012-05-24 2013-11-28 Robert Bosch Gmbh Zinnbeschichtung, zugehöriges Kontaktelement und Verfahren zum Aufbringen einer Zinnbeschichtung
FR2993579B1 (fr) * 2012-07-20 2015-09-25 Tyco Electronics France Sas Procede de revetement et revetement pour contact a insertion a force
DE102012213505A1 (de) * 2012-07-31 2014-02-06 Tyco Electronics Amp Gmbh Schicht für ein elektrisches Kontaktelement, Schichtsystem und Verfahren zur Herstellung einer Schicht
US9224550B2 (en) 2012-12-26 2015-12-29 Tyco Electronics Corporation Corrosion resistant barrier formed by vapor phase tin reflow
EP2799595A1 (de) * 2013-05-03 2014-11-05 Delphi Technologies, Inc. Elektrisches Kontaktelement
DE102014117410B4 (de) * 2014-11-27 2019-01-03 Heraeus Deutschland GmbH & Co. KG Elektrisches Kontaktelement, Einpressstift, Buchse und Leadframe
JP6750545B2 (ja) * 2016-05-19 2020-09-02 株式会社オートネットワーク技術研究所 プレスフィット端子接続構造
US20180097325A1 (en) * 2016-10-03 2018-04-05 Tyco Electronics Corporation Corrosion Protection System and Method for Use with Electrical Contacts
JP6733491B2 (ja) * 2016-10-20 2020-07-29 株式会社オートネットワーク技術研究所 接続端子および接続端子の製造方法
JP6733493B2 (ja) * 2016-10-25 2020-07-29 株式会社オートネットワーク技術研究所 電気接点、コネクタ端子対、およびコネクタ対
US11183779B2 (en) * 2017-07-12 2021-11-23 ept Holding GmbH & Co. KG Press-in pin and method for producing same
DE102018109059B4 (de) 2018-01-15 2020-07-23 Doduco Solutions Gmbh Elektrischer Einpress-Kontaktstift
JP7137764B2 (ja) * 2019-08-09 2022-09-15 株式会社オートネットワーク技術研究所 端子付き電線
CN111403937A (zh) * 2020-03-24 2020-07-10 东莞立德精密工业有限公司 金属端子及其制作方法
US11280014B2 (en) * 2020-06-05 2022-03-22 Macdermid Enthone Inc. Silver/tin electroplating bath and method of using the same
EP4142062A1 (de) * 2021-08-30 2023-03-01 TE Connectivity Germany GmbH Elektrischer kontakt mit einer mehrschichtigen beschichtungsstruktur
JP2024544197A (ja) * 2021-12-02 2024-11-28 ヴィーラント ロールド プロダクツ ノース アメリカ エルエルシー 銅合金電気コネクタ部品、銅合金電気コネクタ部品上のコーティング、および、銅合金電気コネクタ部品上にコーティングを形成する方法
DE102024109322B4 (de) * 2024-04-03 2025-10-16 Enayati Oberflächentechnik GmbH Einpresspin, Baugruppe und Verfahren zur Herstellung einer solchen Baugruppe

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4756467A (en) * 1986-04-03 1988-07-12 Carlisle Corporation Solderable elements and method for forming same
US6080497A (en) * 1992-03-27 2000-06-27 The Louis Berkman Company Corrosion-resistant coated copper metal and method for making the same
DE4443461C1 (de) * 1994-12-07 1996-07-04 Wieland Werke Ag Band- bzw. drahtförmiges Verbundmaterial und seine Verwendung
US5916695A (en) * 1995-12-18 1999-06-29 Olin Corporation Tin coated electrical connector
DE19606116A1 (de) * 1996-02-20 1997-08-21 Berkenhoff Gmbh Elektrische Kontaktelemente
US6083633A (en) * 1997-06-16 2000-07-04 Olin Corporation Multi-layer diffusion barrier for a tin coated electrical connector
DE19752329A1 (de) * 1997-11-26 1999-05-27 Stolberger Metallwerke Gmbh Verfahren zur Herstellung eines metallischen Verbundbands
JP4489232B2 (ja) * 1999-06-14 2010-06-23 日鉱金属株式会社 コネクタ用めっき材料
US6905782B2 (en) * 2000-09-08 2005-06-14 Olin Corporation Tarnish deterring tin coating
WO2002057511A1 (en) * 2001-01-19 2002-07-25 The Furukawa Electric Co., Ltd. Metal-plated material and method for preparation thereof, and electric and electronic parts using the same
JP3958719B2 (ja) * 2003-06-30 2007-08-15 大同メタル工業株式会社 摺動部材
US7391116B2 (en) * 2003-10-14 2008-06-24 Gbc Metals, Llc Fretting and whisker resistant coating system and method
DE10349584B4 (de) 2003-10-24 2005-06-09 Tyco Electronics Amp Gmbh Elektrisch leitende Verbindung zwischen einem Einpressstift und einer Buchse
JP4302545B2 (ja) * 2004-02-10 2009-07-29 株式会社オートネットワーク技術研究所 プレスフィット端子
US7984841B2 (en) * 2005-06-17 2011-07-26 Fujitsu Limited Member formed with coating film having tin as its main component, coating film forming method and soldering method

Also Published As

Publication number Publication date
WO2009043536A1 (en) 2009-04-09
DE102007047007A1 (de) 2009-04-09
US20100311288A1 (en) 2010-12-09
EP2195885B1 (de) 2011-08-31
WO2009043536A8 (en) 2010-05-27
CN101821906A (zh) 2010-09-01
US20170149191A1 (en) 2017-05-25
MX2010003459A (es) 2010-08-09
PL2195885T3 (pl) 2012-01-31
CN105226481A (zh) 2016-01-06
PT2195885E (pt) 2011-11-02
JP2010541139A (ja) 2010-12-24
EP2195885A1 (de) 2010-06-16
ES2370184T3 (es) 2011-12-13

Similar Documents

Publication Publication Date Title
ATE522955T1 (de) Elektrisches kontaktelement und sein herstellungsverfahren
TW200745557A (en) Motion sensor and method of manufacturing the same
JP2011044696A5 (ja) 半導体装置の作製方法
FR2957280B1 (fr) Procede de fabrication d'un complexe metallique
JP2011530112A5 (de)
CL2012003442A1 (es) Metodo para depositar una capa de metal con particulas luminescentes incorporadas a un sustrato de metal, que comprende mezclar dichas particulas con un material metalico para producir una solucion de galvanizado, insertar el sustrato en dicha solucion y realizar un proceso de galvanizado; sutrato de metal; y metodo para autenticar un objeto metalico.
EP2194151A4 (de) Kupferlegierung auf cu-ni-si-co-basis für ein elektronisches material und verfahren zur herstellung der kupferlegierung
EP2100863A4 (de) Diamantsinterkörper mit zufriedenstellender elektrischer leitfähigkeit und herstellungsverfahren dafür
TW200611977A (en) Cored wires
BRPI1010108A2 (pt) Micro-organismo recombinante, processo para a geração de um micro-organismo recombinante, processo para produção de etanol e método para aprimoramento da utilização de arabinose
TW200746488A (en) Wiring and organic transistor and manufacturing method thereof
WO2009056235A3 (de) Mehrschichtsystem mit kontaktelementen und verfahren zum erstellen eines kontaktelements für ein mehrschichtsystem
MX394119B (es) Método para fabricar un panel emparedado
WO2009059915A3 (de) Goldhaltige nickelschicht
DK2011166T3 (da) Piezoaktuator med flerlagsindkapsling og fremgangsmåde til fremstilling deraf
SG132658A1 (en) Leadframe comprising tin plating or an intermetallic layer formed therefrom
WO2009069464A1 (ja) キッチンパネル用材料、キッチンパネル用材料の製造方法及びキッチンパネル
WO2009059917A3 (de) Silberhaltige nickelschicht
WO2011007297A3 (en) Method for producing structured conductive layers
WO2007118532A3 (de) Thermoelektrisches bauelement sowie herstellungsverfahren hierfür
PL397786A1 (pl) Warstwowy bloczek budowlany zintegrowany z termoizolacja i sposób jego wytwarzania
EP1975273A4 (de) Mehrschichtige struktur, elektrode für eine elektrische schaltung damit und verfahren zu ihrer herstellung
EP4302904A4 (de) Leitfähige zusammensetzung zum verbinden, verbindungsstruktur damit und herstellungsverfahren dafür
JP2009101351A5 (de)
TW200741872A (en) Method of forming metal wiring and method of manufacturing active matrix substrate

Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification

Ref document number: 2195885

Country of ref document: EP